JPS52137987A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS52137987A JPS52137987A JP5489676A JP5489676A JPS52137987A JP S52137987 A JPS52137987 A JP S52137987A JP 5489676 A JP5489676 A JP 5489676A JP 5489676 A JP5489676 A JP 5489676A JP S52137987 A JPS52137987 A JP S52137987A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- production
- semiconductor device
- polycrystalline
- electrode windows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To form a shallow diffused layer under electrode windows in later impurity diffusion process by depositing a thin insulator layer on a polycrystalline Si layer for wiring covering the electrode windows then doping an impurity to the polycrystalline Si layer.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5489676A JPS52137987A (en) | 1976-05-14 | 1976-05-14 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5489676A JPS52137987A (en) | 1976-05-14 | 1976-05-14 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52137987A true JPS52137987A (en) | 1977-11-17 |
JPS5751924B2 JPS5751924B2 (en) | 1982-11-05 |
Family
ID=12983352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5489676A Granted JPS52137987A (en) | 1976-05-14 | 1976-05-14 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52137987A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57197636U (en) * | 1981-06-12 | 1982-12-15 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49131384A (en) * | 1973-04-18 | 1974-12-17 | ||
JPS5151279A (en) * | 1974-10-31 | 1976-05-06 | Oki Electric Ind Co Ltd | HANDOTAISHUSEKIKAIRONO SEIZOHOHO |
-
1976
- 1976-05-14 JP JP5489676A patent/JPS52137987A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49131384A (en) * | 1973-04-18 | 1974-12-17 | ||
JPS5151279A (en) * | 1974-10-31 | 1976-05-06 | Oki Electric Ind Co Ltd | HANDOTAISHUSEKIKAIRONO SEIZOHOHO |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57197636U (en) * | 1981-06-12 | 1982-12-15 |
Also Published As
Publication number | Publication date |
---|---|
JPS5751924B2 (en) | 1982-11-05 |
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