JPS543472A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS543472A
JPS543472A JP6790477A JP6790477A JPS543472A JP S543472 A JPS543472 A JP S543472A JP 6790477 A JP6790477 A JP 6790477A JP 6790477 A JP6790477 A JP 6790477A JP S543472 A JPS543472 A JP S543472A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
insulator film
layer
epitaxial layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6790477A
Other languages
Japanese (ja)
Inventor
Yoichi Tamaoki
Koji Honma
Mitsuo Nanba
Hisayuki Higuchi
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6790477A priority Critical patent/JPS543472A/en
Publication of JPS543472A publication Critical patent/JPS543472A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To obtain a flat isolation region with no polishing, by flowing an epitaxial layer on the semiconductor substrate on which a buried layer is formed and then drilling the concave groove to the insulator film coated on the epitaxial layer with eaves caused to the insulator film in order to form an oxide layer there.
COPYRIGHT: (C)1979,JPO&Japio
JP6790477A 1977-06-10 1977-06-10 Manufacture of semiconductor device Pending JPS543472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6790477A JPS543472A (en) 1977-06-10 1977-06-10 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6790477A JPS543472A (en) 1977-06-10 1977-06-10 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS543472A true JPS543472A (en) 1979-01-11

Family

ID=13358339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6790477A Pending JPS543472A (en) 1977-06-10 1977-06-10 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS543472A (en)

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