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Hitachi Ltd
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Hitachi Ltd
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Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP154176ApriorityCriticalpatent/JPS5285478A/en
Publication of JPS5285478ApublicationCriticalpatent/JPS5285478A/en
Testing Or Measuring Of Semiconductors Or The Like
(AREA)
Abstract
PURPOSE: To measure the polarity and quantity of mobile ions by depositing the surface of a MIS semiconductor device with a film exhibiting getter effect to mobile ions and forming the object to be measured near the gate insulating film and measuring the threshold voltage.
COPYRIGHT: (C)1977,JPO&Japio
JP154176A1976-01-091976-01-09Measuring method for mobile ions
PendingJPS5285478A
(en)