JPS53120370A - Measuring method of diffusion distance of minority carriers and its apparatus - Google Patents
Measuring method of diffusion distance of minority carriers and its apparatusInfo
- Publication number
- JPS53120370A JPS53120370A JP3474877A JP3474877A JPS53120370A JP S53120370 A JPS53120370 A JP S53120370A JP 3474877 A JP3474877 A JP 3474877A JP 3474877 A JP3474877 A JP 3474877A JP S53120370 A JPS53120370 A JP S53120370A
- Authority
- JP
- Japan
- Prior art keywords
- measuring method
- minority carriers
- diffusion distance
- semiconductor
- depletion layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To measure any of the current flowing in semiconductor, surface potential, depletion layer capacity or depletion layer width or their combinations by putting the semiconductor surface in a depletion or inversion state by the use of an insulation electrode and radiating light to the surface thereof.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3474877A JPS53120370A (en) | 1977-03-30 | 1977-03-30 | Measuring method of diffusion distance of minority carriers and its apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3474877A JPS53120370A (en) | 1977-03-30 | 1977-03-30 | Measuring method of diffusion distance of minority carriers and its apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53120370A true JPS53120370A (en) | 1978-10-20 |
JPS5538054B2 JPS5538054B2 (en) | 1980-10-02 |
Family
ID=12422940
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3474877A Granted JPS53120370A (en) | 1977-03-30 | 1977-03-30 | Measuring method of diffusion distance of minority carriers and its apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53120370A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05281141A (en) * | 1992-03-30 | 1993-10-29 | Mitsui Mining & Smelting Co Ltd | Method and apparatus for photoluminescence measurement in crystal |
JPH0855893A (en) * | 1994-08-12 | 1996-02-27 | Nec Corp | Measuring element |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5198953A (en) * | 1975-02-26 | 1976-08-31 | mos daioodono raifutaimu sokuteiho |
-
1977
- 1977-03-30 JP JP3474877A patent/JPS53120370A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5198953A (en) * | 1975-02-26 | 1976-08-31 | mos daioodono raifutaimu sokuteiho |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05281141A (en) * | 1992-03-30 | 1993-10-29 | Mitsui Mining & Smelting Co Ltd | Method and apparatus for photoluminescence measurement in crystal |
JPH0855893A (en) * | 1994-08-12 | 1996-02-27 | Nec Corp | Measuring element |
Also Published As
Publication number | Publication date |
---|---|
JPS5538054B2 (en) | 1980-10-02 |
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