JPS5310282A - Production of mos type semiconductor integrated circuit - Google Patents
Production of mos type semiconductor integrated circuitInfo
- Publication number
- JPS5310282A JPS5310282A JP8485076A JP8485076A JPS5310282A JP S5310282 A JPS5310282 A JP S5310282A JP 8485076 A JP8485076 A JP 8485076A JP 8485076 A JP8485076 A JP 8485076A JP S5310282 A JPS5310282 A JP S5310282A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- type semiconductor
- semiconductor integrated
- mos type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To produce a MOSIC of a high breakdown voltage by selectively implanting phosphorus ions to a B-doped substrate surface and making a part of the source, drain of MOSFETs through selective oxidation.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8485076A JPS5931230B2 (en) | 1976-07-15 | 1976-07-15 | Method for manufacturing MOS type semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8485076A JPS5931230B2 (en) | 1976-07-15 | 1976-07-15 | Method for manufacturing MOS type semiconductor integrated circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5310282A true JPS5310282A (en) | 1978-01-30 |
JPS5931230B2 JPS5931230B2 (en) | 1984-07-31 |
Family
ID=13842263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8485076A Expired JPS5931230B2 (en) | 1976-07-15 | 1976-07-15 | Method for manufacturing MOS type semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5931230B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60171975U (en) * | 1984-04-24 | 1985-11-14 | 自動車電機工業株式会社 | automotive fuel pump |
US11164797B2 (en) | 2018-02-15 | 2021-11-02 | Fuji Electric Co., Ltd. | Method of manufacturing semiconductor integrated circuit |
-
1976
- 1976-07-15 JP JP8485076A patent/JPS5931230B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60171975U (en) * | 1984-04-24 | 1985-11-14 | 自動車電機工業株式会社 | automotive fuel pump |
US11164797B2 (en) | 2018-02-15 | 2021-11-02 | Fuji Electric Co., Ltd. | Method of manufacturing semiconductor integrated circuit |
Also Published As
Publication number | Publication date |
---|---|
JPS5931230B2 (en) | 1984-07-31 |
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