JPS5216989A - Process of semiconductor thin film - Google Patents

Process of semiconductor thin film

Info

Publication number
JPS5216989A
JPS5216989A JP50092520A JP9252075A JPS5216989A JP S5216989 A JPS5216989 A JP S5216989A JP 50092520 A JP50092520 A JP 50092520A JP 9252075 A JP9252075 A JP 9252075A JP S5216989 A JPS5216989 A JP S5216989A
Authority
JP
Japan
Prior art keywords
thin film
semiconductor thin
source
dopant
melted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50092520A
Other languages
Japanese (ja)
Other versions
JPS5625032B2 (en
Inventor
Sunao Matsubara
Tadashi Saito
Shigekazu Minagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50092520A priority Critical patent/JPS5216989A/en
Publication of JPS5216989A publication Critical patent/JPS5216989A/en
Publication of JPS5625032B2 publication Critical patent/JPS5625032B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

PURPOSE: To offer solar battery thin film. The component to be the dopant is fully reaction-melted in the source and multi-crystal film of the desired carrier concentration is acquired by chemical vapor method using the appropriate source.
COPYRIGHT: (C)1977,JPO&Japio
JP50092520A 1975-07-31 1975-07-31 Process of semiconductor thin film Granted JPS5216989A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50092520A JPS5216989A (en) 1975-07-31 1975-07-31 Process of semiconductor thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50092520A JPS5216989A (en) 1975-07-31 1975-07-31 Process of semiconductor thin film

Publications (2)

Publication Number Publication Date
JPS5216989A true JPS5216989A (en) 1977-02-08
JPS5625032B2 JPS5625032B2 (en) 1981-06-10

Family

ID=14056596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50092520A Granted JPS5216989A (en) 1975-07-31 1975-07-31 Process of semiconductor thin film

Country Status (1)

Country Link
JP (1) JPS5216989A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141341A (en) * 1979-04-20 1980-11-05 Kuniyoshi Nakamura Oscillation type operating rod and its production
JPS57206530A (en) * 1981-06-12 1982-12-17 Akihiko Nakamura Manufacture of cam shaft
JPS63163219U (en) * 1987-08-20 1988-10-25

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141341A (en) * 1979-04-20 1980-11-05 Kuniyoshi Nakamura Oscillation type operating rod and its production
JPS57206530A (en) * 1981-06-12 1982-12-17 Akihiko Nakamura Manufacture of cam shaft
JPS63163219U (en) * 1987-08-20 1988-10-25
JPH0213803Y2 (en) * 1987-08-20 1990-04-16

Also Published As

Publication number Publication date
JPS5625032B2 (en) 1981-06-10

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