JPS5337552A - Method of plasmaaetching aluminum - Google Patents
Method of plasmaaetching aluminumInfo
- Publication number
- JPS5337552A JPS5337552A JP11348576A JP11348576A JPS5337552A JP S5337552 A JPS5337552 A JP S5337552A JP 11348576 A JP11348576 A JP 11348576A JP 11348576 A JP11348576 A JP 11348576A JP S5337552 A JPS5337552 A JP S5337552A
- Authority
- JP
- Japan
- Prior art keywords
- plasmaaetching
- aluminum
- plasmaaetching aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11348576A JPS5337552A (en) | 1976-09-21 | 1976-09-21 | Method of plasmaaetching aluminum |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11348576A JPS5337552A (en) | 1976-09-21 | 1976-09-21 | Method of plasmaaetching aluminum |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5337552A true JPS5337552A (en) | 1978-04-06 |
Family
ID=14613471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11348576A Pending JPS5337552A (en) | 1976-09-21 | 1976-09-21 | Method of plasmaaetching aluminum |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5337552A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60215776A (en) * | 1984-04-09 | 1985-10-29 | Hitachi Ltd | Dry etching method |
-
1976
- 1976-09-21 JP JP11348576A patent/JPS5337552A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60215776A (en) * | 1984-04-09 | 1985-10-29 | Hitachi Ltd | Dry etching method |
JPS6366913B2 (en) * | 1984-04-09 | 1988-12-22 | Hitachi Ltd |
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