JPH11231252A5 - - Google Patents

Info

Publication number
JPH11231252A5
JPH11231252A5 JP1998313488A JP31348898A JPH11231252A5 JP H11231252 A5 JPH11231252 A5 JP H11231252A5 JP 1998313488 A JP1998313488 A JP 1998313488A JP 31348898 A JP31348898 A JP 31348898A JP H11231252 A5 JPH11231252 A5 JP H11231252A5
Authority
JP
Japan
Prior art keywords
movable plate
drive coil
magnet
magnetic circuit
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998313488A
Other languages
English (en)
Japanese (ja)
Other versions
JP4414498B2 (ja
JPH11231252A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP31348898A priority Critical patent/JP4414498B2/ja
Priority claimed from JP31348898A external-priority patent/JP4414498B2/ja
Priority to US09/206,545 priority patent/US6122089A/en
Publication of JPH11231252A publication Critical patent/JPH11231252A/ja
Publication of JPH11231252A5 publication Critical patent/JPH11231252A5/ja
Application granted granted Critical
Publication of JP4414498B2 publication Critical patent/JP4414498B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP31348898A 1997-12-09 1998-11-04 光偏向器 Expired - Fee Related JP4414498B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP31348898A JP4414498B2 (ja) 1997-12-09 1998-11-04 光偏向器
US09/206,545 US6122089A (en) 1997-12-09 1998-12-07 Optical deflector comprising a movable member having a high rigidity and a reduced moment of inertia and a method for producing the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP33882797 1997-12-09
JP9-338827 1997-12-09
JP31348898A JP4414498B2 (ja) 1997-12-09 1998-11-04 光偏向器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009223313A Division JP5143102B2 (ja) 1997-12-09 2009-09-28 光偏向器の製造方法

Publications (3)

Publication Number Publication Date
JPH11231252A JPH11231252A (ja) 1999-08-27
JPH11231252A5 true JPH11231252A5 (enExample) 2005-12-15
JP4414498B2 JP4414498B2 (ja) 2010-02-10

Family

ID=26567588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31348898A Expired - Fee Related JP4414498B2 (ja) 1997-12-09 1998-11-04 光偏向器

Country Status (2)

Country Link
US (1) US6122089A (enExample)
JP (1) JP4414498B2 (enExample)

Families Citing this family (48)

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US7170665B2 (en) * 2002-07-24 2007-01-30 Olympus Corporation Optical unit provided with an actuator
JP4111619B2 (ja) 1999-02-26 2008-07-02 日本信号株式会社 プレーナ型光走査装置の実装構造
KR100450790B1 (ko) * 1999-05-28 2004-10-01 삼성전자주식회사 마이크로 미러 스캐너 및 그 제조방법
US7064879B1 (en) 2000-04-07 2006-06-20 Microsoft Corporation Magnetically actuated microelectrochemical systems actuator
JP2002023097A (ja) * 2000-07-10 2002-01-23 Olympus Optical Co Ltd ねじり揺動体
JP4516673B2 (ja) * 2000-07-28 2010-08-04 シチズンファインテックミヨタ株式会社 プレーナ型ガルバノミラーの製造方法
JP3926552B2 (ja) * 2000-10-25 2007-06-06 日本信号株式会社 アクチュエ−タ
US6775048B1 (en) * 2000-10-31 2004-08-10 Microsoft Corporation Microelectrical mechanical structure (MEMS) optical modulator and optical display system
JP4674017B2 (ja) 2000-11-20 2011-04-20 オリンパス株式会社 光偏向器
JP4544734B2 (ja) * 2000-12-21 2010-09-15 シチズンファインテックミヨタ株式会社 プレーナー型ガルバノミラー
JP2002287046A (ja) * 2001-03-23 2002-10-03 Miyota Kk プレーナー型ガルバノミラー
JP2002321195A (ja) * 2001-04-20 2002-11-05 Olympus Optical Co Ltd 振動体およびその製造方法
JP2003066362A (ja) * 2001-08-23 2003-03-05 Olympus Optical Co Ltd 光偏向器
US6804959B2 (en) * 2001-12-31 2004-10-19 Microsoft Corporation Unilateral thermal buckle-beam actuator
JP2005521098A (ja) * 2002-03-26 2005-07-14 オプティスキャン ピーティーワイ リミテッド 光走査デバイス
US7053519B2 (en) * 2002-03-29 2006-05-30 Microsoft Corporation Electrostatic bimorph actuator
US9318350B2 (en) 2003-04-15 2016-04-19 General Dynamics Advanced Information Systems, Inc. Method and apparatus for converting commerical off-the-shelf (COTS) thin small-outline package (TSOP) components into rugged off-the-shelf (ROTS) components
JP2005092174A (ja) * 2003-08-12 2005-04-07 Fujitsu Ltd マイクロ揺動素子
JP4574396B2 (ja) * 2005-03-02 2010-11-04 キヤノン株式会社 光偏向器
TWI304394B (en) * 2006-07-03 2008-12-21 Nat Univ Tsing Hua Magnetic element and manufacturing process, driving structure and driving method therefor
KR100868759B1 (ko) * 2007-01-25 2008-11-17 삼성전기주식회사 멤스 디바이스 및 이의 제조방법
TWI341602B (en) * 2007-08-15 2011-05-01 Nat Univ Tsing Hua Magnetic element and manufacturing method therefor
JP2009300736A (ja) * 2008-06-13 2009-12-24 Seiko Epson Corp 光スキャナ装置の製造方法
FR2951713B1 (fr) * 2009-10-27 2012-04-13 Centre Nat Rech Scient Micro-volet a actionnement electromagnetique
WO2013114535A1 (ja) * 2012-01-30 2013-08-08 パイオニア株式会社 アクチュエータの製造方法
US10114212B2 (en) 2012-05-29 2018-10-30 Kabushiki Kaisha Toyota Chuo Kenkyusho Deflector
WO2015092907A1 (ja) 2013-12-19 2015-06-25 パイオニア株式会社 駆動装置
JP2015184216A (ja) * 2014-03-25 2015-10-22 株式会社原子力安全システム研究所 結晶粒界強度測定方法
JP6479354B2 (ja) 2014-06-30 2019-03-06 浜松ホトニクス株式会社 ミラー駆動装置及びその製造方法
US20160124214A1 (en) * 2014-10-31 2016-05-05 Intel Corporation Electromagnetic mems device
JP1680386S (enExample) * 2018-05-01 2021-03-01
JP1625495S (enExample) 2018-05-01 2019-03-18
USD907085S1 (en) 2018-05-01 2021-01-05 Hamamatsu Photonics K.K. Laser beam reflector
JP1680385S (enExample) * 2018-05-01 2021-03-01
JP1639597S (enExample) * 2018-05-01 2019-08-19
USD903614S1 (en) 2018-05-01 2020-12-01 Hamamatsu Photonics K.K. Laser beam reflector
JP1680755S (enExample) 2018-05-01 2021-03-08
JP1625135S (enExample) * 2018-05-01 2019-03-18
JP1680387S (enExample) * 2018-05-01 2021-03-01
JP1680507S (enExample) * 2018-05-01 2021-03-08
JP1680388S (enExample) * 2018-05-01 2021-03-01
KR102626254B1 (ko) * 2018-12-04 2024-01-17 현대자동차주식회사 노면상으로 광을 투사하는 자동차 및 그 제어 방법
CN113196133B (zh) 2018-12-19 2023-11-07 株式会社理光 可移动装置，测距装置，图像投影装置，车辆和台座
US11422334B2 (en) * 2019-02-25 2022-08-23 Tdk Taiwan Corp. Driving mechanism
US11163151B2 (en) * 2019-05-17 2021-11-02 Microsoft Technology Licensing, Llc Anisotropic conductive adhesive bond in a piezoelectric micro-electro-mechanical system scanning mirror system
US12135416B2 (en) * 2020-06-19 2024-11-05 Ricoh Company, Ltd. Light deflector, distance measuring device, projection device, and mobile object
JP7760314B2 (ja) * 2021-09-30 2025-10-27 日本信号株式会社 磁気回路式ミラー駆動装置
CN115356849B (zh) * 2022-10-21 2023-01-03 北京瑞控信科技股份有限公司 一种用于超大口径快反镜的电磁驱动装置及超大口径快反镜

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JPS62210418A (ja) * 1986-03-12 1987-09-16 Hitachi Ltd 光ビ−ム偏向ミラ−
JPH01195414A (ja) * 1988-01-30 1989-08-07 Konica Corp ミラー振動子
JP2722314B2 (ja) * 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
JP2987750B2 (ja) * 1995-05-26 1999-12-06 日本信号株式会社 プレーナ型電磁アクチュエータ

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