JPS55126953A - Scanning electron microscope - Google Patents
Scanning electron microscopeInfo
- Publication number
- JPS55126953A JPS55126953A JP3390979A JP3390979A JPS55126953A JP S55126953 A JPS55126953 A JP S55126953A JP 3390979 A JP3390979 A JP 3390979A JP 3390979 A JP3390979 A JP 3390979A JP S55126953 A JPS55126953 A JP S55126953A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- image
- ray tube
- cathode ray
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3390979A JPS55126953A (en) | 1979-03-23 | 1979-03-23 | Scanning electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3390979A JPS55126953A (en) | 1979-03-23 | 1979-03-23 | Scanning electron microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55126953A true JPS55126953A (en) | 1980-10-01 |
JPH0324017B2 JPH0324017B2 (ja) | 1991-04-02 |
Family
ID=12399634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3390979A Granted JPS55126953A (en) | 1979-03-23 | 1979-03-23 | Scanning electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55126953A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013229189A (ja) * | 2012-04-26 | 2013-11-07 | Hitachi High-Technologies Corp | 試料の寸法測定方法、および荷電粒子線装置 |
-
1979
- 1979-03-23 JP JP3390979A patent/JPS55126953A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013229189A (ja) * | 2012-04-26 | 2013-11-07 | Hitachi High-Technologies Corp | 試料の寸法測定方法、および荷電粒子線装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0324017B2 (ja) | 1991-04-02 |
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