JPH11501463A5 - - Google Patents

Info

Publication number
JPH11501463A5
JPH11501463A5 JP1997524138A JP52413897A JPH11501463A5 JP H11501463 A5 JPH11501463 A5 JP H11501463A5 JP 1997524138 A JP1997524138 A JP 1997524138A JP 52413897 A JP52413897 A JP 52413897A JP H11501463 A5 JPH11501463 A5 JP H11501463A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP1997524138A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11501463A (ja
Filing date
Publication date
Priority claimed from US08/583,148 external-priority patent/US5915164A/en
Application filed filed Critical
Publication of JPH11501463A publication Critical patent/JPH11501463A/ja
Publication of JPH11501463A5 publication Critical patent/JPH11501463A5/ja
Ceased legal-status Critical Current

Links

JP9524138A 1995-12-28 1996-12-06 GaN−AlNをベース材料とする高電圧半導体装置の製造方法及び製造された半導体装置 Ceased JPH11501463A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/583,148 US5915164A (en) 1995-12-28 1995-12-28 Methods of making high voltage GaN-A1N based semiconductor devices
US08/583,148 1995-12-28
PCT/IB1996/001377 WO1997024752A2 (en) 1995-12-28 1996-12-06 A METHOD OF MANUFACTURING A HIGH VOLTAGE GaN-AlN BASED SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MADE

Publications (2)

Publication Number Publication Date
JPH11501463A JPH11501463A (ja) 1999-02-02
JPH11501463A5 true JPH11501463A5 (enExample) 2004-11-04

Family

ID=24331868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9524138A Ceased JPH11501463A (ja) 1995-12-28 1996-12-06 GaN−AlNをベース材料とする高電圧半導体装置の製造方法及び製造された半導体装置

Country Status (5)

Country Link
US (2) US5915164A (enExample)
EP (1) EP0812468B1 (enExample)
JP (1) JPH11501463A (enExample)
DE (1) DE69625045T2 (enExample)
WO (1) WO1997024752A2 (enExample)

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US7626217B2 (en) * 2005-04-11 2009-12-01 Cree, Inc. Composite substrates of conductive and insulating or semi-insulating group III-nitrides for group III-nitride devices
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US9331192B2 (en) 2005-06-29 2016-05-03 Cree, Inc. Low dislocation density group III nitride layers on silicon carbide substrates and methods of making the same
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JP5463529B2 (ja) * 2008-06-11 2014-04-09 古河電気工業株式会社 電界効果トランジスタの製造方法
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JP6150322B2 (ja) * 2012-08-03 2017-06-21 ローム株式会社 窒化物半導体素子
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CN112242441A (zh) * 2019-07-16 2021-01-19 联华电子股份有限公司 高电子迁移率晶体管
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JP7767762B2 (ja) * 2021-08-16 2025-11-12 住友電気工業株式会社 半導体装置及び半導体装置の製造方法

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