JPS53148963A - Deciding method for interface charge density between semiconductor substrate and insulator - Google Patents

Deciding method for interface charge density between semiconductor substrate and insulator

Info

Publication number
JPS53148963A
JPS53148963A JP6319977A JP6319977A JPS53148963A JP S53148963 A JPS53148963 A JP S53148963A JP 6319977 A JP6319977 A JP 6319977A JP 6319977 A JP6319977 A JP 6319977A JP S53148963 A JPS53148963 A JP S53148963A
Authority
JP
Japan
Prior art keywords
insulator
semiconductor substrate
charge density
interface charge
deciding method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6319977A
Other languages
Japanese (ja)
Inventor
Junichi Oura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6319977A priority Critical patent/JPS53148963A/en
Publication of JPS53148963A publication Critical patent/JPS53148963A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To decide the interface charge density between the substrate and the insulator by measuring the current-voltage properties of the PNO or NON structure in case an insulator of an optional thickness is adjacent to the semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP6319977A 1977-06-01 1977-06-01 Deciding method for interface charge density between semiconductor substrate and insulator Pending JPS53148963A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6319977A JPS53148963A (en) 1977-06-01 1977-06-01 Deciding method for interface charge density between semiconductor substrate and insulator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6319977A JPS53148963A (en) 1977-06-01 1977-06-01 Deciding method for interface charge density between semiconductor substrate and insulator

Publications (1)

Publication Number Publication Date
JPS53148963A true JPS53148963A (en) 1978-12-26

Family

ID=13222298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6319977A Pending JPS53148963A (en) 1977-06-01 1977-06-01 Deciding method for interface charge density between semiconductor substrate and insulator

Country Status (1)

Country Link
JP (1) JPS53148963A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4921810A (en) * 1988-06-22 1990-05-01 Nec Electronics Inc. Method for testing semiconductor devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4921810A (en) * 1988-06-22 1990-05-01 Nec Electronics Inc. Method for testing semiconductor devices

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