JPS5568639A - Treating method of semiconductor surface with heat - Google Patents
Treating method of semiconductor surface with heatInfo
- Publication number
- JPS5568639A JPS5568639A JP14116278A JP14116278A JPS5568639A JP S5568639 A JPS5568639 A JP S5568639A JP 14116278 A JP14116278 A JP 14116278A JP 14116278 A JP14116278 A JP 14116278A JP S5568639 A JPS5568639 A JP S5568639A
- Authority
- JP
- Japan
- Prior art keywords
- electron rays
- semiconductor
- pulse
- heat
- projected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To efficiently perform heat treatment in a short time, by projecting electron rays substantially in the form of a pulse upon the surface of a heated piece.
CONSTITUTION: Electron rays are accelerated and projected in the form of a pulse upon the surface of a semiconductor. The electron rays are controlled to a prescribed shape by electron lenses. The surface of the semiconductor is quickly heated and cooled by the projected electron rays. As a result, the removal of defects from an ion-implanted layer, conversion of an amorphous silicon layer on sapphire into single crystal or the like is efficiently caused in a short time.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14116278A JPS5568639A (en) | 1978-11-17 | 1978-11-17 | Treating method of semiconductor surface with heat |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14116278A JPS5568639A (en) | 1978-11-17 | 1978-11-17 | Treating method of semiconductor surface with heat |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5568639A true JPS5568639A (en) | 1980-05-23 |
Family
ID=15285567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14116278A Pending JPS5568639A (en) | 1978-11-17 | 1978-11-17 | Treating method of semiconductor surface with heat |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5568639A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56130918A (en) * | 1980-02-01 | 1981-10-14 | Commissariat Energie Atomique | Method of injecting semiconductor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5099088A (en) * | 1973-12-27 | 1975-08-06 |
-
1978
- 1978-11-17 JP JP14116278A patent/JPS5568639A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5099088A (en) * | 1973-12-27 | 1975-08-06 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56130918A (en) * | 1980-02-01 | 1981-10-14 | Commissariat Energie Atomique | Method of injecting semiconductor |
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