JPS5185374A - - Google Patents
Info
- Publication number
- JPS5185374A JPS5185374A JP50145859A JP14585975A JPS5185374A JP S5185374 A JPS5185374 A JP S5185374A JP 50145859 A JP50145859 A JP 50145859A JP 14585975 A JP14585975 A JP 14585975A JP S5185374 A JPS5185374 A JP S5185374A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5093—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with elements other than metals or carbon
- C04B41/5096—Silicon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/14—Substrate holders or susceptors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Products (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/530,083 US3951587A (en) | 1974-12-06 | 1974-12-06 | Silicon carbide diffusion furnace components |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5185374A true JPS5185374A (ja) | 1976-07-26 |
JPS5410825B2 JPS5410825B2 (ja) | 1979-05-10 |
Family
ID=24112384
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14585975A Expired JPS5410825B2 (ja) | 1974-12-06 | 1975-12-04 |
Country Status (5)
Country | Link |
---|---|
US (1) | US3951587A (ja) |
JP (1) | JPS5410825B2 (ja) |
DE (1) | DE2553651C3 (ja) |
FR (1) | FR2293793A1 (ja) |
GB (1) | GB1491118A (ja) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5222477A (en) * | 1975-08-13 | 1977-02-19 | Toshiba Ceramics Co Ltd | Sic-si type equalizing tube for manufacturing gas impermeable semi conductors |
JPS53114670A (en) * | 1977-03-17 | 1978-10-06 | Toshiba Ceramics Co | Jig for diffusion furnace |
JPS53142183A (en) * | 1977-05-18 | 1978-12-11 | Toshiba Ceramics Co | Silicon wafer jig |
JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
JPS56150824A (en) * | 1980-04-24 | 1981-11-21 | Toshiba Ceramics Co Ltd | Silicon carbide core tube for semiconductor diffusion furnace |
JPS59200432A (ja) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | ウエハ−ボ−ト用の搬送用具 |
JPS60138915A (ja) * | 1983-12-26 | 1985-07-23 | Toshiba Ceramics Co Ltd | 炭化珪素質炉芯管 |
JPS60258918A (ja) * | 1985-03-20 | 1985-12-20 | Toshiba Ceramics Co Ltd | ガス不透過性半導体製造用SiC−Si系均熱管の製造方法 |
JPS61214424A (ja) * | 1985-03-19 | 1986-09-24 | Ibiden Co Ltd | 耐熱性治具 |
JPS6398123A (ja) * | 1986-10-15 | 1988-04-28 | Tokai Kounetsu Kogyo Kk | 半導体製造用ウエハ−ボ−トの製法 |
JPS63228611A (ja) * | 1987-03-17 | 1988-09-22 | Fujitsu Ltd | 半導体用治具の製造方法 |
JPS6466933A (en) * | 1987-09-07 | 1989-03-13 | Toshiba Ceramics Co | Boat for vertical diffusion furnace |
JPH0249421A (ja) * | 1989-04-28 | 1990-02-19 | Toshiba Ceramics Co Ltd | 拡散炉用炉心管の構造 |
JPH02148719A (ja) * | 1988-04-29 | 1990-06-07 | Norton Co | 拡散炉用の構成部品及び装置 |
JPH03141638A (ja) * | 1989-10-26 | 1991-06-17 | Toshiba Ceramics Co Ltd | 半導体ウェハ搬送用治具の製造方法 |
JPH0686333U (ja) * | 1987-03-30 | 1994-12-13 | ノートン カンパニー | 拡散炉構成要素 |
Families Citing this family (86)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS512161U (ja) * | 1974-06-24 | 1976-01-09 | ||
JPS5818349B2 (ja) * | 1975-06-25 | 1983-04-12 | ノ−トン カンパニ− | 気体不透過性中空炭化ケイ素成形品およびその製造方法 |
US4075972A (en) * | 1975-08-20 | 1978-02-28 | Nippondenso Co., Ltd. | Apparatus for thermal diffusion of semiconductor devices |
JPS5277590A (en) * | 1975-12-24 | 1977-06-30 | Toshiba Corp | Semiconductor producing device |
US4150998A (en) * | 1976-12-09 | 1979-04-24 | General Electric Company | Rotary sealant abradable material and method for making |
US4195871A (en) * | 1978-06-12 | 1980-04-01 | Codi Corporation | Diffusion boat and grip |
DE2852410C2 (de) * | 1978-12-04 | 1981-12-03 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Verfahren und Vorrichtung zur Herstellung von Siliciumcarbid-Formkörpern |
US4218214A (en) * | 1979-02-05 | 1980-08-19 | Rca Corporation | Guide wing for a furnace paddle |
US4294788A (en) * | 1979-12-05 | 1981-10-13 | General Electric Company | Method of making a shaped silicon carbide-silicon matrix composite and articles made thereby |
US4240835A (en) * | 1979-12-05 | 1980-12-23 | General Electric Company | Method of making a shaped silicon carbide-silicon matrix composite and articles made thereby |
US4543064A (en) * | 1980-04-14 | 1985-09-24 | Wolf Ehrenfried G B | Dental bridge |
CA1158259A (en) * | 1980-07-17 | 1983-12-06 | Francis J. Frechette | Composite material of silicon carbide and silicon and methods of producing |
JPS5946491A (ja) * | 1982-09-10 | 1984-03-15 | Toshiba Ceramics Co Ltd | 炭化珪素質熱交換器 |
US4507544A (en) * | 1982-09-29 | 1985-03-26 | Reliability, Inc. | Burn-in clock monitor |
IT1169895B (it) * | 1982-10-28 | 1987-06-03 | Toshiba Ceramics Co | Elemento stampato a base di carburo di silicio per l'uso nella fabbricazione di un semiconduttore |
US4459104A (en) * | 1983-06-01 | 1984-07-10 | Quartz Engineering & Materials, Inc. | Cantilever diffusion tube apparatus and method |
US4525429A (en) * | 1983-06-08 | 1985-06-25 | Kennecott Corporation | Porous semiconductor dopant carriers |
GB2148270A (en) * | 1983-10-22 | 1985-05-30 | British Ceramic Res Ass | Cermet materials |
US4518349A (en) * | 1983-12-01 | 1985-05-21 | Better Semiconductor Processes (Bsp) | Cantilevered boat-free semiconductor wafer handling system |
JPS60138913A (ja) * | 1983-12-26 | 1985-07-23 | Toshiba Ceramics Co Ltd | 半導体拡散炉管の製造方法 |
US5118647A (en) * | 1984-03-16 | 1992-06-02 | Lanxide Technology Company, Lp | Ceramic materials |
US5306677A (en) * | 1984-03-16 | 1994-04-26 | Lanxide Technology Company, Lp | Ceramic materials |
JPS60246264A (ja) * | 1984-05-23 | 1985-12-05 | 東芝セラミツクス株式会社 | 炭化珪素質材料の製造方法 |
DE3419866C2 (de) * | 1984-05-28 | 1986-06-26 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Trägerhorde aus Quarzglas für scheibenförmige Substrate |
USRE33361E (en) * | 1984-06-07 | 1990-10-02 | Substrate and media carrier | |
JPS6169116A (ja) * | 1984-09-13 | 1986-04-09 | Toshiba Ceramics Co Ltd | シリコンウエハ−の連続cvdコ−テイング用サセプター |
US4771021A (en) * | 1985-07-01 | 1988-09-13 | Teruyasu Tamamizu | Semi-conductor diffusion furnace components |
JPS6212667A (ja) * | 1985-07-09 | 1987-01-21 | 東芝セラミツクス株式会社 | 半導体用部材の製造方法 |
JPS6212666A (ja) * | 1985-07-09 | 1987-01-21 | 東芝セラミツクス株式会社 | 半導体用炉芯管の製造方法 |
JP2573480B2 (ja) * | 1985-11-22 | 1997-01-22 | 東芝セラミックス 株式会社 | 半導体熱処理用治具 |
US4676008A (en) * | 1986-05-16 | 1987-06-30 | Microglass, Inc. | Cage-type wafer carrier and method |
JPH0521297Y2 (ja) * | 1986-07-31 | 1993-06-01 | ||
US4789506A (en) * | 1986-11-07 | 1988-12-06 | Gas Research Institute | Method of producing tubular ceramic articles |
US5071685A (en) * | 1986-11-07 | 1991-12-10 | Kasprzyk Martin R | Ceramic articles, methods and apparatus for their manufacture |
US4785936A (en) * | 1987-05-13 | 1988-11-22 | David Shpigelman | Device for holding flat objects such as printed circuit boards |
JPH0768066B2 (ja) * | 1987-12-25 | 1995-07-26 | イビデン株式会社 | 耐熱性複合体及びその製造方法 |
US4999228A (en) * | 1988-05-06 | 1991-03-12 | Shin-Etsu Chemical Co., Ltd. | Silicon carbide diffusion tube for semi-conductor |
US5046615A (en) * | 1989-04-03 | 1991-09-10 | Fluoroware, Inc. | Disk shipper |
US5054418A (en) * | 1989-05-23 | 1991-10-08 | Union Oil Company Of California | Cage boat having removable slats |
GB9010833D0 (en) * | 1990-05-15 | 1990-07-04 | Electrotech Research Limited | Workpiece support |
WO1993025495A1 (en) * | 1992-06-12 | 1993-12-23 | The Carborundum Company | Porous silicon carbide |
US5417803A (en) * | 1993-09-29 | 1995-05-23 | Intel Corporation | Method for making Si/SiC composite material |
US5526984A (en) * | 1994-07-18 | 1996-06-18 | Saint-Gobain/Norton Industrial Ceramics Corp. | Hydrogen torch having concentric tubes and reverse ball joint connection |
US5538230A (en) * | 1994-08-08 | 1996-07-23 | Sibley; Thomas | Silicon carbide carrier for wafer processing |
US5785518A (en) * | 1994-09-30 | 1998-07-28 | Sony Corporation | Masking element fixture |
US5443649A (en) * | 1994-11-22 | 1995-08-22 | Sibley; Thomas | Silicon carbide carrier for wafer processing in vertical furnaces |
EP0781739B1 (en) | 1995-12-26 | 1999-10-27 | Asahi Glass Company Ltd. | Jig for heat treatment and process for fabricating the jig |
US5702997A (en) * | 1996-10-04 | 1997-12-30 | Saint-Gobain/Norton Industrial Ceramics Corp. | Process for making crack-free silicon carbide diffusion components |
JPH10287483A (ja) * | 1997-04-09 | 1998-10-27 | Ngk Insulators Ltd | 気密部品およびその製造方法 |
US6180258B1 (en) * | 1997-06-04 | 2001-01-30 | Chesapeake Composites Corporation | Metal-matrix composites and method for making such composites |
JP4355375B2 (ja) * | 1997-06-18 | 2009-10-28 | 日本碍子株式会社 | 高電気抵抗及び高熱伝導再結晶SiC焼結体及びその製造方法 |
US6056123A (en) * | 1997-12-10 | 2000-05-02 | Novus Corporation | Semiconductor wafer carrier having the same composition as the wafers |
US6162543A (en) * | 1998-12-11 | 2000-12-19 | Saint-Gobain Industrial Ceramics, Inc. | High purity siliconized silicon carbide having high thermal shock resistance |
KR20010079642A (ko) * | 1999-06-14 | 2001-08-22 | 오카야마 노리오 | 복합 재료 및 그를 이용한 반도체 장치 |
US6368410B1 (en) * | 1999-06-28 | 2002-04-09 | General Electric Company | Semiconductor processing article |
US6504233B1 (en) | 1999-06-28 | 2003-01-07 | General Electric Company | Semiconductor processing component |
US6395203B1 (en) | 1999-08-30 | 2002-05-28 | General Electric Company | Process for producing low impurity level ceramic |
US6296716B1 (en) | 1999-10-01 | 2001-10-02 | Saint-Gobain Ceramics And Plastics, Inc. | Process for cleaning ceramic articles |
JP4733890B2 (ja) * | 1999-10-13 | 2011-07-27 | Agcセラミックス株式会社 | SiO2を主成分とする膜の成膜方法 |
US6673198B1 (en) | 1999-12-22 | 2004-01-06 | Lam Research Corporation | Semiconductor processing equipment having improved process drift control |
US7104177B1 (en) | 2000-01-11 | 2006-09-12 | Aghajanian Michael K | Ceramic-rich composite armor, and methods for making same |
US6609452B1 (en) | 2000-01-11 | 2003-08-26 | M Cubed Technologies, Inc. | Silicon carbide armor bodies, and methods for making same |
US6631934B1 (en) * | 2000-06-02 | 2003-10-14 | Saint-Gobain Ceramics & Plastics, Inc. | Silicon carbide cantilever paddle |
US6506254B1 (en) | 2000-06-30 | 2003-01-14 | Lam Research Corporation | Semiconductor processing equipment having improved particle performance |
US6890861B1 (en) * | 2000-06-30 | 2005-05-10 | Lam Research Corporation | Semiconductor processing equipment having improved particle performance |
US20020130061A1 (en) * | 2000-11-02 | 2002-09-19 | Hengst Richard R. | Apparatus and method of making a slip free wafer boat |
US20040173948A1 (en) * | 2002-09-19 | 2004-09-09 | Pandelisev Kiril A. | Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication |
US20030233977A1 (en) * | 2002-06-20 | 2003-12-25 | Yeshwanth Narendar | Method for forming semiconductor processing components |
US6881262B1 (en) | 2002-12-23 | 2005-04-19 | Saint-Gobain Ceramics & Plastics, Inc. | Methods for forming high purity components and components formed thereby |
JP3960933B2 (ja) * | 2003-03-18 | 2007-08-15 | 日本碍子株式会社 | 高熱伝導性放熱材及びその製造方法 |
US6825123B2 (en) * | 2003-04-15 | 2004-11-30 | Saint-Goban Ceramics & Plastics, Inc. | Method for treating semiconductor processing components and components formed thereby |
US7501370B2 (en) * | 2004-01-06 | 2009-03-10 | Saint-Gobain Ceramics & Plastics, Inc. | High purity silicon carbide wafer boats |
US20060286883A1 (en) * | 2005-01-24 | 2006-12-21 | The Brown Idea Group, Llc | Ballistics panel, structure, and associated methods |
US20060284338A1 (en) * | 2005-01-24 | 2006-12-21 | The Brown Idea Group, Llc | Ballistics panel, structure, and associated methods |
US20110009255A1 (en) * | 2005-12-22 | 2011-01-13 | Coorstek, Inc. | Boron-silicon-carbon ceramic materials and method of making |
US8162040B2 (en) * | 2006-03-10 | 2012-04-24 | Spinworks, LLC | Heat exchanging insert and method for fabricating same |
WO2008058270A2 (en) * | 2006-11-10 | 2008-05-15 | Saint-Gobain Ceramics & Plastics, Inc. | A susceptor and method of forming a led device using such susceptor |
US7727919B2 (en) * | 2007-10-29 | 2010-06-01 | Saint-Gobain Ceramics & Plastics, Inc. | High resistivity silicon carbide |
KR20100101640A (ko) * | 2007-12-20 | 2010-09-17 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 반도체 공정 부품의 처리 방법 및 이에 의해 형성되는 부품 |
US20090214999A1 (en) * | 2008-02-21 | 2009-08-27 | Saint-Gobain Ceramics & Plastics, Inc. | Ceramic Paddle |
US20110091700A1 (en) * | 2009-10-20 | 2011-04-21 | Saint-Gobain Ceramics & Plastics, Inc. | Microelectronic processing component having a corrosion-resistant layer, microelectronic workpiece processing apparatus incorporating same, and method of forming an article having the corrosion-resistant layer |
US9676631B2 (en) | 2014-07-21 | 2017-06-13 | Lori Bracamonte | Reaction bonded silicon carbide bodies made from high purity carbonaceous preforms |
JP6906343B2 (ja) | 2017-03-30 | 2021-07-21 | 日本碍子株式会社 | 炭化珪素質焼結体の製造方法 |
DE102017217321A1 (de) * | 2017-09-28 | 2019-03-28 | Sgl Carbon Se | Keramisches Bauteil |
JP6921787B2 (ja) * | 2018-06-22 | 2021-08-18 | クアーズテック株式会社 | 制動材およびその製造方法 |
CN111892404A (zh) * | 2020-08-03 | 2020-11-06 | 福赛特(唐山)新材料有限公司 | 一种耐腐蚀碳化硅扩散管及其制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1180918A (en) * | 1966-06-10 | 1970-02-11 | Atomic Energy Authority Uk | Improvements in or relating to the Manufacture of Dense Bodies of Silicon Carbide. |
JPS4979172A (ja) * | 1972-10-31 | 1974-07-31 | ||
JPS49114548U (ja) * | 1973-01-26 | 1974-10-01 |
Family Cites Families (12)
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FR1063359A (fr) * | 1951-12-21 | 1954-05-03 | Siemens Planiawerke Ag Fu R Ko | Procédé pour l'imprégnation de silicium des corps en carbure de silicium, notamment des extrémités des baguettes de chauffage, dispositif pour l'application dudit procédé et produits obtenus par ledit procédé |
US2784112A (en) * | 1952-05-17 | 1957-03-05 | Carborundum Co | Method of making silicon carbidebonded refractory bodies and coated metal articles |
US2964823A (en) * | 1954-04-20 | 1960-12-20 | Norton Co | Process of making recrystallized silicon carbide articles |
FR1147511A (fr) * | 1956-02-24 | 1957-11-26 | Cie Des Meules Norton | Procédé de fabrication d'objets en carbure de silicium recristallisé |
US3079316A (en) * | 1958-05-22 | 1963-02-26 | Minnesota Mining & Mfg | Thermally resistant articles and method for their fabrication |
US3183130A (en) * | 1962-01-22 | 1965-05-11 | Motorola Inc | Diffusion process and apparatus |
BE666629A (ja) * | 1964-08-04 | |||
US3765300A (en) * | 1967-05-22 | 1973-10-16 | Carborundum Co | Dense carbide composite for armor and abrasives |
DE2037173A1 (de) * | 1970-07-27 | 1972-02-03 | Siemens Ag | Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial |
US3859399A (en) * | 1971-04-19 | 1975-01-07 | Carborundum Co | Dense composite ceramic bodies and method for their production |
US3811829A (en) * | 1971-10-26 | 1974-05-21 | Semi Inc | Isothermal boat container |
DE2322952C3 (de) * | 1973-05-07 | 1979-04-19 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen von Horden für die Aufnahme von Kristallscheiben bei Diffusions- und Temperprozessen |
-
1974
- 1974-12-06 US US05/530,083 patent/US3951587A/en not_active Expired - Lifetime
-
1975
- 1975-10-31 GB GB45521/75A patent/GB1491118A/en not_active Expired
- 1975-11-28 DE DE2553651A patent/DE2553651C3/de not_active Expired
- 1975-12-03 FR FR7536974A patent/FR2293793A1/fr active Granted
- 1975-12-04 JP JP14585975A patent/JPS5410825B2/ja not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1180918A (en) * | 1966-06-10 | 1970-02-11 | Atomic Energy Authority Uk | Improvements in or relating to the Manufacture of Dense Bodies of Silicon Carbide. |
JPS4979172A (ja) * | 1972-10-31 | 1974-07-31 | ||
JPS49114548U (ja) * | 1973-01-26 | 1974-10-01 |
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS555852B2 (ja) * | 1975-08-13 | 1980-02-12 | ||
JPS5222477A (en) * | 1975-08-13 | 1977-02-19 | Toshiba Ceramics Co Ltd | Sic-si type equalizing tube for manufacturing gas impermeable semi conductors |
JPS53114670A (en) * | 1977-03-17 | 1978-10-06 | Toshiba Ceramics Co | Jig for diffusion furnace |
JPS53142183A (en) * | 1977-05-18 | 1978-12-11 | Toshiba Ceramics Co | Silicon wafer jig |
JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
JPS56150824A (en) * | 1980-04-24 | 1981-11-21 | Toshiba Ceramics Co Ltd | Silicon carbide core tube for semiconductor diffusion furnace |
JPS59200432A (ja) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | ウエハ−ボ−ト用の搬送用具 |
JPH0472379B2 (ja) * | 1983-12-26 | 1992-11-18 | Toshiba Ceramics Co | |
JPS60138915A (ja) * | 1983-12-26 | 1985-07-23 | Toshiba Ceramics Co Ltd | 炭化珪素質炉芯管 |
JPH0736381B2 (ja) * | 1985-03-19 | 1995-04-19 | イビデン株式会社 | 耐熱性治具とその製造方法 |
JPS61214424A (ja) * | 1985-03-19 | 1986-09-24 | Ibiden Co Ltd | 耐熱性治具 |
JPS6220687B2 (ja) * | 1985-03-20 | 1987-05-08 | Toshiba Ceramics Co | |
JPS60258918A (ja) * | 1985-03-20 | 1985-12-20 | Toshiba Ceramics Co Ltd | ガス不透過性半導体製造用SiC−Si系均熱管の製造方法 |
JPS6398123A (ja) * | 1986-10-15 | 1988-04-28 | Tokai Kounetsu Kogyo Kk | 半導体製造用ウエハ−ボ−トの製法 |
JPH0770494B2 (ja) * | 1986-10-15 | 1995-07-31 | 東海高熱工業株式会社 | 半導体製造用ウエハ−ボ−トの製法 |
JPS63228611A (ja) * | 1987-03-17 | 1988-09-22 | Fujitsu Ltd | 半導体用治具の製造方法 |
JPH0686333U (ja) * | 1987-03-30 | 1994-12-13 | ノートン カンパニー | 拡散炉構成要素 |
JPS6466933A (en) * | 1987-09-07 | 1989-03-13 | Toshiba Ceramics Co | Boat for vertical diffusion furnace |
JPH02148719A (ja) * | 1988-04-29 | 1990-06-07 | Norton Co | 拡散炉用の構成部品及び装置 |
JPH0249421A (ja) * | 1989-04-28 | 1990-02-19 | Toshiba Ceramics Co Ltd | 拡散炉用炉心管の構造 |
JPH0542812B2 (ja) * | 1989-04-28 | 1993-06-29 | Toshiba Ceramics Co | |
JPH03141638A (ja) * | 1989-10-26 | 1991-06-17 | Toshiba Ceramics Co Ltd | 半導体ウェハ搬送用治具の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
FR2293793B1 (ja) | 1980-01-04 |
DE2553651A1 (de) | 1976-06-10 |
FR2293793A1 (fr) | 1976-07-02 |
US3951587A (en) | 1976-04-20 |
DE2553651B2 (de) | 1980-09-18 |
GB1491118A (en) | 1977-11-09 |
JPS5410825B2 (ja) | 1979-05-10 |
DE2553651C3 (de) | 1981-09-03 |