JPS52126184A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS52126184A JPS52126184A JP4287376A JP4287376A JPS52126184A JP S52126184 A JPS52126184 A JP S52126184A JP 4287376 A JP4287376 A JP 4287376A JP 4287376 A JP4287376 A JP 4287376A JP S52126184 A JPS52126184 A JP S52126184A
- Authority
- JP
- Japan
- Prior art keywords
- preparation
- semiconductor device
- layer
- steps
- metallic layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE: To avoid the disconnection steps by depositing a photosensitive and soluble layer onto a wiring metallic layer and exposing the first layer to light plural times to remove the exposed portion by dissolution; the metallic layer being etched using a mask at each removal process to form the steps at its both ends.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4287376A JPS52126184A (en) | 1976-04-15 | 1976-04-15 | Preparation of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4287376A JPS52126184A (en) | 1976-04-15 | 1976-04-15 | Preparation of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52126184A true JPS52126184A (en) | 1977-10-22 |
Family
ID=12648145
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4287376A Pending JPS52126184A (en) | 1976-04-15 | 1976-04-15 | Preparation of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52126184A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5461876A (en) * | 1977-10-26 | 1979-05-18 | Sharp Corp | Etching method of insulation film of semiconductor device |
JPS54105476A (en) * | 1978-02-06 | 1979-08-18 | Sony Corp | Manufacture of semiconductor device |
-
1976
- 1976-04-15 JP JP4287376A patent/JPS52126184A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5461876A (en) * | 1977-10-26 | 1979-05-18 | Sharp Corp | Etching method of insulation film of semiconductor device |
JPS5824949B2 (en) * | 1977-10-26 | 1983-05-24 | シャープ株式会社 | Insulating film etching method for semiconductor devices |
JPS54105476A (en) * | 1978-02-06 | 1979-08-18 | Sony Corp | Manufacture of semiconductor device |
JPS633453B2 (en) * | 1978-02-06 | 1988-01-23 | Sony Corp |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS53108390A (en) | Semiconductor device and its manufacture | |
JPS52126184A (en) | Preparation of semiconductor device | |
JPS5321576A (en) | Mask for x-ray exposure | |
JPS5414165A (en) | Selective oxidation method for semiconductor substrate | |
JPS52143769A (en) | Removing method of positive type photo resist | |
JPS548467A (en) | Photo etching method | |
JPS5220764A (en) | Manufacturing system of mesa type semi-conductor unit | |
JPS5382173A (en) | Positioning method | |
JPS53126879A (en) | Formation mathod of electrode wiring layer | |
JPS5397374A (en) | Mask producing method | |
JPS5369582A (en) | Coating method for photo-resist | |
JPS5267270A (en) | Photo etching method | |
JPS5380994A (en) | Lift-off method | |
JPS545659A (en) | Manufacture of semiconductor device | |
JPS53133376A (en) | Manufacture of semiconductor device | |
JPS533821A (en) | Exposure method | |
JPS5432068A (en) | Manufacture of semiconductor device | |
JPS5381083A (en) | Focusing method of projection exposure apparatus | |
JPS5413269A (en) | Forming method of two layer protective film | |
JPS5315073A (en) | Production of semiconductor device | |
JPS54125977A (en) | Pattern forming method | |
JPS5359370A (en) | Positioning method | |
JPS53124993A (en) | Production of semiconductor device | |
JPS5248976A (en) | Process for production of semiconductor device | |
JPS5267269A (en) | Photo etching method |