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Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
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Filing date
Publication date
Application filed by Matsushita Electric Industrial Co LtdfiledCriticalMatsushita Electric Industrial Co Ltd
Priority to JP6996476ApriorityCriticalpatent/JPS52152178A/en
Publication of JPS52152178ApublicationCriticalpatent/JPS52152178A/en
Testing Or Measuring Of Semiconductors Or The Like
(AREA)
Abstract
PURPOSE: To accurately know the rate of production of minority carriers by applying pulse voltage to gate electrode and measuring the change in the surface potential of substrate, in a MIS device comprising forming of a gate insulator film on a semiconductor substrate and providing a metal gate electrode thereon.
COPYRIGHT: (C)1977,JPO&Japio
JP6996476A1976-06-141976-06-14Characteristics measurement mis device
PendingJPS52152178A
(en)