JPS57130356A - Specimen image display device - Google Patents

Specimen image display device

Info

Publication number
JPS57130356A
JPS57130356A JP1554081A JP1554081A JPS57130356A JP S57130356 A JPS57130356 A JP S57130356A JP 1554081 A JP1554081 A JP 1554081A JP 1554081 A JP1554081 A JP 1554081A JP S57130356 A JPS57130356 A JP S57130356A
Authority
JP
Japan
Prior art keywords
scanning
signals
specimen
crt12
grid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1554081A
Other languages
Japanese (ja)
Inventor
Takashi Shimatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP1554081A priority Critical patent/JPS57130356A/en
Publication of JPS57130356A publication Critical patent/JPS57130356A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Closed-Circuit Television Systems (AREA)

Abstract

PURPOSE:To obtain a specimen image emphasized on its contour by switching over a point scanning and an area scanning at a proper timing and synthesizing signals acquired thereby. CONSTITUTION:An electron beam is deflected by horizontal and vertical scanning signals from a scanning signal generating circuit, and scans on a specimen 5. Specimen data signals from the specimen 5 are detected by a detector 9, and are sent to a grid G of a CRT 12 through an amplifier 10 and a control circuit 11. On the CRT12, the electron beam repeats a point scanning and an area scanning for every horizontal line. During a point scanning, signals from the detector 9 are sent to the grid G of the CRT12 through the amplifier 10 as they are, and during an area scanning, signals from the detector 9 are sent to the grid G of the CRT12 with the polarity reversed.
JP1554081A 1981-02-04 1981-02-04 Specimen image display device Pending JPS57130356A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1554081A JPS57130356A (en) 1981-02-04 1981-02-04 Specimen image display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1554081A JPS57130356A (en) 1981-02-04 1981-02-04 Specimen image display device

Publications (1)

Publication Number Publication Date
JPS57130356A true JPS57130356A (en) 1982-08-12

Family

ID=11891622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1554081A Pending JPS57130356A (en) 1981-02-04 1981-02-04 Specimen image display device

Country Status (1)

Country Link
JP (1) JPS57130356A (en)

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