JPS54105476A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS54105476A JPS54105476A JP1217478A JP1217478A JPS54105476A JP S54105476 A JPS54105476 A JP S54105476A JP 1217478 A JP1217478 A JP 1217478A JP 1217478 A JP1217478 A JP 1217478A JP S54105476 A JPS54105476 A JP S54105476A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- mask
- wiring
- film
- staircase shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1217478A JPS54105476A (en) | 1978-02-06 | 1978-02-06 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1217478A JPS54105476A (en) | 1978-02-06 | 1978-02-06 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54105476A true JPS54105476A (en) | 1979-08-18 |
JPS633453B2 JPS633453B2 (ja) | 1988-01-23 |
Family
ID=11798055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1217478A Granted JPS54105476A (en) | 1978-02-06 | 1978-02-06 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54105476A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5693319A (en) * | 1979-12-27 | 1981-07-28 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5764933A (en) * | 1980-10-07 | 1982-04-20 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS57137472A (en) * | 1981-02-17 | 1982-08-25 | Nec Corp | Etching method for polycrystalline silicon |
JPS57202754A (en) * | 1981-06-09 | 1982-12-11 | Nec Corp | Manufacture of semiconductor device |
JPS5831562A (ja) * | 1981-08-19 | 1983-02-24 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
JPS5994424A (ja) * | 1982-11-18 | 1984-05-31 | Yokogawa Hewlett Packard Ltd | パタ−ン形成方法 |
JP2002347926A (ja) * | 2001-05-21 | 2002-12-04 | Toshiba Logistics Corp | 物品の仕分け装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52126184A (en) * | 1976-04-15 | 1977-10-22 | Sony Corp | Preparation of semiconductor device |
JPS52131471A (en) * | 1976-04-28 | 1977-11-04 | Hitachi Ltd | Surface treatment of substrate |
-
1978
- 1978-02-06 JP JP1217478A patent/JPS54105476A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52126184A (en) * | 1976-04-15 | 1977-10-22 | Sony Corp | Preparation of semiconductor device |
JPS52131471A (en) * | 1976-04-28 | 1977-11-04 | Hitachi Ltd | Surface treatment of substrate |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5693319A (en) * | 1979-12-27 | 1981-07-28 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH0117249B2 (ja) * | 1979-12-27 | 1989-03-29 | Fujitsu Ltd | |
JPS5764933A (en) * | 1980-10-07 | 1982-04-20 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS57137472A (en) * | 1981-02-17 | 1982-08-25 | Nec Corp | Etching method for polycrystalline silicon |
JPS57202754A (en) * | 1981-06-09 | 1982-12-11 | Nec Corp | Manufacture of semiconductor device |
JPS5831562A (ja) * | 1981-08-19 | 1983-02-24 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
JPS5994424A (ja) * | 1982-11-18 | 1984-05-31 | Yokogawa Hewlett Packard Ltd | パタ−ン形成方法 |
JPH0562458B2 (ja) * | 1982-11-18 | 1993-09-08 | Hewlett Packard Yokogawa | |
JP2002347926A (ja) * | 2001-05-21 | 2002-12-04 | Toshiba Logistics Corp | 物品の仕分け装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS633453B2 (ja) | 1988-01-23 |
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