JPS544084A - Manufacture for semiconductor integrated circuit - Google Patents
Manufacture for semiconductor integrated circuitInfo
- Publication number
- JPS544084A JPS544084A JP6865977A JP6865977A JPS544084A JP S544084 A JPS544084 A JP S544084A JP 6865977 A JP6865977 A JP 6865977A JP 6865977 A JP6865977 A JP 6865977A JP S544084 A JPS544084 A JP S544084A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- integrated circuit
- semiconductor integrated
- mes
- depletion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: To easily manufacture MES-FET inverters of E (Enhancement)/D (Depletion) constitution, by satisfying the conditions of impurity concentration, thickness of active layer, and width of air layer with twice ion implantation.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6865977A JPS544084A (en) | 1977-06-10 | 1977-06-10 | Manufacture for semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6865977A JPS544084A (en) | 1977-06-10 | 1977-06-10 | Manufacture for semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS544084A true JPS544084A (en) | 1979-01-12 |
Family
ID=13380042
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6865977A Pending JPS544084A (en) | 1977-06-10 | 1977-06-10 | Manufacture for semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS544084A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57178375A (en) * | 1981-04-27 | 1982-11-02 | Sumitomo Electric Ind Ltd | Semiconductor integrated circuit |
JPS58139474A (en) * | 1982-02-15 | 1983-08-18 | Oki Electric Ind Co Ltd | Manufacture of compound semiconductor device |
JPS58122631U (en) * | 1982-02-16 | 1983-08-20 | 株式会社クボタ | Gear shift control device for agricultural tractors |
JPS5944057U (en) * | 1982-07-26 | 1984-03-23 | スペリ・コ−ポレ−シヨン | GaAs depletion mode device |
US7872504B2 (en) | 2008-11-10 | 2011-01-18 | Samsung Electronics Co., Ltd. | Inverter and logic device comprising the same |
-
1977
- 1977-06-10 JP JP6865977A patent/JPS544084A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57178375A (en) * | 1981-04-27 | 1982-11-02 | Sumitomo Electric Ind Ltd | Semiconductor integrated circuit |
JPS58139474A (en) * | 1982-02-15 | 1983-08-18 | Oki Electric Ind Co Ltd | Manufacture of compound semiconductor device |
JPS58122631U (en) * | 1982-02-16 | 1983-08-20 | 株式会社クボタ | Gear shift control device for agricultural tractors |
JPS5944057U (en) * | 1982-07-26 | 1984-03-23 | スペリ・コ−ポレ−シヨン | GaAs depletion mode device |
US7872504B2 (en) | 2008-11-10 | 2011-01-18 | Samsung Electronics Co., Ltd. | Inverter and logic device comprising the same |
US8089301B2 (en) | 2008-11-10 | 2012-01-03 | Samsung Electronics Co., Ltd. | Inverter and logic device comprising the same |
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