JPS51120180A - Pattern printing device - Google Patents

Pattern printing device

Info

Publication number
JPS51120180A
JPS51120180A JP50044831A JP4483175A JPS51120180A JP S51120180 A JPS51120180 A JP S51120180A JP 50044831 A JP50044831 A JP 50044831A JP 4483175 A JP4483175 A JP 4483175A JP S51120180 A JPS51120180 A JP S51120180A
Authority
JP
Japan
Prior art keywords
printing device
pattern printing
masks
wafers
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50044831A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5519425B2 (OSRAM
Inventor
Kazue Yoshida
Makoto Asakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP50044831A priority Critical patent/JPS51120180A/ja
Publication of JPS51120180A publication Critical patent/JPS51120180A/ja
Publication of JPS5519425B2 publication Critical patent/JPS5519425B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP50044831A 1975-04-15 1975-04-15 Pattern printing device Granted JPS51120180A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50044831A JPS51120180A (en) 1975-04-15 1975-04-15 Pattern printing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50044831A JPS51120180A (en) 1975-04-15 1975-04-15 Pattern printing device

Publications (2)

Publication Number Publication Date
JPS51120180A true JPS51120180A (en) 1976-10-21
JPS5519425B2 JPS5519425B2 (OSRAM) 1980-05-26

Family

ID=12702396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50044831A Granted JPS51120180A (en) 1975-04-15 1975-04-15 Pattern printing device

Country Status (1)

Country Link
JP (1) JPS51120180A (OSRAM)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364479A (en) * 1976-11-22 1978-06-08 Nippon Telegr & Teleph Corp <Ntt> Position aligning system
JPS5496374A (en) * 1978-01-17 1979-07-30 Hitachi Ltd Automatic positioning device
JPS5496358A (en) * 1977-12-24 1979-07-30 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS54114183A (en) * 1978-02-27 1979-09-06 Canon Inc Position matching method
JPS5560949A (en) * 1978-10-31 1980-05-08 Nippon Telegr & Teleph Corp <Ntt> Positioning mark for radiation working
JPS587136A (ja) * 1981-07-06 1983-01-14 Hitachi Ltd 投影式露光方法およびその装置
JPS5831526A (ja) * 1981-08-19 1983-02-24 Nippon Kogaku Kk <Nikon> 焼付装置のアライメント装置
JPS5918950A (ja) * 1982-07-09 1984-01-31 パ−キン−エルマ−・ツエンゾ−ル・アンシユタルト 加工片上へのマスクの投影転写装置およびその調整方法
JPS62199031A (ja) * 1986-02-27 1987-09-02 Rohm Co Ltd 露光装置
JPS63175859A (ja) * 1987-01-16 1988-07-20 Ushio Inc 液晶基板製作の露光方式
JPH0316113A (ja) * 1990-06-15 1991-01-24 Hitachi Ltd 露光装置
JPH04123404U (ja) * 1991-04-23 1992-11-09 安藤電気株式会社 光による移動体の停止機構
JP2006165359A (ja) * 2004-12-09 2006-06-22 Canon Inc ウエハのダイシング方法および液体吐出ヘッド
JP2007150297A (ja) * 2005-11-23 2007-06-14 Asml Netherlands Bv 投影システムの倍率を計測する方法、デバイス製造方法およびコンピュータプログラム製品

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6277034A (ja) * 1985-09-25 1987-04-09 Nippon Denso Co Ltd 車両用交流発電機

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959576A (OSRAM) * 1972-06-29 1974-06-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959576A (OSRAM) * 1972-06-29 1974-06-10

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364479A (en) * 1976-11-22 1978-06-08 Nippon Telegr & Teleph Corp <Ntt> Position aligning system
JPS5496358A (en) * 1977-12-24 1979-07-30 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS5496374A (en) * 1978-01-17 1979-07-30 Hitachi Ltd Automatic positioning device
JPS54114183A (en) * 1978-02-27 1979-09-06 Canon Inc Position matching method
JPS5560949A (en) * 1978-10-31 1980-05-08 Nippon Telegr & Teleph Corp <Ntt> Positioning mark for radiation working
JPS587136A (ja) * 1981-07-06 1983-01-14 Hitachi Ltd 投影式露光方法およびその装置
JPS5831526A (ja) * 1981-08-19 1983-02-24 Nippon Kogaku Kk <Nikon> 焼付装置のアライメント装置
JPS5918950A (ja) * 1982-07-09 1984-01-31 パ−キン−エルマ−・ツエンゾ−ル・アンシユタルト 加工片上へのマスクの投影転写装置およびその調整方法
JPS62199031A (ja) * 1986-02-27 1987-09-02 Rohm Co Ltd 露光装置
JPS63175859A (ja) * 1987-01-16 1988-07-20 Ushio Inc 液晶基板製作の露光方式
JPH0316113A (ja) * 1990-06-15 1991-01-24 Hitachi Ltd 露光装置
JPH04123404U (ja) * 1991-04-23 1992-11-09 安藤電気株式会社 光による移動体の停止機構
JP2006165359A (ja) * 2004-12-09 2006-06-22 Canon Inc ウエハのダイシング方法および液体吐出ヘッド
JP2007150297A (ja) * 2005-11-23 2007-06-14 Asml Netherlands Bv 投影システムの倍率を計測する方法、デバイス製造方法およびコンピュータプログラム製品

Also Published As

Publication number Publication date
JPS5519425B2 (OSRAM) 1980-05-26

Similar Documents

Publication Publication Date Title
JPS51111076A (en) Exposure device
JPS51120180A (en) Pattern printing device
JPS51142230A (en) Device for jetting ink
JPS51147179A (en) Method of munufacturing of semiconductor device
JPS5211774A (en) Method of detecting relative position of patterns
JPS5352072A (en) Pattern for alignment
JPS51126073A (en) Pattern printing equpment made available by photo-etching method
JPS51120178A (en) Scanning type mask detector
JPS51139267A (en) Photo-mask
JPS53117384A (en) Photoetching mask
JPS5277670A (en) Semiconductive device
JPS5228872A (en) Method for measuring the size of thin plane
JPS525270A (en) Photo-mask
JPS5222473A (en) Panel measuring device
JPS5234758A (en) Process for the fabrication of a character plate
JPS5429978A (en) Carrier device for semiconductor wafer and mask
JPS527565A (en) Method of and apparatus for stopping object at fixed position
JPS5218176A (en) Production method of semiconductor device
JPS5359370A (en) Positioning method
JPS51124735A (en) A control apparatus for the fuel amount control apparatus
JPS5227280A (en) Method to form pinholes
JPS5258462A (en) Marking device
JPS51148156A (en) A positioning apparatus
JPS5243427A (en) Method for photoengraving light sensitive resin
JPS51147299A (en) Figure display device