JPS52126184A - Preparation of semiconductor device - Google Patents

Preparation of semiconductor device

Info

Publication number
JPS52126184A
JPS52126184A JP4287376A JP4287376A JPS52126184A JP S52126184 A JPS52126184 A JP S52126184A JP 4287376 A JP4287376 A JP 4287376A JP 4287376 A JP4287376 A JP 4287376A JP S52126184 A JPS52126184 A JP S52126184A
Authority
JP
Japan
Prior art keywords
preparation
semiconductor device
layer
steps
metallic layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4287376A
Other languages
Japanese (ja)
Inventor
Tadaharu Tsuyuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP4287376A priority Critical patent/JPS52126184A/en
Publication of JPS52126184A publication Critical patent/JPS52126184A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To avoid the disconnection steps by depositing a photosensitive and soluble layer onto a wiring metallic layer and exposing the first layer to light plural times to remove the exposed portion by dissolution; the metallic layer being etched using a mask at each removal process to form the steps at its both ends.
COPYRIGHT: (C)1977,JPO&Japio
JP4287376A 1976-04-15 1976-04-15 Preparation of semiconductor device Pending JPS52126184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4287376A JPS52126184A (en) 1976-04-15 1976-04-15 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4287376A JPS52126184A (en) 1976-04-15 1976-04-15 Preparation of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52126184A true JPS52126184A (en) 1977-10-22

Family

ID=12648145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4287376A Pending JPS52126184A (en) 1976-04-15 1976-04-15 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52126184A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461876A (en) * 1977-10-26 1979-05-18 Sharp Corp Etching method of insulation film of semiconductor device
JPS54105476A (en) * 1978-02-06 1979-08-18 Sony Corp Manufacture of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461876A (en) * 1977-10-26 1979-05-18 Sharp Corp Etching method of insulation film of semiconductor device
JPS5824949B2 (en) * 1977-10-26 1983-05-24 シャープ株式会社 Insulating film etching method for semiconductor devices
JPS54105476A (en) * 1978-02-06 1979-08-18 Sony Corp Manufacture of semiconductor device
JPS633453B2 (en) * 1978-02-06 1988-01-23 Sony Corp

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