JPH09275081A5 - - Google Patents

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Publication number
JPH09275081A5
JPH09275081A5 JP1997034468A JP3446897A JPH09275081A5 JP H09275081 A5 JPH09275081 A5 JP H09275081A5 JP 1997034468 A JP1997034468 A JP 1997034468A JP 3446897 A JP3446897 A JP 3446897A JP H09275081 A5 JPH09275081 A5 JP H09275081A5
Authority
JP
Japan
Prior art keywords
homogenizer
laser beam
irradiation device
laser irradiation
linear laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997034468A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09275081A (ja
JP3917231B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP03446897A priority Critical patent/JP3917231B2/ja
Priority claimed from JP03446897A external-priority patent/JP3917231B2/ja
Publication of JPH09275081A publication Critical patent/JPH09275081A/ja
Publication of JPH09275081A5 publication Critical patent/JPH09275081A5/ja
Application granted granted Critical
Publication of JP3917231B2 publication Critical patent/JP3917231B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP03446897A 1996-02-06 1997-02-03 レーザー照射装置およびレーザー照射方法 Expired - Fee Related JP3917231B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03446897A JP3917231B2 (ja) 1996-02-06 1997-02-03 レーザー照射装置およびレーザー照射方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP8-44306 1996-02-06
JP4430696 1996-02-06
JP03446897A JP3917231B2 (ja) 1996-02-06 1997-02-03 レーザー照射装置およびレーザー照射方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005204124A Division JP4527018B2 (ja) 1996-02-06 2005-07-13 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JPH09275081A JPH09275081A (ja) 1997-10-21
JPH09275081A5 true JPH09275081A5 (enExample) 2004-12-24
JP3917231B2 JP3917231B2 (ja) 2007-05-23

Family

ID=12687817

Family Applications (3)

Application Number Title Priority Date Filing Date
JP03446897A Expired - Fee Related JP3917231B2 (ja) 1996-02-06 1997-02-03 レーザー照射装置およびレーザー照射方法
JP2005204124A Expired - Fee Related JP4527018B2 (ja) 1996-02-06 2005-07-13 半導体装置の作製方法
JP2009143839A Expired - Fee Related JP4593671B2 (ja) 1996-02-06 2009-06-17 レーザー照射装置およびレーザー照射方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2005204124A Expired - Fee Related JP4527018B2 (ja) 1996-02-06 2005-07-13 半導体装置の作製方法
JP2009143839A Expired - Fee Related JP4593671B2 (ja) 1996-02-06 2009-06-17 レーザー照射装置およびレーザー照射方法

Country Status (3)

Country Link
US (7) US5900980A (enExample)
JP (3) JP3917231B2 (enExample)
KR (1) KR100376184B1 (enExample)

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