JPS5384685A - Semicocductor element measuring method - Google Patents

Semicocductor element measuring method

Info

Publication number
JPS5384685A
JPS5384685A JP15922876A JP15922876A JPS5384685A JP S5384685 A JPS5384685 A JP S5384685A JP 15922876 A JP15922876 A JP 15922876A JP 15922876 A JP15922876 A JP 15922876A JP S5384685 A JPS5384685 A JP S5384685A
Authority
JP
Japan
Prior art keywords
semicocductor
measuring method
element measuring
paramaters
measure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15922876A
Other languages
Japanese (ja)
Inventor
Kazunobu Adachi
Akira Kaneko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15922876A priority Critical patent/JPS5384685A/en
Publication of JPS5384685A publication Critical patent/JPS5384685A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To measure the paramaters of an element in a short time by applying pulse voltage from a duty variable power source to the semiconductor element to be measured.
COPYRIGHT: (C)1978,JPO&Japio
JP15922876A 1976-12-30 1976-12-30 Semicocductor element measuring method Pending JPS5384685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15922876A JPS5384685A (en) 1976-12-30 1976-12-30 Semicocductor element measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15922876A JPS5384685A (en) 1976-12-30 1976-12-30 Semicocductor element measuring method

Publications (1)

Publication Number Publication Date
JPS5384685A true JPS5384685A (en) 1978-07-26

Family

ID=15689127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15922876A Pending JPS5384685A (en) 1976-12-30 1976-12-30 Semicocductor element measuring method

Country Status (1)

Country Link
JP (1) JPS5384685A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835475A (en) * 1981-08-28 1983-03-02 Nippon Telegr & Teleph Corp <Ntt> Measuring method for semiconductor device
JPS6363979A (en) * 1986-09-04 1988-03-22 Hitachi Ltd Method for aging semiconductor parts
US6404219B1 (en) 1998-12-07 2002-06-11 Mitsubishi Denki Kabushiki Kaisha Burn-in test method for a semiconductor chip and burn-in test apparatus therefor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835475A (en) * 1981-08-28 1983-03-02 Nippon Telegr & Teleph Corp <Ntt> Measuring method for semiconductor device
JPS6363979A (en) * 1986-09-04 1988-03-22 Hitachi Ltd Method for aging semiconductor parts
US6404219B1 (en) 1998-12-07 2002-06-11 Mitsubishi Denki Kabushiki Kaisha Burn-in test method for a semiconductor chip and burn-in test apparatus therefor

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