FR2293793A1 - Accessoires d'enfournement en carbure de silicium pour fours de diffusion - Google Patents

Accessoires d'enfournement en carbure de silicium pour fours de diffusion

Info

Publication number
FR2293793A1
FR2293793A1 FR7536974A FR7536974A FR2293793A1 FR 2293793 A1 FR2293793 A1 FR 2293793A1 FR 7536974 A FR7536974 A FR 7536974A FR 7536974 A FR7536974 A FR 7536974A FR 2293793 A1 FR2293793 A1 FR 2293793A1
Authority
FR
France
Prior art keywords
silicon carbide
carbide supply
supply accessories
ovens
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7536974A
Other languages
English (en)
Other versions
FR2293793B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Abrasives Inc
Original Assignee
Norton Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Norton Co filed Critical Norton Co
Publication of FR2293793A1 publication Critical patent/FR2293793A1/fr
Application granted granted Critical
Publication of FR2293793B1 publication Critical patent/FR2293793B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5093—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with elements other than metals or carbon
    • C04B41/5096—Silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Products (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7536974A 1974-12-06 1975-12-03 Accessoires d'enfournement en carbure de silicium pour fours de diffusion Granted FR2293793A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/530,083 US3951587A (en) 1974-12-06 1974-12-06 Silicon carbide diffusion furnace components

Publications (2)

Publication Number Publication Date
FR2293793A1 true FR2293793A1 (fr) 1976-07-02
FR2293793B1 FR2293793B1 (fr) 1980-01-04

Family

ID=24112384

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7536974A Granted FR2293793A1 (fr) 1974-12-06 1975-12-03 Accessoires d'enfournement en carbure de silicium pour fours de diffusion

Country Status (5)

Country Link
US (1) US3951587A (fr)
JP (1) JPS5410825B2 (fr)
DE (1) DE2553651C3 (fr)
FR (1) FR2293793A1 (fr)
GB (1) GB1491118A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2535312A1 (fr) * 1982-10-28 1984-05-04 Toshiba Ceramics Co Element moule a base de carbure de silicium destine a etre utilise dans la fabrication de semi-conducteurs
CN111892404A (zh) * 2020-08-03 2020-11-06 福赛特(唐山)新材料有限公司 一种耐腐蚀碳化硅扩散管及其制备方法

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JPS512161U (fr) * 1974-06-24 1976-01-09
JPS5818349B2 (ja) * 1975-06-25 1983-04-12 ノ−トン カンパニ− 気体不透過性中空炭化ケイ素成形品およびその製造方法
JPS5222477A (en) * 1975-08-13 1977-02-19 Toshiba Ceramics Co Ltd Sic-si type equalizing tube for manufacturing gas impermeable semi conductors
US4075972A (en) * 1975-08-20 1978-02-28 Nippondenso Co., Ltd. Apparatus for thermal diffusion of semiconductor devices
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US4150998A (en) * 1976-12-09 1979-04-24 General Electric Company Rotary sealant abradable material and method for making
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JPS53142183A (en) * 1977-05-18 1978-12-11 Toshiba Ceramics Co Silicon wafer jig
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US4195871A (en) * 1978-06-12 1980-04-01 Codi Corporation Diffusion boat and grip
DE2852410C2 (de) * 1978-12-04 1981-12-03 Kernforschungsanlage Jülich GmbH, 5170 Jülich Verfahren und Vorrichtung zur Herstellung von Siliciumcarbid-Formkörpern
US4218214A (en) * 1979-02-05 1980-08-19 Rca Corporation Guide wing for a furnace paddle
US4240835A (en) * 1979-12-05 1980-12-23 General Electric Company Method of making a shaped silicon carbide-silicon matrix composite and articles made thereby
US4294788A (en) * 1979-12-05 1981-10-13 General Electric Company Method of making a shaped silicon carbide-silicon matrix composite and articles made thereby
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FR2204457A1 (fr) * 1972-10-31 1974-05-24 Siemens Ag
DE2322952A1 (de) * 1973-05-07 1974-11-28 Siemens Ag Verfahren zum herstellen von horden aus silizium oder siliziumcarbid fuer diffusionsprozesse

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FR1147511A (fr) * 1956-02-24 1957-11-26 Cie Des Meules Norton Procédé de fabrication d'objets en carbure de silicium recristallisé
US3079316A (en) * 1958-05-22 1963-02-26 Minnesota Mining & Mfg Thermally resistant articles and method for their fabrication
FR2103051A5 (fr) * 1970-07-27 1972-04-07 Siemens Ag
FR2204457A1 (fr) * 1972-10-31 1974-05-24 Siemens Ag
DE2322952A1 (de) * 1973-05-07 1974-11-28 Siemens Ag Verfahren zum herstellen von horden aus silizium oder siliziumcarbid fuer diffusionsprozesse

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2535312A1 (fr) * 1982-10-28 1984-05-04 Toshiba Ceramics Co Element moule a base de carbure de silicium destine a etre utilise dans la fabrication de semi-conducteurs
CN111892404A (zh) * 2020-08-03 2020-11-06 福赛特(唐山)新材料有限公司 一种耐腐蚀碳化硅扩散管及其制备方法

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DE2553651C3 (de) 1981-09-03
FR2293793B1 (fr) 1980-01-04
JPS5185374A (fr) 1976-07-26
US3951587A (en) 1976-04-20
JPS5410825B2 (fr) 1979-05-10
GB1491118A (en) 1977-11-09
DE2553651A1 (de) 1976-06-10
DE2553651B2 (de) 1980-09-18

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