JPS5496374A - Automatic positioning device - Google Patents
Automatic positioning deviceInfo
- Publication number
- JPS5496374A JPS5496374A JP279878A JP279878A JPS5496374A JP S5496374 A JPS5496374 A JP S5496374A JP 279878 A JP279878 A JP 279878A JP 279878 A JP279878 A JP 279878A JP S5496374 A JPS5496374 A JP S5496374A
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- positioning
- set voltage
- voltage
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Projection-Type Copiers In General (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Abstract
PURPOSE: To secure a high-speed and high-accuracy positionding with the positioning device which is used in the reduction projection exposure device for the integrated circuit pattern, by comparing the output voltage which detected photoelectrically the position of the positioning mark on the reticle with the set voltage of a fixed amount to control the fine shifting mechanism.
CONSTITUTION: Set voltage width 2 is given corresponding to the positioning accuracy of the reticle, and output voltage 3 of photoelectric microscope 1 is compared 4 then with set voltage width 2. Shifting stage 7 is moved via amplifier circuit 5 and motor driving circuit 6 so that voltage 3 may be within the range of the set voltage, and reticle 8 is vacuum-absorbed to be fixed on stage 7. The positions are detected via photoelectric microscope 1' and 1" for positioning cross- shaped pattern 9 and 10 on reticle 8 respectively. And the positioning of the reticle in the three directions x, y and θ each is carried out through driving of fine shifting mechanism 11.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP279878A JPS5496374A (en) | 1978-01-17 | 1978-01-17 | Automatic positioning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP279878A JPS5496374A (en) | 1978-01-17 | 1978-01-17 | Automatic positioning device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5496374A true JPS5496374A (en) | 1979-07-30 |
JPS6238853B2 JPS6238853B2 (en) | 1987-08-20 |
Family
ID=11539385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP279878A Granted JPS5496374A (en) | 1978-01-17 | 1978-01-17 | Automatic positioning device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5496374A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59138908U (en) * | 1983-03-08 | 1984-09-17 | 東北金属工業株式会社 | Mark sense positioning device |
JPS59170841A (en) * | 1983-03-17 | 1984-09-27 | Nippon Seiko Kk | Positioning device of exposing device |
JPH04299332A (en) * | 1991-03-28 | 1992-10-22 | Ushio Inc | Film exposing method |
EP1014229A2 (en) * | 1998-12-14 | 2000-06-28 | Seiko Epson Corporation | Electronic apparatus and control method for electronic apparatus |
EP1014228A2 (en) * | 1998-12-14 | 2000-06-28 | Seiko Epson Corporation | Portable electronic device and control method for the same |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51120180A (en) * | 1975-04-15 | 1976-10-21 | Nippon Telegr & Teleph Corp <Ntt> | Pattern printing device |
JPS52143773A (en) * | 1976-05-26 | 1977-11-30 | Hitachi Ltd | Reduction projecting and printing apparatus |
-
1978
- 1978-01-17 JP JP279878A patent/JPS5496374A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51120180A (en) * | 1975-04-15 | 1976-10-21 | Nippon Telegr & Teleph Corp <Ntt> | Pattern printing device |
JPS52143773A (en) * | 1976-05-26 | 1977-11-30 | Hitachi Ltd | Reduction projecting and printing apparatus |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59138908U (en) * | 1983-03-08 | 1984-09-17 | 東北金属工業株式会社 | Mark sense positioning device |
JPS59170841A (en) * | 1983-03-17 | 1984-09-27 | Nippon Seiko Kk | Positioning device of exposing device |
JPH04299332A (en) * | 1991-03-28 | 1992-10-22 | Ushio Inc | Film exposing method |
EP1014229A2 (en) * | 1998-12-14 | 2000-06-28 | Seiko Epson Corporation | Electronic apparatus and control method for electronic apparatus |
EP1014228A2 (en) * | 1998-12-14 | 2000-06-28 | Seiko Epson Corporation | Portable electronic device and control method for the same |
EP1014229A3 (en) * | 1998-12-14 | 2003-04-16 | Seiko Epson Corporation | Electronic apparatus and control method for electronic apparatus |
EP1014228A3 (en) * | 1998-12-14 | 2003-04-16 | Seiko Epson Corporation | Portable electronic device and control method for the same |
Also Published As
Publication number | Publication date |
---|---|
JPS6238853B2 (en) | 1987-08-20 |
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