JPS5549274A - Manufacturing method for multi-nozzle orifice plate - Google Patents

Manufacturing method for multi-nozzle orifice plate

Info

Publication number
JPS5549274A
JPS5549274A JP12250878A JP12250878A JPS5549274A JP S5549274 A JPS5549274 A JP S5549274A JP 12250878 A JP12250878 A JP 12250878A JP 12250878 A JP12250878 A JP 12250878A JP S5549274 A JPS5549274 A JP S5549274A
Authority
JP
Japan
Prior art keywords
orifice
orifice plate
grinding
etching
sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12250878A
Other languages
Japanese (ja)
Other versions
JPS6043308B2 (en
Inventor
Toshihisa Hamano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP12250878A priority Critical patent/JPS6043308B2/en
Publication of JPS5549274A publication Critical patent/JPS5549274A/en
Publication of JPS6043308B2 publication Critical patent/JPS6043308B2/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Nozzles (AREA)
  • Weting (AREA)

Abstract

PURPOSE:To obtain a precise, high-density and long-sized indented type orifice simply by etching a single-crystal plate anisotropically to form many mesa sections, forming an orifice plate layer using the mesa sections as projected type masters and the grinding the surface. CONSTITUTION:For example, an etching protective film 2 (e.g. an Si2O4 film with a thickness ranging from 4000-5000Angstrom ) is formed on an Si single-crystal plate 1. And then, a hole-opening pattern is prepared by using photoligthographic technology, etc., and mesa sections 12 with the hole-opening sections as the tops are provided by using anisotropic etching. After removing the protective film 2, Cu, etc. 3 is soldered to be used as a mark at the time of grinding, and it is also coated with an exfoliating agent 4 to enable it to easily come off a mold. And then, an orifice platemaking material 5 is poured into that, and it is roughly ground up to the mark 3. After completion of precision grinding, an orifice plate 5A is exfoliated so that a multi-nozzle orifice plate 5A provided with an orifice 7 is obtained.
JP12250878A 1978-10-06 1978-10-06 How to make a multi-nozzle orifice plate Expired JPS6043308B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12250878A JPS6043308B2 (en) 1978-10-06 1978-10-06 How to make a multi-nozzle orifice plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12250878A JPS6043308B2 (en) 1978-10-06 1978-10-06 How to make a multi-nozzle orifice plate

Publications (2)

Publication Number Publication Date
JPS5549274A true JPS5549274A (en) 1980-04-09
JPS6043308B2 JPS6043308B2 (en) 1985-09-27

Family

ID=14837576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12250878A Expired JPS6043308B2 (en) 1978-10-06 1978-10-06 How to make a multi-nozzle orifice plate

Country Status (1)

Country Link
JP (1) JPS6043308B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4612554A (en) * 1985-07-29 1986-09-16 Xerox Corporation High density thermal ink jet printhead
JPH0278559A (en) * 1988-06-21 1990-03-19 Canon Inc Orifice plate for ink jet recording head, ink jet recording head using the same plate, and ink jet recorder using the same head
US5508725A (en) * 1989-09-18 1996-04-16 Canon Kabushiki Kaisha Ink jet head having trapezoidal ink passages, ink cartridge and recording apparatus with same
KR100735992B1 (en) 2004-12-08 2007-07-06 세이코 엡슨 가부시키가이샤 Method for manufacturing droplet ejection head, droplet ejection head, and droplet ejection apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02118512U (en) * 1989-03-10 1990-09-25

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4612554A (en) * 1985-07-29 1986-09-16 Xerox Corporation High density thermal ink jet printhead
JPH0278559A (en) * 1988-06-21 1990-03-19 Canon Inc Orifice plate for ink jet recording head, ink jet recording head using the same plate, and ink jet recorder using the same head
US5508725A (en) * 1989-09-18 1996-04-16 Canon Kabushiki Kaisha Ink jet head having trapezoidal ink passages, ink cartridge and recording apparatus with same
KR100735992B1 (en) 2004-12-08 2007-07-06 세이코 엡슨 가부시키가이샤 Method for manufacturing droplet ejection head, droplet ejection head, and droplet ejection apparatus

Also Published As

Publication number Publication date
JPS6043308B2 (en) 1985-09-27

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