JPS5513982A - Producing method of microscopic pattern - Google Patents
Producing method of microscopic patternInfo
- Publication number
- JPS5513982A JPS5513982A JP8757278A JP8757278A JPS5513982A JP S5513982 A JPS5513982 A JP S5513982A JP 8757278 A JP8757278 A JP 8757278A JP 8757278 A JP8757278 A JP 8757278A JP S5513982 A JPS5513982 A JP S5513982A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- etching
- area
- photoresist
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To nullify the effect of etching speed variation by forming in advance a photoresist pattern on the area to be frequently etched before the vapor-staying of metal film.
CONSTITUTION: After an impurity area 3 is formed on a semiconductor base plate 1, a photoresist pattern 9 is formed in the area to be applied with frequent etching of vapor-stayed metal film. Next, a photoresist is applied on the surface, a disired pattern is applied to be etched with etcing liquid. Etching is completed when the etching of a microscopic pattern area 5 is finished, resist patterns 9, 10 being removed. Thus, a microscopic pattern can be formed with good reproducing condition. Also, regarding an enlarged pattern area, a desired pattern can be obtained by the separation during the process of photoresist removal, though much snow 7 may be generated at the end of etching period.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8757278A JPS5513982A (en) | 1978-07-17 | 1978-07-17 | Producing method of microscopic pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8757278A JPS5513982A (en) | 1978-07-17 | 1978-07-17 | Producing method of microscopic pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5513982A true JPS5513982A (en) | 1980-01-31 |
Family
ID=13918704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8757278A Pending JPS5513982A (en) | 1978-07-17 | 1978-07-17 | Producing method of microscopic pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5513982A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59115245A (en) * | 1982-12-07 | 1984-07-03 | 東洋製罐株式会社 | Vessel |
JPS59138534U (en) * | 1983-03-04 | 1984-09-17 | 大日本印刷株式会社 | Can body with hanging equipment |
JPS62179914U (en) * | 1986-05-06 | 1987-11-14 |
-
1978
- 1978-07-17 JP JP8757278A patent/JPS5513982A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59115245A (en) * | 1982-12-07 | 1984-07-03 | 東洋製罐株式会社 | Vessel |
JPS59138534U (en) * | 1983-03-04 | 1984-09-17 | 大日本印刷株式会社 | Can body with hanging equipment |
JPS62179914U (en) * | 1986-05-06 | 1987-11-14 |
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