JPS5560949A - Positioning mark for radiation working - Google Patents
Positioning mark for radiation workingInfo
- Publication number
- JPS5560949A JPS5560949A JP13328178A JP13328178A JPS5560949A JP S5560949 A JPS5560949 A JP S5560949A JP 13328178 A JP13328178 A JP 13328178A JP 13328178 A JP13328178 A JP 13328178A JP S5560949 A JPS5560949 A JP S5560949A
- Authority
- JP
- Japan
- Prior art keywords
- film
- chalocogenite
- amorphous
- mark
- photo mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To reduce the number of manufacturing steps, make the manufacture simple and improve detection signal SN ratios by using amorphous chalocogenite as a positioning mark material in the production of a photo mask for electron beam lithography.
CONSTITUTION: Amorphous chalocogenite of Se 70W95atom%, Ge30W5atom% is used as a mark material. For example, an amorphous chalocogenite thin film 22 is formed to thicknesses of 2500W5000 Å through high-frequency sputtering or the like to a substrate (glass plate) 21, thence it is dipped in a silver nitrate solution or the like to form a thin Ag film 23. Ultraviolet rays are radiated via photo mask to this film 23 to diffuse Ag into the film 22. The portions other than the diffused portions are treated with an aqua regia base processing solution to get rid of the film 23, whereby a positioning mark 24 is formed. Next, a Cr film or the like 25 is formed through vapor deposition or the like over the entire surface to complete the photo mask with mark. The thickness of the Ag film is preferably 80W120 Å. That of the Cr film 25 is preferably about 500 Å. Amorphous chalocogenite has high reflectance to make the detection of the mark 24 easy.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13328178A JPS5560949A (en) | 1978-10-31 | 1978-10-31 | Positioning mark for radiation working |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13328178A JPS5560949A (en) | 1978-10-31 | 1978-10-31 | Positioning mark for radiation working |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5560949A true JPS5560949A (en) | 1980-05-08 |
JPS5760623B2 JPS5760623B2 (en) | 1982-12-20 |
Family
ID=15100964
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13328178A Granted JPS5560949A (en) | 1978-10-31 | 1978-10-31 | Positioning mark for radiation working |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5560949A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6049627A (en) * | 1983-08-29 | 1985-03-18 | Mitsubishi Electric Corp | Photo mask |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51113572A (en) * | 1975-03-31 | 1976-10-06 | Hitachi Ltd | Centering method for electronic ray picture and the unit using the sai d method |
JPS51120180A (en) * | 1975-04-15 | 1976-10-21 | Nippon Telegr & Teleph Corp <Ntt> | Pattern printing device |
JPS5211319A (en) * | 1975-06-20 | 1977-01-28 | Daihatsu Diesel Kk | Supply and exhausting gas device of internal combustion engine |
-
1978
- 1978-10-31 JP JP13328178A patent/JPS5560949A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51113572A (en) * | 1975-03-31 | 1976-10-06 | Hitachi Ltd | Centering method for electronic ray picture and the unit using the sai d method |
JPS51120180A (en) * | 1975-04-15 | 1976-10-21 | Nippon Telegr & Teleph Corp <Ntt> | Pattern printing device |
JPS5211319A (en) * | 1975-06-20 | 1977-01-28 | Daihatsu Diesel Kk | Supply and exhausting gas device of internal combustion engine |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6049627A (en) * | 1983-08-29 | 1985-03-18 | Mitsubishi Electric Corp | Photo mask |
Also Published As
Publication number | Publication date |
---|---|
JPS5760623B2 (en) | 1982-12-20 |
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