JPS5376666A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5376666A
JPS5376666A JP15240076A JP15240076A JPS5376666A JP S5376666 A JPS5376666 A JP S5376666A JP 15240076 A JP15240076 A JP 15240076A JP 15240076 A JP15240076 A JP 15240076A JP S5376666 A JPS5376666 A JP S5376666A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
etching
ion implantation
different rates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15240076A
Other languages
Japanese (ja)
Inventor
Kunio Nakamura
Kazunari Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15240076A priority Critical patent/JPS5376666A/en
Publication of JPS5376666A publication Critical patent/JPS5376666A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To form openings in two layer insulation films of different rates of etching with good accuracy by one photoetching process through the use of an ion implantation method.
COPYRIGHT: (C)1978,JPO&Japio
JP15240076A 1976-12-17 1976-12-17 Production of semiconductor device Pending JPS5376666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15240076A JPS5376666A (en) 1976-12-17 1976-12-17 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15240076A JPS5376666A (en) 1976-12-17 1976-12-17 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5376666A true JPS5376666A (en) 1978-07-07

Family

ID=15539674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15240076A Pending JPS5376666A (en) 1976-12-17 1976-12-17 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5376666A (en)

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