JPS53148963A - Deciding method for interface charge density between semiconductor substrate and insulator - Google Patents
Deciding method for interface charge density between semiconductor substrate and insulatorInfo
- Publication number
- JPS53148963A JPS53148963A JP6319977A JP6319977A JPS53148963A JP S53148963 A JPS53148963 A JP S53148963A JP 6319977 A JP6319977 A JP 6319977A JP 6319977 A JP6319977 A JP 6319977A JP S53148963 A JPS53148963 A JP S53148963A
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- semiconductor substrate
- charge density
- interface charge
- deciding method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To decide the interface charge density between the substrate and the insulator by measuring the current-voltage properties of the PNO or NON structure in case an insulator of an optional thickness is adjacent to the semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6319977A JPS53148963A (en) | 1977-06-01 | 1977-06-01 | Deciding method for interface charge density between semiconductor substrate and insulator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6319977A JPS53148963A (en) | 1977-06-01 | 1977-06-01 | Deciding method for interface charge density between semiconductor substrate and insulator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53148963A true JPS53148963A (en) | 1978-12-26 |
Family
ID=13222298
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6319977A Pending JPS53148963A (en) | 1977-06-01 | 1977-06-01 | Deciding method for interface charge density between semiconductor substrate and insulator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53148963A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4921810A (en) * | 1988-06-22 | 1990-05-01 | Nec Electronics Inc. | Method for testing semiconductor devices |
-
1977
- 1977-06-01 JP JP6319977A patent/JPS53148963A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4921810A (en) * | 1988-06-22 | 1990-05-01 | Nec Electronics Inc. | Method for testing semiconductor devices |
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