JPS51126047A - Growth device for semi-conductor crystals - Google Patents
Growth device for semi-conductor crystalsInfo
- Publication number
- JPS51126047A JPS51126047A JP36275A JP36275A JPS51126047A JP S51126047 A JPS51126047 A JP S51126047A JP 36275 A JP36275 A JP 36275A JP 36275 A JP36275 A JP 36275A JP S51126047 A JPS51126047 A JP S51126047A
- Authority
- JP
- Japan
- Prior art keywords
- semi
- growth device
- conductor crystals
- crystals
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE: To form a good crystal layer purifying the surface without causing damage to the basic plate in case of growth of the crystal layer and to apply the beam growth method.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36275A JPS51126047A (en) | 1974-12-23 | 1974-12-23 | Growth device for semi-conductor crystals |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36275A JPS51126047A (en) | 1974-12-23 | 1974-12-23 | Growth device for semi-conductor crystals |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51126047A true JPS51126047A (en) | 1976-11-02 |
Family
ID=11471680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP36275A Pending JPS51126047A (en) | 1974-12-23 | 1974-12-23 | Growth device for semi-conductor crystals |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51126047A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0320093A (en) * | 1989-01-19 | 1991-01-29 | Natl Res Inst For Metals | Thin film manufacturing device |
JPH0677134A (en) * | 1992-08-26 | 1994-03-18 | Nec Kansai Ltd | Vacuum heating method |
JPH0917730A (en) * | 1995-06-29 | 1997-01-17 | Nec Corp | Manufacture of thin film and thin film manufacturing equipment |
-
1974
- 1974-12-23 JP JP36275A patent/JPS51126047A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0320093A (en) * | 1989-01-19 | 1991-01-29 | Natl Res Inst For Metals | Thin film manufacturing device |
JPH0677134A (en) * | 1992-08-26 | 1994-03-18 | Nec Kansai Ltd | Vacuum heating method |
JPH0917730A (en) * | 1995-06-29 | 1997-01-17 | Nec Corp | Manufacture of thin film and thin film manufacturing equipment |
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