JPS6466933A - Boat for vertical diffusion furnace - Google Patents

Boat for vertical diffusion furnace

Info

Publication number
JPS6466933A
JPS6466933A JP62223567A JP22356787A JPS6466933A JP S6466933 A JPS6466933 A JP S6466933A JP 62223567 A JP62223567 A JP 62223567A JP 22356787 A JP22356787 A JP 22356787A JP S6466933 A JPS6466933 A JP S6466933A
Authority
JP
Japan
Prior art keywords
boat
cassette
semiconductor wafers
mother
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62223567A
Other languages
Japanese (ja)
Other versions
JP2620765B2 (en
Inventor
Fumiaki Matsuoka
Yoshinobu Tanada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP62223567A priority Critical patent/JP2620765B2/en
Publication of JPS6466933A publication Critical patent/JPS6466933A/en
Application granted granted Critical
Publication of JP2620765B2 publication Critical patent/JP2620765B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To miniaturize a boat, and to reduce damage due to a thermal shock by mounting the quartz glassy cassette boat, on which a plurality of semiconductor wafers are placed horizontally and at multistages, and a mother boat composed of Si-SiC or an Si-SiC material. CONSTITUTION:A mother boat 1 consists of a discoid substrate 2, a strut 3 disposed in upright to the peripheral section of the substrate 2 and a plurality of connecting plates 4 horizontally positioned to the upper section of the substrate 2 and implanted to the strut 3. A plurality of semiconductor wafers 7 are placed horizontally to a cassette boat 6 at multistages, and the cassette boat 6 is shaped by a quartz glassy material. The cassette boats 6 can be miniaturized by increasing the number of the cassette boats 6 and the number of the stages of load of the mother boat 1 in response to the number of the semiconductor wafers 7 placed. The mother boat 1 is formed to a simple shape, thus reducing damage due to a thermal shock.
JP62223567A 1987-09-07 1987-09-07 Vertical diffusion furnace boat Expired - Lifetime JP2620765B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62223567A JP2620765B2 (en) 1987-09-07 1987-09-07 Vertical diffusion furnace boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62223567A JP2620765B2 (en) 1987-09-07 1987-09-07 Vertical diffusion furnace boat

Publications (2)

Publication Number Publication Date
JPS6466933A true JPS6466933A (en) 1989-03-13
JP2620765B2 JP2620765B2 (en) 1997-06-18

Family

ID=16800184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62223567A Expired - Lifetime JP2620765B2 (en) 1987-09-07 1987-09-07 Vertical diffusion furnace boat

Country Status (1)

Country Link
JP (1) JP2620765B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185374A (en) * 1974-12-06 1976-07-26 Norton Co
JPS6112024A (en) * 1984-06-27 1986-01-20 Fujitsu Ltd Vertical type heating furnace

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185374A (en) * 1974-12-06 1976-07-26 Norton Co
JPS6112024A (en) * 1984-06-27 1986-01-20 Fujitsu Ltd Vertical type heating furnace

Also Published As

Publication number Publication date
JP2620765B2 (en) 1997-06-18

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