JPS5490969A - Glass attaching method to semiconductor groove - Google Patents
Glass attaching method to semiconductor grooveInfo
- Publication number
- JPS5490969A JPS5490969A JP15749077A JP15749077A JPS5490969A JP S5490969 A JPS5490969 A JP S5490969A JP 15749077 A JP15749077 A JP 15749077A JP 15749077 A JP15749077 A JP 15749077A JP S5490969 A JPS5490969 A JP S5490969A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- groove
- moisture
- ammonia concentration
- electrophoresis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To increase the yield rate of element, by making good for the glass coating condition, through specifying the ammonia concentration and the solubility of moisture of the glass dispersion liquid used, in coating the glass powder selectively in the grooves on the semiconductor substrate with electrophoresis.
CONSTITUTION: The N type layer 1 is grown on the N+ type Si substrate, the P type layer 5 is formed by diffusion, and the groove 3 reaching the layer 1 is made on the specified region with the SiO2 film 2 covered. Next, to protect the end of the PN junction for insulation, consisting of the layers 1 and 5 exposed in the groove 3, the end is burried with the glass powder 4. In this case, the composition of glass dispersion liquid used for electrophoresis is determined as follows: Ammonia concentration is more than 1.7 × 10-2 mol/1 and moisture is less than 2 volume %, favorably, ammonia concentration 1.7 × 10-2 to 1.1 × 10-1 mol/1 and moisture of 0 to 1 volume %. Thus, the swell of glass of the shoulder of the groove 3 and the air void in the groove 3 are not caused and the glass 4 can be coated with good shape.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15749077A JPS5490969A (en) | 1977-12-28 | 1977-12-28 | Glass attaching method to semiconductor groove |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15749077A JPS5490969A (en) | 1977-12-28 | 1977-12-28 | Glass attaching method to semiconductor groove |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5490969A true JPS5490969A (en) | 1979-07-19 |
JPS5733850B2 JPS5733850B2 (en) | 1982-07-20 |
Family
ID=15650816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15749077A Granted JPS5490969A (en) | 1977-12-28 | 1977-12-28 | Glass attaching method to semiconductor groove |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5490969A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5223272A (en) * | 1975-08-15 | 1977-02-22 | Hitachi Ltd | Method of manufacturing glass passivation semiconductor device |
JPS5227362A (en) * | 1975-08-27 | 1977-03-01 | Hitachi Ltd | Formation method of passivation film |
JPS5227363A (en) * | 1975-08-27 | 1977-03-01 | Hitachi Ltd | Formation method of glass film |
-
1977
- 1977-12-28 JP JP15749077A patent/JPS5490969A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5223272A (en) * | 1975-08-15 | 1977-02-22 | Hitachi Ltd | Method of manufacturing glass passivation semiconductor device |
JPS5227362A (en) * | 1975-08-27 | 1977-03-01 | Hitachi Ltd | Formation method of passivation film |
JPS5227363A (en) * | 1975-08-27 | 1977-03-01 | Hitachi Ltd | Formation method of glass film |
Also Published As
Publication number | Publication date |
---|---|
JPS5733850B2 (en) | 1982-07-20 |
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