JPS5387666A - Anodic oxidation method - Google Patents

Anodic oxidation method

Info

Publication number
JPS5387666A
JPS5387666A JP261877A JP261877A JPS5387666A JP S5387666 A JPS5387666 A JP S5387666A JP 261877 A JP261877 A JP 261877A JP 261877 A JP261877 A JP 261877A JP S5387666 A JPS5387666 A JP S5387666A
Authority
JP
Japan
Prior art keywords
anodic oxidation
oxidation method
thinnly
palce
dark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP261877A
Other languages
Japanese (ja)
Other versions
JPS5949689B2 (en
Inventor
Motoki Kondo
Kimiaki Katsukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP261877A priority Critical patent/JPS5949689B2/en
Publication of JPS5387666A publication Critical patent/JPS5387666A/en
Publication of JPS5949689B2 publication Critical patent/JPS5949689B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To form an epitaxial layer thinnly and evenly in its thickness by an anodic oxidation method by a specified voltage in a dark palce and an anodic oxidation method by a specified current through light radiation in the anodic oxidation method of semiconductor wafers.
COPYRIGHT: (C)1978,JPO&Japio
JP261877A 1977-01-12 1977-01-12 Anodizing method Expired JPS5949689B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP261877A JPS5949689B2 (en) 1977-01-12 1977-01-12 Anodizing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP261877A JPS5949689B2 (en) 1977-01-12 1977-01-12 Anodizing method

Publications (2)

Publication Number Publication Date
JPS5387666A true JPS5387666A (en) 1978-08-02
JPS5949689B2 JPS5949689B2 (en) 1984-12-04

Family

ID=11534385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP261877A Expired JPS5949689B2 (en) 1977-01-12 1977-01-12 Anodizing method

Country Status (1)

Country Link
JP (1) JPS5949689B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5595329A (en) * 1979-01-12 1980-07-19 Matsushita Electric Ind Co Ltd Preparation of semiconductor device
JPS6142921A (en) * 1984-08-06 1986-03-01 Nec Corp Oxdizing method for electrode and device therefor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02125735U (en) * 1989-03-20 1990-10-17

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5595329A (en) * 1979-01-12 1980-07-19 Matsushita Electric Ind Co Ltd Preparation of semiconductor device
JPS6233740B2 (en) * 1979-01-12 1987-07-22 Matsushita Electric Ind Co Ltd
JPS6142921A (en) * 1984-08-06 1986-03-01 Nec Corp Oxdizing method for electrode and device therefor

Also Published As

Publication number Publication date
JPS5949689B2 (en) 1984-12-04

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