JPS5286088A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5286088A
JPS5286088A JP244776A JP244776A JPS5286088A JP S5286088 A JPS5286088 A JP S5286088A JP 244776 A JP244776 A JP 244776A JP 244776 A JP244776 A JP 244776A JP S5286088 A JPS5286088 A JP S5286088A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
impulity
amonalous
concentrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP244776A
Other languages
Japanese (ja)
Inventor
Hiroyuki Tango
Yukio Omori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP244776A priority Critical patent/JPS5286088A/en
Publication of JPS5286088A publication Critical patent/JPS5286088A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To stop the generation of amonalous drain current by raising threshold voltage of parasitic MOS transistor by making insular semiconductor film whose impulity concentration for sloping part is more concentrated than other part on the insulative substrate and constructing semiconductor element on this film.
COPYRIGHT: (C)1977,JPO&Japio
JP244776A 1976-01-13 1976-01-13 Manufacture of semiconductor device Pending JPS5286088A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP244776A JPS5286088A (en) 1976-01-13 1976-01-13 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP244776A JPS5286088A (en) 1976-01-13 1976-01-13 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5286088A true JPS5286088A (en) 1977-07-16

Family

ID=11529521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP244776A Pending JPS5286088A (en) 1976-01-13 1976-01-13 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5286088A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574164A (en) * 1980-06-09 1982-01-09 Nec Corp Sos/mos transistor
JPS63237574A (en) * 1987-03-26 1988-10-04 Nec Corp Manufacture of mis semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50106591A (en) * 1973-12-03 1975-08-22
JPS51101476A (en) * 1975-03-04 1976-09-07 Fujitsu Ltd Handotaisochino seizohoho

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50106591A (en) * 1973-12-03 1975-08-22
JPS51101476A (en) * 1975-03-04 1976-09-07 Fujitsu Ltd Handotaisochino seizohoho

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574164A (en) * 1980-06-09 1982-01-09 Nec Corp Sos/mos transistor
JPS63237574A (en) * 1987-03-26 1988-10-04 Nec Corp Manufacture of mis semiconductor device

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