JP4414498B2 - 光偏向器 - Google Patents

光偏向器 Download PDF

Info

Publication number
JP4414498B2
JP4414498B2 JP31348898A JP31348898A JP4414498B2 JP 4414498 B2 JP4414498 B2 JP 4414498B2 JP 31348898 A JP31348898 A JP 31348898A JP 31348898 A JP31348898 A JP 31348898A JP 4414498 B2 JP4414498 B2 JP 4414498B2
Authority
JP
Japan
Prior art keywords
movable plate
drive coil
magnetic
optical deflector
permanent magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP31348898A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11231252A (ja
JPH11231252A5 (enExample
Inventor
幸昭 源
直仁 志賀
健志 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP31348898A priority Critical patent/JP4414498B2/ja
Priority to US09/206,545 priority patent/US6122089A/en
Publication of JPH11231252A publication Critical patent/JPH11231252A/ja
Publication of JPH11231252A5 publication Critical patent/JPH11231252A5/ja
Application granted granted Critical
Publication of JP4414498B2 publication Critical patent/JP4414498B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP31348898A 1997-12-09 1998-11-04 光偏向器 Expired - Fee Related JP4414498B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP31348898A JP4414498B2 (ja) 1997-12-09 1998-11-04 光偏向器
US09/206,545 US6122089A (en) 1997-12-09 1998-12-07 Optical deflector comprising a movable member having a high rigidity and a reduced moment of inertia and a method for producing the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP33882797 1997-12-09
JP9-338827 1997-12-09
JP31348898A JP4414498B2 (ja) 1997-12-09 1998-11-04 光偏向器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009223313A Division JP5143102B2 (ja) 1997-12-09 2009-09-28 光偏向器の製造方法

Publications (3)

Publication Number Publication Date
JPH11231252A JPH11231252A (ja) 1999-08-27
JPH11231252A5 JPH11231252A5 (enExample) 2005-12-15
JP4414498B2 true JP4414498B2 (ja) 2010-02-10

Family

ID=26567588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31348898A Expired - Fee Related JP4414498B2 (ja) 1997-12-09 1998-11-04 光偏向器

Country Status (2)

Country Link
US (1) US6122089A (enExample)
JP (1) JP4414498B2 (enExample)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7170665B2 (en) * 2002-07-24 2007-01-30 Olympus Corporation Optical unit provided with an actuator
JP4111619B2 (ja) 1999-02-26 2008-07-02 日本信号株式会社 プレーナ型光走査装置の実装構造
KR100450790B1 (ko) * 1999-05-28 2004-10-01 삼성전자주식회사 마이크로 미러 스캐너 및 그 제조방법
US7064879B1 (en) 2000-04-07 2006-06-20 Microsoft Corporation Magnetically actuated microelectrochemical systems actuator
JP2002023097A (ja) * 2000-07-10 2002-01-23 Olympus Optical Co Ltd ねじり揺動体
JP4516673B2 (ja) * 2000-07-28 2010-08-04 シチズンファインテックミヨタ株式会社 プレーナ型ガルバノミラーの製造方法
JP3926552B2 (ja) * 2000-10-25 2007-06-06 日本信号株式会社 アクチュエ−タ
US6775048B1 (en) * 2000-10-31 2004-08-10 Microsoft Corporation Microelectrical mechanical structure (MEMS) optical modulator and optical display system
JP4674017B2 (ja) * 2000-11-20 2011-04-20 オリンパス株式会社 光偏向器
JP4544734B2 (ja) * 2000-12-21 2010-09-15 シチズンファインテックミヨタ株式会社 プレーナー型ガルバノミラー
JP2002287046A (ja) * 2001-03-23 2002-10-03 Miyota Kk プレーナー型ガルバノミラー
JP2002321195A (ja) * 2001-04-20 2002-11-05 Olympus Optical Co Ltd 振動体およびその製造方法
JP2003066362A (ja) * 2001-08-23 2003-03-05 Olympus Optical Co Ltd 光偏向器
US6804959B2 (en) * 2001-12-31 2004-10-19 Microsoft Corporation Unilateral thermal buckle-beam actuator
WO2003081318A1 (en) * 2002-03-26 2003-10-02 Optiscan Pty Ltd Light scanning device
US7053519B2 (en) * 2002-03-29 2006-05-30 Microsoft Corporation Electrostatic bimorph actuator
US9318350B2 (en) 2003-04-15 2016-04-19 General Dynamics Advanced Information Systems, Inc. Method and apparatus for converting commerical off-the-shelf (COTS) thin small-outline package (TSOP) components into rugged off-the-shelf (ROTS) components
JP2005092174A (ja) * 2003-08-12 2005-04-07 Fujitsu Ltd マイクロ揺動素子
JP4574396B2 (ja) * 2005-03-02 2010-11-04 キヤノン株式会社 光偏向器
TWI304394B (en) * 2006-07-03 2008-12-21 Nat Univ Tsing Hua Magnetic element and manufacturing process, driving structure and driving method therefor
KR100868759B1 (ko) * 2007-01-25 2008-11-17 삼성전기주식회사 멤스 디바이스 및 이의 제조방법
TWI341602B (en) * 2007-08-15 2011-05-01 Nat Univ Tsing Hua Magnetic element and manufacturing method therefor
JP2009300736A (ja) * 2008-06-13 2009-12-24 Seiko Epson Corp 光スキャナ装置の製造方法
FR2951713B1 (fr) 2009-10-27 2012-04-13 Centre Nat Rech Scient Micro-volet a actionnement electromagnetique
WO2013114535A1 (ja) * 2012-01-30 2013-08-08 パイオニア株式会社 アクチュエータの製造方法
US10114212B2 (en) 2012-05-29 2018-10-30 Kabushiki Kaisha Toyota Chuo Kenkyusho Deflector
WO2015092907A1 (ja) 2013-12-19 2015-06-25 パイオニア株式会社 駆動装置
JP2015184216A (ja) * 2014-03-25 2015-10-22 株式会社原子力安全システム研究所 結晶粒界強度測定方法
JP6479354B2 (ja) 2014-06-30 2019-03-06 浜松ホトニクス株式会社 ミラー駆動装置及びその製造方法
US20160124214A1 (en) * 2014-10-31 2016-05-05 Intel Corporation Electromagnetic mems device
JP1680507S (enExample) 2018-05-01 2021-03-08
USD903614S1 (en) 2018-05-01 2020-12-01 Hamamatsu Photonics K.K. Laser beam reflector
JP1680386S (enExample) * 2018-05-01 2021-03-01
JP1639597S (enExample) * 2018-05-01 2019-08-19
USD907085S1 (en) 2018-05-01 2021-01-05 Hamamatsu Photonics K.K. Laser beam reflector
JP1625495S (enExample) * 2018-05-01 2019-03-18
JP1680388S (enExample) * 2018-05-01 2021-03-01
JP1680755S (enExample) 2018-05-01 2021-03-08
JP1680385S (enExample) * 2018-05-01 2021-03-01
JP1680387S (enExample) * 2018-05-01 2021-03-01
JP1625135S (enExample) * 2018-05-01 2019-03-18
KR102626254B1 (ko) * 2018-12-04 2024-01-17 현대자동차주식회사 노면상으로 광을 투사하는 자동차 및 그 제어 방법
CN113196133B (zh) 2018-12-19 2023-11-07 株式会社理光 可移动装置，测距装置，图像投影装置，车辆和台座
US11422334B2 (en) * 2019-02-25 2022-08-23 Tdk Taiwan Corp. Driving mechanism
US11163151B2 (en) * 2019-05-17 2021-11-02 Microsoft Technology Licensing, Llc Anisotropic conductive adhesive bond in a piezoelectric micro-electro-mechanical system scanning mirror system
US12135416B2 (en) * 2020-06-19 2024-11-05 Ricoh Company, Ltd. Light deflector, distance measuring device, projection device, and mobile object
JP7760314B2 (ja) * 2021-09-30 2025-10-27 日本信号株式会社 磁気回路式ミラー駆動装置
CN115356849B (zh) * 2022-10-21 2023-01-03 北京瑞控信科技股份有限公司 一种用于超大口径快反镜的电磁驱动装置及超大口径快反镜

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62210418A (ja) * 1986-03-12 1987-09-16 Hitachi Ltd 光ビ−ム偏向ミラ−
JPH01195414A (ja) * 1988-01-30 1989-08-07 Konica Corp ミラー振動子
JP2722314B2 (ja) * 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
JP2987750B2 (ja) * 1995-05-26 1999-12-06 日本信号株式会社 プレーナ型電磁アクチュエータ

Also Published As

Publication number Publication date
JPH11231252A (ja) 1999-08-27
US6122089A (en) 2000-09-19

Similar Documents

Publication Publication Date Title
JP4414498B2 (ja) 光偏向器
JP5143102B2 (ja) 光偏向器の製造方法
US6188504B1 (en) Optical scanner
KR100236608B1 (ko) 헤드액츄에이터
US6201629B1 (en) Torsional micro-mechanical mirror system
KR100908120B1 (ko) 전자기 마이크로 액츄에이터
US20010045530A1 (en) Magnetic scanning or positioning system with at least two degrees of freedom
JP2002361174A (ja) 振動アクチュエータ装置
US20020113675A1 (en) Movable-body apparatus, optical deflector, and method of fabricating the same
JP5383065B2 (ja) プレーナ型電磁アクチュエータ及びその製造方法
JP2000330067A (ja) ねじり揺動体
JP2004126503A (ja) マイクロアクチュエータ及びこれを用いた光スイッチ
JP4197776B2 (ja) 光スキャナ
JPH08334723A (ja) 光偏向素子
JP3684003B2 (ja) 光スキャナ
US6813049B2 (en) Torsional rocking structural component
JP4036643B2 (ja) 光偏向器及び光偏向器アレイ
JPH10123449A5 (enExample)
JP2002350457A (ja) 揺動体
JPH1020226A (ja) 光スキャナ
JPH1020226A5 (enExample)
JP2013051748A (ja) プレーナ型電磁アクチュエータ
US20240387086A1 (en) Driving element and driving device
JP3776521B2 (ja) 光スキャナ
JP2002090684A (ja) 光走査装置及びその製造方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20051028

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051028

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090413

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090421

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090622

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090728

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090928

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20091027

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20091120

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121127

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131127

Year of fee payment: 4

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees