JPS56138848A - Photoelectric surface mask - Google Patents

Photoelectric surface mask

Info

Publication number
JPS56138848A
JPS56138848A JP4251780A JP4251780A JPS56138848A JP S56138848 A JPS56138848 A JP S56138848A JP 4251780 A JP4251780 A JP 4251780A JP 4251780 A JP4251780 A JP 4251780A JP S56138848 A JPS56138848 A JP S56138848A
Authority
JP
Japan
Prior art keywords
mask
photoelectric surface
cathode material
surface mask
contrast
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4251780A
Other languages
Japanese (ja)
Inventor
Kyusaku Nishioka
Ichiro Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP4251780A priority Critical patent/JPS56138848A/en
Publication of JPS56138848A publication Critical patent/JPS56138848A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/34—Photo-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3425—Metals, metal alloys

Abstract

PURPOSE:To make a photoelectric surface mask have its conductivity without reducing the contrast of the mask pattern by forming between a transparent substrate and a cathode material conductive films which allow a transmission factor of 80% or more for the ultraviolet rays in use. CONSTITUTION:A rear electrode 2 is formed on a transparent substrate 1 by applying indium oxide up to its thickness of about 100 A. Chromium is applied on it as a screening film 3 and a pattern is formed by performing etching. Cesium iodide is applied on it as a cathode material 4 to fabricate a photoelectric surface mask. As described the above, by using a conductive film whose transmission factor is 80% or less as the rear electrode 2, electrons can be supplied to the whole surface of the cathode material of the photoelectric surface mask without reducing the contrast of the mask pattern.
JP4251780A 1980-03-31 1980-03-31 Photoelectric surface mask Pending JPS56138848A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4251780A JPS56138848A (en) 1980-03-31 1980-03-31 Photoelectric surface mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4251780A JPS56138848A (en) 1980-03-31 1980-03-31 Photoelectric surface mask

Publications (1)

Publication Number Publication Date
JPS56138848A true JPS56138848A (en) 1981-10-29

Family

ID=12638262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4251780A Pending JPS56138848A (en) 1980-03-31 1980-03-31 Photoelectric surface mask

Country Status (1)

Country Link
JP (1) JPS56138848A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2629266A1 (en) * 1986-07-09 1989-09-29 Radiotechnique Compelec CONTACT DEVICE FOR PHOTOCATHODE OF PHOTOELECTRIC TUBES AND METHOD OF MANUFACTURE
JPH0568875A (en) * 1991-09-11 1993-03-23 Ebara Res Co Ltd Photoelectron emitting member
JP2018077940A (en) * 2016-11-07 2018-05-17 国立大学法人東京工業大学 Nanoscale photocathode electron source

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2629266A1 (en) * 1986-07-09 1989-09-29 Radiotechnique Compelec CONTACT DEVICE FOR PHOTOCATHODE OF PHOTOELECTRIC TUBES AND METHOD OF MANUFACTURE
EP0416175A1 (en) * 1986-07-09 1991-03-13 Philips Composants Contact device for the photocathodes of photoelectric tubes, and process for manufacturing same
JPH0568875A (en) * 1991-09-11 1993-03-23 Ebara Res Co Ltd Photoelectron emitting member
JP2018077940A (en) * 2016-11-07 2018-05-17 国立大学法人東京工業大学 Nanoscale photocathode electron source

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