JPS5526636A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5526636A
JPS5526636A JP9903678A JP9903678A JPS5526636A JP S5526636 A JPS5526636 A JP S5526636A JP 9903678 A JP9903678 A JP 9903678A JP 9903678 A JP9903678 A JP 9903678A JP S5526636 A JPS5526636 A JP S5526636A
Authority
JP
Japan
Prior art keywords
layer
sio
shaped slot
opening
covered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9903678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6248907B2 (enrdf_load_stackoverflow
Inventor
Toshihiro Sekikawa
Yasuo Tarui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, Agency of Industrial Science and Technology filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP9903678A priority Critical patent/JPS5526636A/ja
Publication of JPS5526636A publication Critical patent/JPS5526636A/ja
Publication of JPS6248907B2 publication Critical patent/JPS6248907B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP9903678A 1978-08-16 1978-08-16 Semiconductor device Granted JPS5526636A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9903678A JPS5526636A (en) 1978-08-16 1978-08-16 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9903678A JPS5526636A (en) 1978-08-16 1978-08-16 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5526636A true JPS5526636A (en) 1980-02-26
JPS6248907B2 JPS6248907B2 (enrdf_load_stackoverflow) 1987-10-16

Family

ID=14236179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9903678A Granted JPS5526636A (en) 1978-08-16 1978-08-16 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5526636A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293056A (en) * 1991-06-17 1994-03-08 Mitsubishi Denki Kabushiki Kaisha Semiconductor device with high off-breakdown-voltage and low on resistance

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7659427B2 (ja) 2021-03-31 2025-04-09 キヤノン株式会社 画像形成装置及び画像処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310982A (en) * 1976-07-19 1978-01-31 Hitachi Ltd Production of mis semiconductor device
JPS5492074A (en) * 1977-12-29 1979-07-20 Nippon Telegr & Teleph Corp <Ntt> Mis field effect transistor and its manufacture

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310982A (en) * 1976-07-19 1978-01-31 Hitachi Ltd Production of mis semiconductor device
JPS5492074A (en) * 1977-12-29 1979-07-20 Nippon Telegr & Teleph Corp <Ntt> Mis field effect transistor and its manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293056A (en) * 1991-06-17 1994-03-08 Mitsubishi Denki Kabushiki Kaisha Semiconductor device with high off-breakdown-voltage and low on resistance

Also Published As

Publication number Publication date
JPS6248907B2 (enrdf_load_stackoverflow) 1987-10-16

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