JPS5237790A - Process for production of polycrystalline semiconductor films - Google Patents

Process for production of polycrystalline semiconductor films

Info

Publication number
JPS5237790A
JPS5237790A JP50113147A JP11314775A JPS5237790A JP S5237790 A JPS5237790 A JP S5237790A JP 50113147 A JP50113147 A JP 50113147A JP 11314775 A JP11314775 A JP 11314775A JP S5237790 A JPS5237790 A JP S5237790A
Authority
JP
Japan
Prior art keywords
production
semiconductor films
polycrystalline semiconductor
silicon film
accomplished
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50113147A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5339758B2 (enExample
Inventor
Tadashi Saito
Haruo Ito
Shigekazu Minagawa
Hiroshi Tamura
Takao Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50113147A priority Critical patent/JPS5237790A/ja
Publication of JPS5237790A publication Critical patent/JPS5237790A/ja
Publication of JPS5339758B2 publication Critical patent/JPS5339758B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/546—Polycrystalline silicon PV cells

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Photovoltaic Devices (AREA)
JP50113147A 1975-09-20 1975-09-20 Process for production of polycrystalline semiconductor films Granted JPS5237790A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50113147A JPS5237790A (en) 1975-09-20 1975-09-20 Process for production of polycrystalline semiconductor films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50113147A JPS5237790A (en) 1975-09-20 1975-09-20 Process for production of polycrystalline semiconductor films

Publications (2)

Publication Number Publication Date
JPS5237790A true JPS5237790A (en) 1977-03-23
JPS5339758B2 JPS5339758B2 (enExample) 1978-10-23

Family

ID=14604748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50113147A Granted JPS5237790A (en) 1975-09-20 1975-09-20 Process for production of polycrystalline semiconductor films

Country Status (1)

Country Link
JP (1) JPS5237790A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481091A (en) * 1977-12-12 1979-06-28 Agency Of Ind Science & Technol Plate-type silicon semiconductor and its manufacture
JPS5619680A (en) * 1979-07-25 1981-02-24 Japan Solar Energ Kk Manufacture of solar cell
JPS57189041A (en) * 1981-05-18 1982-11-20 Oki Electric Ind Co Ltd Densitometer for soot and dust of very small amount

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481091A (en) * 1977-12-12 1979-06-28 Agency Of Ind Science & Technol Plate-type silicon semiconductor and its manufacture
JPS5619680A (en) * 1979-07-25 1981-02-24 Japan Solar Energ Kk Manufacture of solar cell
JPS57189041A (en) * 1981-05-18 1982-11-20 Oki Electric Ind Co Ltd Densitometer for soot and dust of very small amount

Also Published As

Publication number Publication date
JPS5339758B2 (enExample) 1978-10-23

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