JPS5321584A - Wiring system of semiconductor device - Google Patents

Wiring system of semiconductor device

Info

Publication number
JPS5321584A
JPS5321584A JP9541876A JP9541876A JPS5321584A JP S5321584 A JPS5321584 A JP S5321584A JP 9541876 A JP9541876 A JP 9541876A JP 9541876 A JP9541876 A JP 9541876A JP S5321584 A JPS5321584 A JP S5321584A
Authority
JP
Japan
Prior art keywords
semiconductor device
wirings
wiring system
wiring
derection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9541876A
Other languages
English (en)
Other versions
JPS6210023B2 (ja
Inventor
Mitsuhiro Koike
Yoshihisa Shioashi
Kimio Terada
Yasuo Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9541876A priority Critical patent/JPS5321584A/ja
Publication of JPS5321584A publication Critical patent/JPS5321584A/ja
Publication of JPS6210023B2 publication Critical patent/JPS6210023B2/ja
Granted legal-status Critical Current

Links

JP9541876A 1976-08-12 1976-08-12 Wiring system of semiconductor device Granted JPS5321584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9541876A JPS5321584A (en) 1976-08-12 1976-08-12 Wiring system of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9541876A JPS5321584A (en) 1976-08-12 1976-08-12 Wiring system of semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP14954783A Division JPS5956742A (ja) 1983-08-18 1983-08-18 半導体装置の

Publications (2)

Publication Number Publication Date
JPS5321584A true JPS5321584A (en) 1978-02-28
JPS6210023B2 JPS6210023B2 (ja) 1987-03-04

Family

ID=14137126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9541876A Granted JPS5321584A (en) 1976-08-12 1976-08-12 Wiring system of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5321584A (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57172210U (ja) * 1981-04-16 1982-10-29
JPS5896767A (ja) * 1981-12-04 1983-06-08 Ricoh Co Ltd アルミニウムゲ−トｍｏｓの配線構造
JPS6022337A (ja) * 1983-07-19 1985-02-04 Toshiba Corp 半導体集積回路
JPS60206047A (ja) * 1984-03-29 1985-10-17 Sanyo Electric Co Ltd 多層配線を有する半導体集積回路
JPS60206048A (ja) * 1984-03-29 1985-10-17 Sanyo Electric Co Ltd 多層配線を有する半導体集積回路
JPS60206046A (ja) * 1984-03-29 1985-10-17 Sanyo Electric Co Ltd 多層配線を有する半導体集積回路
JPH02172258A (ja) * 1988-12-26 1990-07-03 Hitachi Ltd 半導体集積回路

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4976487A (ja) * 1972-11-25 1974-07-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4976487A (ja) * 1972-11-25 1974-07-23

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57172210U (ja) * 1981-04-16 1982-10-29
JPS6042245Y2 (ja) * 1981-04-16 1985-12-25 松下電器産業株式会社 燃焼装置
JPS5896767A (ja) * 1981-12-04 1983-06-08 Ricoh Co Ltd アルミニウムゲ−トｍｏｓの配線構造
JPS6022337A (ja) * 1983-07-19 1985-02-04 Toshiba Corp 半導体集積回路
JPS60206047A (ja) * 1984-03-29 1985-10-17 Sanyo Electric Co Ltd 多層配線を有する半導体集積回路
JPS60206048A (ja) * 1984-03-29 1985-10-17 Sanyo Electric Co Ltd 多層配線を有する半導体集積回路
JPS60206046A (ja) * 1984-03-29 1985-10-17 Sanyo Electric Co Ltd 多層配線を有する半導体集積回路
JPH0222539B2 (ja) * 1984-03-29 1990-05-18 Sanyo Electric Co
JPH02172258A (ja) * 1988-12-26 1990-07-03 Hitachi Ltd 半導体集積回路

Also Published As

Publication number Publication date
JPS6210023B2 (ja) 1987-03-04

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