JPS5337552A - Method of plasmaaetching aluminum - Google Patents

Method of plasmaaetching aluminum

Info

Publication number
JPS5337552A
JPS5337552A JP11348576A JP11348576A JPS5337552A JP S5337552 A JPS5337552 A JP S5337552A JP 11348576 A JP11348576 A JP 11348576A JP 11348576 A JP11348576 A JP 11348576A JP S5337552 A JPS5337552 A JP S5337552A
Authority
JP
Japan
Prior art keywords
plasmaaetching
aluminum
plasmaaetching aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11348576A
Other languages
Japanese (ja)
Inventor
Katsuzou Ukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDEN VARIAN KK
Original Assignee
NICHIDEN VARIAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDEN VARIAN KK filed Critical NICHIDEN VARIAN KK
Priority to JP11348576A priority Critical patent/JPS5337552A/en
Publication of JPS5337552A publication Critical patent/JPS5337552A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP11348576A 1976-09-21 1976-09-21 Method of plasmaaetching aluminum Pending JPS5337552A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11348576A JPS5337552A (en) 1976-09-21 1976-09-21 Method of plasmaaetching aluminum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11348576A JPS5337552A (en) 1976-09-21 1976-09-21 Method of plasmaaetching aluminum

Publications (1)

Publication Number Publication Date
JPS5337552A true JPS5337552A (en) 1978-04-06

Family

ID=14613471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11348576A Pending JPS5337552A (en) 1976-09-21 1976-09-21 Method of plasmaaetching aluminum

Country Status (1)

Country Link
JP (1) JPS5337552A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60215776A (en) * 1984-04-09 1985-10-29 Hitachi Ltd Dry etching method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60215776A (en) * 1984-04-09 1985-10-29 Hitachi Ltd Dry etching method
JPS6366913B2 (en) * 1984-04-09 1988-12-22 Hitachi Ltd

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