JPS543472A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS543472A JPS543472A JP6790477A JP6790477A JPS543472A JP S543472 A JPS543472 A JP S543472A JP 6790477 A JP6790477 A JP 6790477A JP 6790477 A JP6790477 A JP 6790477A JP S543472 A JPS543472 A JP S543472A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- insulator film
- layer
- epitaxial layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To obtain a flat isolation region with no polishing, by flowing an epitaxial layer on the semiconductor substrate on which a buried layer is formed and then drilling the concave groove to the insulator film coated on the epitaxial layer with eaves caused to the insulator film in order to form an oxide layer there.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6790477A JPS543472A (en) | 1977-06-10 | 1977-06-10 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6790477A JPS543472A (en) | 1977-06-10 | 1977-06-10 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS543472A true JPS543472A (en) | 1979-01-11 |
Family
ID=13358339
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6790477A Pending JPS543472A (en) | 1977-06-10 | 1977-06-10 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS543472A (en) |
-
1977
- 1977-06-10 JP JP6790477A patent/JPS543472A/en active Pending
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