JPS5431290A - Semiconductor integrated circuit device and its manufacture - Google Patents
Semiconductor integrated circuit device and its manufactureInfo
- Publication number
- JPS5431290A JPS5431290A JP9725977A JP9725977A JPS5431290A JP S5431290 A JPS5431290 A JP S5431290A JP 9725977 A JP9725977 A JP 9725977A JP 9725977 A JP9725977 A JP 9725977A JP S5431290 A JPS5431290 A JP S5431290A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- integrated circuit
- semiconductor integrated
- circuit device
- crossover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Semiconductor Memories (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To realize a high-yield manufacturing process for the high-density IC through reduction of the number of both the contact and the metal wiring, by securing a crossover between the polycrystal silicon layer and the diffusion layer of the silicon gate MOSIC.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9725977A JPS5431290A (en) | 1977-08-12 | 1977-08-12 | Semiconductor integrated circuit device and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9725977A JPS5431290A (en) | 1977-08-12 | 1977-08-12 | Semiconductor integrated circuit device and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5431290A true JPS5431290A (en) | 1979-03-08 |
Family
ID=14187539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9725977A Pending JPS5431290A (en) | 1977-08-12 | 1977-08-12 | Semiconductor integrated circuit device and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5431290A (en) |
-
1977
- 1977-08-12 JP JP9725977A patent/JPS5431290A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52156580A (en) | Semiconductor integrated circuit device and its production | |
JPS5431290A (en) | Semiconductor integrated circuit device and its manufacture | |
JPS51147273A (en) | Manufacturing process of semiconductor device | |
JPS5389374A (en) | Production of semiconductor device | |
JPS5331964A (en) | Production of semiconductor substrates | |
JPS51121272A (en) | Manufacturing method for semiconductor devices | |
JPS5230185A (en) | Process for producing semiconductor device | |
JPS5272571A (en) | Production of semiconductor device | |
JPS5225582A (en) | Production method of semiconductor device | |
JPS5212587A (en) | Mis type semi-conductor integrated device and its production method | |
JPS5368165A (en) | Production of semiconductor device | |
JPS5427382A (en) | Semiconductor integrated circuit device | |
JPS51112266A (en) | Semiconductor device production method | |
JPS51113461A (en) | A method for manufacturing semiconductor devices | |
JPS5264274A (en) | Wafer soldering device for semiconductor devices | |
JPS5310282A (en) | Production of mos type semiconductor integrated circuit | |
JPS5398788A (en) | Manufacture for semiconductor integrated circuit | |
JPS5428580A (en) | Manufacture of semiconductor device | |
JPS5399782A (en) | Semiconductor integrated circuit device and its manufacture | |
JPS5331966A (en) | Production of semiconductor device | |
JPS5349945A (en) | Manufacture of semiconductor device | |
JPS53108773A (en) | Production of semiconductor device | |
JPS5265689A (en) | Semiconductor integrated circuit and its production | |
JPS5434784A (en) | Semiconductor integrated circuit device | |
JPS5335390A (en) | Production of semiconductor device |