JPS51141741A - Method of selectively removing aluminum - Google Patents
Method of selectively removing aluminumInfo
- Publication number
- JPS51141741A JPS51141741A JP51048711A JP4871176A JPS51141741A JP S51141741 A JPS51141741 A JP S51141741A JP 51048711 A JP51048711 A JP 51048711A JP 4871176 A JP4871176 A JP 4871176A JP S51141741 A JPS51141741 A JP S51141741A
- Authority
- JP
- Japan
- Prior art keywords
- selectively removing
- removing aluminum
- aluminum
- selectively
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/580,102 US3994793A (en) | 1975-05-22 | 1975-05-22 | Reactive ion etching of aluminum |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51141741A true JPS51141741A (en) | 1976-12-06 |
JPS5514143B2 JPS5514143B2 (ja) | 1980-04-14 |
Family
ID=24319707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51048711A Granted JPS51141741A (en) | 1975-05-22 | 1976-04-30 | Method of selectively removing aluminum |
Country Status (3)
Country | Link |
---|---|
US (1) | US3994793A (ja) |
JP (1) | JPS51141741A (ja) |
GB (1) | GB1485928A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5469090A (en) * | 1977-11-11 | 1979-06-02 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS5469091A (en) * | 1977-11-11 | 1979-06-02 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS54109387A (en) * | 1978-02-15 | 1979-08-27 | Hitachi Ltd | Etching method |
JPS5518399A (en) * | 1978-07-27 | 1980-02-08 | Eaton Corp | Plasma etching method of aluminium article |
JPS566453A (en) * | 1979-06-28 | 1981-01-23 | Matsushita Electronics Corp | Formation of metal pattern for semiconductor substrate |
JPS5629328A (en) * | 1979-08-17 | 1981-03-24 | Toshiba Corp | Plasma etching method |
JPH03241830A (ja) * | 1990-02-20 | 1991-10-29 | Mitsubishi Electric Corp | プラズマエッチングの方法 |
Families Citing this family (68)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1203089B (it) * | 1976-03-03 | 1989-02-15 | Int Plasma Corp | Procedimento ed apparecchiatura per eseguire reazioni chimiche nella regione della scarica luminescente di un plasma |
FR2376904A1 (fr) * | 1977-01-11 | 1978-08-04 | Alsthom Atlantique | Procede d'attaque d'une couche mince par decomposition d'un gaz dans un plasma |
JPS541245A (en) * | 1977-06-06 | 1979-01-08 | Hitachi Ltd | Method of etching a1 and a1-based alloy |
US4172004A (en) * | 1977-10-20 | 1979-10-23 | International Business Machines Corporation | Method for forming dense dry etched multi-level metallurgy with non-overlapped vias |
US4289834A (en) * | 1977-10-20 | 1981-09-15 | Ibm Corporation | Dense dry etched multi-level metallurgy with non-overlapped vias |
US4132586A (en) * | 1977-12-20 | 1979-01-02 | International Business Machines Corporation | Selective dry etching of substrates |
US4158589A (en) * | 1977-12-30 | 1979-06-19 | International Business Machines Corporation | Negative ion extractor for a plasma etching apparatus |
US4203800A (en) * | 1977-12-30 | 1980-05-20 | International Business Machines Corporation | Reactive ion etching process for metals |
GB1595659A (en) * | 1978-05-25 | 1981-08-12 | Standard Telephones Cables Ltd | Providing conductive tracks on semiconductor devices |
JPS556407A (en) * | 1978-06-26 | 1980-01-17 | Hitachi Ltd | Etching method for aluminum |
US4256534A (en) * | 1978-07-31 | 1981-03-17 | Bell Telephone Laboratories, Incorporated | Device fabrication by plasma etching |
US4226665A (en) * | 1978-07-31 | 1980-10-07 | Bell Telephone Laboratories, Incorporated | Device fabrication by plasma etching |
US4184909A (en) * | 1978-08-21 | 1980-01-22 | International Business Machines Corporation | Method of forming thin film interconnection systems |
US4183781A (en) * | 1978-09-25 | 1980-01-15 | International Business Machines Corporation | Stabilization process for aluminum microcircuits which have been reactive-ion etched |
US4340276A (en) | 1978-11-01 | 1982-07-20 | Minnesota Mining And Manufacturing Company | Method of producing a microstructured surface and the article produced thereby |
US4229247A (en) * | 1978-12-26 | 1980-10-21 | International Business Machines Corporation | Glow discharge etching process for chromium |
US4410622A (en) * | 1978-12-29 | 1983-10-18 | International Business Machines Corporation | Forming interconnections for multilevel interconnection metallurgy systems |
JPS55107780A (en) * | 1979-02-07 | 1980-08-19 | Hitachi Ltd | Etching method |
US4243476A (en) * | 1979-06-29 | 1981-01-06 | International Business Machines Corporation | Modification of etch rates by solid masking materials |
DE3071299D1 (en) * | 1979-07-31 | 1986-01-30 | Fujitsu Ltd | Dry etching of metal film |
DE3030814C2 (de) * | 1979-08-17 | 1983-06-16 | Tokuda Seisakusyo, Ltd., Zama, Kanagawa | Verfahren zum Plasmaätzen eines Werkstücks |
JPS5813625B2 (ja) * | 1979-12-12 | 1983-03-15 | 超エル・エス・アイ技術研究組合 | ガスプラズマ食刻法 |
US4335506A (en) * | 1980-08-04 | 1982-06-22 | International Business Machines Corporation | Method of forming aluminum/copper alloy conductors |
JPS57170534A (en) * | 1981-04-15 | 1982-10-20 | Hitachi Ltd | Dry etching method for aluminum and aluminum alloy |
JPS57204186A (en) * | 1981-06-10 | 1982-12-14 | Hitachi Ltd | Electrode processing method for magnetic reluctance element |
US4387013A (en) * | 1981-08-24 | 1983-06-07 | Rca Corporation | Reactive sputter etching of aluminum |
GB8319716D0 (en) * | 1983-07-21 | 1983-08-24 | Secr Defence | Reactive ion etching |
US4564585A (en) * | 1983-11-28 | 1986-01-14 | Magnetic Peripherals, Inc. | Process for fabricating negative pressure sliders |
GB2150317A (en) * | 1983-11-28 | 1985-06-26 | Magnetic Peripherals Inc | Process for producing negative pressure sliders using a photoresist |
GB2159753B (en) * | 1984-03-06 | 1988-09-07 | Asm Fico Tooling | Method and apparatus for cleaning lead pins before soldering operations |
US4582581A (en) * | 1985-05-09 | 1986-04-15 | Allied Corporation | Boron trifluoride system for plasma etching of silicon dioxide |
US5354416A (en) * | 1986-09-05 | 1994-10-11 | Sadayuki Okudaira | Dry etching method |
EP0565212A2 (en) * | 1986-12-19 | 1993-10-13 | Applied Materials, Inc. | Iodine etch process for silicon and silicides |
US4943417A (en) * | 1987-02-25 | 1990-07-24 | Adir Jacob | Apparatus for dry sterilization of medical devices and materials |
US4818488A (en) * | 1987-02-25 | 1989-04-04 | Adir Jacob | Process and apparatus for dry sterilization of medical devices and materials |
US4931261A (en) * | 1987-02-25 | 1990-06-05 | Adir Jacob | Apparatus for dry sterilization of medical devices and materials |
US5200158A (en) * | 1987-02-25 | 1993-04-06 | Adir Jacob | Process and apparatus for dry sterilization of medical devices and materials |
US5171525A (en) * | 1987-02-25 | 1992-12-15 | Adir Jacob | Process and apparatus for dry sterilization of medical devices and materials |
US5087418A (en) * | 1987-02-25 | 1992-02-11 | Adir Jacob | Process for dry sterilization of medical devices and materials |
US4801427A (en) * | 1987-02-25 | 1989-01-31 | Adir Jacob | Process and apparatus for dry sterilization of medical devices and materials |
US4917586A (en) * | 1987-02-25 | 1990-04-17 | Adir Jacob | Process for dry sterilization of medical devices and materials |
US4976920A (en) * | 1987-07-14 | 1990-12-11 | Adir Jacob | Process for dry sterilization of medical devices and materials |
US5316616A (en) * | 1988-02-09 | 1994-05-31 | Fujitsu Limited | Dry etching with hydrogen bromide or bromine |
US5106471A (en) * | 1990-04-02 | 1992-04-21 | Motorola, Inc. | Reactive ion etch process for surface acoustic wave (SAW) device fabrication |
DE4107006A1 (de) * | 1991-03-05 | 1992-09-10 | Siemens Ag | Verfahren zum anisotropen trockenaetzen von aluminium bzw. aluminiumlegierungen enthaltenden leiterbahnebenen in integrierten halbleiterschaltungen |
JPH04329640A (ja) * | 1991-05-01 | 1992-11-18 | Mitsubishi Electric Corp | 配線層のドライエッチング方法 |
US5126008A (en) * | 1991-05-03 | 1992-06-30 | Applied Materials, Inc. | Corrosion-free aluminum etching process for fabricating an integrated circuit structure |
EP0535540A3 (en) * | 1991-10-02 | 1994-10-19 | Siemens Ag | Etching process for aluminium-containing coatings |
US5387556A (en) * | 1993-02-24 | 1995-02-07 | Applied Materials, Inc. | Etching aluminum and its alloys using HC1, C1-containing etchant and N.sub.2 |
JPH08130206A (ja) * | 1994-10-31 | 1996-05-21 | Sony Corp | Al系金属層のプラズマエッチング方法 |
US5843289A (en) | 1996-01-22 | 1998-12-01 | Etex Corporation | Surface modification of medical implants |
EP0785572A2 (en) * | 1996-01-22 | 1997-07-23 | Matsushita Electric Industrial Co., Ltd. | Dry etching method for aluminium alloy and etching gas therefor |
US6033582A (en) | 1996-01-22 | 2000-03-07 | Etex Corporation | Surface modification of medical implants |
US6090717A (en) * | 1996-03-26 | 2000-07-18 | Lam Research Corporation | High density plasma etching of metallization layer using chlorine and nitrogen |
US5976986A (en) * | 1996-08-06 | 1999-11-02 | International Business Machines Corp. | Low pressure and low power C12 /HC1 process for sub-micron metal etching |
JP3269411B2 (ja) * | 1996-12-04 | 2002-03-25 | ヤマハ株式会社 | 半導体装置の製造方法 |
US5849641A (en) * | 1997-03-19 | 1998-12-15 | Lam Research Corporation | Methods and apparatus for etching a conductive layer to improve yield |
EP1444727A4 (en) * | 2001-10-22 | 2007-07-18 | Unaxis Usa Inc | PROCESS AND DEVICE FOR CORROSING THIN, DAMAGE-SENSITIVE LAYERS USING HIGH FREQUENCY PULSE PLASMA |
KR100640211B1 (ko) * | 2003-04-03 | 2006-10-31 | 엘지.필립스 엘시디 주식회사 | 액정표시장치의 제조방법 |
US7776758B2 (en) | 2004-06-08 | 2010-08-17 | Nanosys, Inc. | Methods and devices for forming nanostructure monolayers and devices including such monolayers |
US7968273B2 (en) | 2004-06-08 | 2011-06-28 | Nanosys, Inc. | Methods and devices for forming nanostructure monolayers and devices including such monolayers |
US20090136785A1 (en) * | 2007-01-03 | 2009-05-28 | Nanosys, Inc. | Methods for nanopatterning and production of magnetic nanostructures |
WO2008085813A2 (en) * | 2007-01-03 | 2008-07-17 | Nanosys, Inc, Et Al. | Methods for nanopatterning and production of nanostructures |
KR20110074724A (ko) * | 2007-12-14 | 2011-07-01 | 나노시스, 인크. | 기판 요소들의 형성 방법 |
US8540889B1 (en) | 2008-11-19 | 2013-09-24 | Nanosys, Inc. | Methods of generating liquidphobic surfaces |
JP2011029247A (ja) * | 2009-07-22 | 2011-02-10 | Panasonic Corp | 窒化物半導体装置及びその製造方法 |
US9001463B2 (en) | 2012-08-31 | 2015-04-07 | International Business Machines Corporaton | Magnetic recording head having protected reader sensors and near zero recessed write poles |
US9349395B2 (en) * | 2012-08-31 | 2016-05-24 | International Business Machines Corporation | System and method for differential etching |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4943844A (ja) * | 1972-09-01 | 1974-04-25 | ||
JPS4975270A (ja) * | 1972-11-22 | 1974-07-19 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3477936A (en) * | 1967-06-29 | 1969-11-11 | Ppg Industries Inc | Sputtering of metals in an atmosphere of fluorine and oxygen |
US3615956A (en) * | 1969-03-27 | 1971-10-26 | Signetics Corp | Gas plasma vapor etching process |
US3654108A (en) * | 1969-09-23 | 1972-04-04 | Air Reduction | Method for glow cleaning |
US3676317A (en) * | 1970-10-23 | 1972-07-11 | Stromberg Datagraphix Inc | Sputter etching process |
FR2128140B1 (ja) * | 1971-03-05 | 1976-04-16 | Alsthom Cgee | |
US3867216A (en) * | 1972-05-12 | 1975-02-18 | Adir Jacob | Process and material for manufacturing semiconductor devices |
US3795557A (en) * | 1972-05-12 | 1974-03-05 | Lfe Corp | Process and material for manufacturing semiconductor devices |
US3880684A (en) * | 1973-08-03 | 1975-04-29 | Mitsubishi Electric Corp | Process for preparing semiconductor |
US3951709A (en) * | 1974-02-28 | 1976-04-20 | Lfe Corporation | Process and material for semiconductor photomask fabrication |
-
1975
- 1975-05-22 US US05/580,102 patent/US3994793A/en not_active Expired - Lifetime
-
1976
- 1976-04-01 GB GB13276/76A patent/GB1485928A/en not_active Expired
- 1976-04-30 JP JP51048711A patent/JPS51141741A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4943844A (ja) * | 1972-09-01 | 1974-04-25 | ||
JPS4975270A (ja) * | 1972-11-22 | 1974-07-19 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5469090A (en) * | 1977-11-11 | 1979-06-02 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS5469091A (en) * | 1977-11-11 | 1979-06-02 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS54109387A (en) * | 1978-02-15 | 1979-08-27 | Hitachi Ltd | Etching method |
JPS6255692B2 (ja) * | 1978-02-15 | 1987-11-20 | Hitachi Ltd | |
JPS5518399A (en) * | 1978-07-27 | 1980-02-08 | Eaton Corp | Plasma etching method of aluminium article |
JPS5937572B2 (ja) * | 1978-07-27 | 1984-09-11 | イ−トン・コ−ポレ−シヨン | アルミニウム物品のプラズマ食刻法 |
JPS566453A (en) * | 1979-06-28 | 1981-01-23 | Matsushita Electronics Corp | Formation of metal pattern for semiconductor substrate |
JPS6210024B2 (ja) * | 1979-06-28 | 1987-03-04 | Matsushita Electronics Corp | |
JPS5629328A (en) * | 1979-08-17 | 1981-03-24 | Toshiba Corp | Plasma etching method |
JPH03241830A (ja) * | 1990-02-20 | 1991-10-29 | Mitsubishi Electric Corp | プラズマエッチングの方法 |
Also Published As
Publication number | Publication date |
---|---|
GB1485928A (en) | 1977-09-14 |
JPS5514143B2 (ja) | 1980-04-14 |
US3994793A (en) | 1976-11-30 |
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