JPS5516427A - Method of manufacturing semiconductor device - Google Patents
Method of manufacturing semiconductor deviceInfo
- Publication number
- JPS5516427A JPS5516427A JP8898678A JP8898678A JPS5516427A JP S5516427 A JPS5516427 A JP S5516427A JP 8898678 A JP8898678 A JP 8898678A JP 8898678 A JP8898678 A JP 8898678A JP S5516427 A JPS5516427 A JP S5516427A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- resistance
- polysilicon
- semiconductor device
- drilling holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To improve accuracy of a resistance value of a polysilicon layer and to simplify process by performing the impurities doping of polysilicon before drilling holes for taking out electrodes.
CONSTITUTION: Before drilling holes on an insulating membrane a polysilicon layer 10 will be doped with impurities followed by pattering the said layer 10. By doing so, the resistance value of the said layer will be easily controlled, especially doping ps (layer resistance) can directly measured by a 4-terminals method, theresistance value of resistance layer 10 can be regulated with an extreme accuracy.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8898678A JPS5516427A (en) | 1978-07-21 | 1978-07-21 | Method of manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8898678A JPS5516427A (en) | 1978-07-21 | 1978-07-21 | Method of manufacturing semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5516427A true JPS5516427A (en) | 1980-02-05 |
Family
ID=13958114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8898678A Pending JPS5516427A (en) | 1978-07-21 | 1978-07-21 | Method of manufacturing semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5516427A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61219171A (en) * | 1985-03-25 | 1986-09-29 | Sanken Electric Co Ltd | Multi-cell type transistor |
JP2002334888A (en) * | 2001-05-08 | 2002-11-22 | Sanken Electric Co Ltd | Semiconductor device and manufacturing method therefor |
-
1978
- 1978-07-21 JP JP8898678A patent/JPS5516427A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61219171A (en) * | 1985-03-25 | 1986-09-29 | Sanken Electric Co Ltd | Multi-cell type transistor |
JPH0329299B2 (en) * | 1985-03-25 | 1991-04-23 | Sanken Electric Co Ltd | |
JP2002334888A (en) * | 2001-05-08 | 2002-11-22 | Sanken Electric Co Ltd | Semiconductor device and manufacturing method therefor |
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