JPH0778926A - 樹脂封止型半導体装置 - Google Patents

樹脂封止型半導体装置

Info

Publication number
JPH0778926A
JPH0778926A JP22158593A JP22158593A JPH0778926A JP H0778926 A JPH0778926 A JP H0778926A JP 22158593 A JP22158593 A JP 22158593A JP 22158593 A JP22158593 A JP 22158593A JP H0778926 A JPH0778926 A JP H0778926A
Authority
JP
Japan
Prior art keywords
semiconductor element
island
ceramic
wires
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22158593A
Other languages
English (en)
Inventor
Nobuyuki Mori
伸之 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP22158593A priority Critical patent/JPH0778926A/ja
Publication of JPH0778926A publication Critical patent/JPH0778926A/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/0555—Shape
    • H01L2224/05552—Shape in top view
    • H01L2224/05554—Shape in top view being square
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • H01L2224/061—Disposition
    • H01L2224/0612—Layout
    • H01L2224/0615—Mirror array, i.e. array having only a reflection symmetry, i.e. bilateral symmetry
    • H01L2224/06153—Mirror array, i.e. array having only a reflection symmetry, i.e. bilateral symmetry with a staggered arrangement, e.g. depopulated array
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/4912—Layout
    • H01L2224/49171—Fan-out arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/494—Connecting portions
    • H01L2224/4943—Connecting portions the connecting portions being staggered
    • H01L2224/49431—Connecting portions the connecting portions being staggered on the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/156—Material
    • H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191—Disposition
    • H01L2924/19101—Disposition of discrete passive components
    • H01L2924/19107—Disposition of discrete passive components off-chip wires

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

(57)【要約】 【目的】ボンディングワイヤ長が長くなるとたるみ，曲
がりが発生し接触不良になる為、あるサイズ以下の半導
体素子は組立できない。又、半導体素子の小型化により
現れた狭パッドピッチの千鳥状のワイヤボンディングが
困難になって来る為、リレーボンディングと隣接ワイヤ
に高低差を設けることにより解決しボンディングワイヤ
の接触不良を防止し半導体素子の小型化に対応する。 【構成】半導体素子８を搭載したアイランド２の周囲に
セラミックスに導電メタライズした上層セラミックス４
と下層セラミックス５の二層の凸状のセラミック中継基
板を置きこのセラミック中継基板を中継地点として電極
パッド７とインナリード１を結線する。この時、電極パ
ッド７と中継地点までの金属ワイヤ３で隣接する金属ワ
イヤ３に高低差を設けることにより、長ワイヤ及び千鳥
状狭パッドピッチのワイヤボンディングが可能になる。

Description

【発明の詳細な説明】
【０００１】
【産業上の利用分野】本発明は樹脂封止型半導体装置に
関し、特に中継基板使用によるワイヤ結線構造を有する
樹脂封止型半導体装置に関する。
【０００２】
【従来の技術】従来の樹脂封止型半導体装置は、図３に
示すように、リードフレームのアイランド２に半導体素
子８が搭載され、このアイランド２の外側にはインナリ
ード１が放射状に配置された構成になっている。半導体
素子８は、その電極パッド７が金属ワイヤ３によってイ
ンナーリード１の先端部付近と結線され、このとき金属
ワイヤ３の高さは全て同じ高さになっているという構成
を有している。
【０００３】
【発明が解決しようとする課題】この従来の樹脂封止型
半導体装置では、金属ワイヤが長過ぎるとたるみ不良，
曲がり不良が発生する為、長さの制約があり小さい半導
体素子を搭載できないという問題点があった。
【０００４】又、半導体素子の小型化により電極パッド
間隔が狭くなり尚かつ千鳥状配置になることにより金属
ワイヤ結線が困難になるという問題点もあった。
【０００５】本発明の目的は、金属ワイヤの結線が容易
で半導体素子の小型化に対応できる樹脂封止型半導体装
置を提供することにある。
【０００６】
【課題を解決するための手段】本発明の樹脂封止型半導
体装置は、リードフレームのアイランドと、このアイラ
ンド上に搭載された半導体素子と、この半導体素子を囲
みそれぞれの表面に導電層が施された凸状の上層と下層
の二層構造のセラミック中継基板と、前記半導体素子の
隣接するパッドをそれぞれ互い違いに前記導電層の上層
と下層に接続し互いに高低差を有する金属ワイヤとを有
する。
【０００７】
【実施例】次に、本発明の実施例について図面を参照し
て説明する。
【０００８】図１（ａ），（ｂ）は本発明の第１の実施
例の要部平面図とその断面図である。本発明の第１の実
施例は、図１（ａ），（ｂ）に示すように、まず、リー
ドフレームのアイランド２に半導体素子８と上層セラミ
ックス４と下層セラミックス５によって構成されるセラ
ミック中継基板を搭載し千鳥状に配置された半導体素子
８の電極パッド７から上層セラミックス４，下層セラミ
ックス５のそれぞれのメタライズ部６に金属ワイヤ３で
結線する。この時、隣接する金属ワイヤ３の高さに高低
差を設け上層セラミックス４，下層セラミックス５の各
メタライズ部６に交互に結線する。次に、各セラミック
層のメタライズ部６とインナリード１とを金属ワイヤ３
で結線し半導体素子８をインナリード１に電気的に接続
する。
【０００９】図２（ａ），（ｂ）は本発明の第２の実施
例の要部平面図とその断面図である。本発明の第２の実
施例は、図２（ａ），（ｂ）に示すように、まず、アイ
ランド２上に半導体素子８と上層セラミックス（ＶＣ
Ｃ）４，下層セラミックス（ＧＮＤ）５の組合されたセ
ラミック中継基板を搭載する。次に、半導体素子８の電
源ピン（ＶＣＣ）用電極パッド７と上層セラミックス
（ＶＣＣ）４を金属ワイヤ３で結線する。又、ＧＮＤピ
ン用電極パッド７と下層セラミックス（ＧＮＤ）５を金
属ワイヤ３で結線する。次に、半導体素子８のその他の
信号用電極パッド７をインナリード１の先端部へ直接金
属ワイヤ３で結線し半導体素子８をインナリード１に電
気的に接続する。
【００１０】この実施例による効果としては、各電位を
統合できる為、電源，ＧＮＤ信号によるノイズを防止す
ることができる固有の効果がある。
【００１１】
【発明の効果】以上説明したように本発明は、リードフ
レームのアイランド上に半導体素子を搭載してその周囲
上に上下二層構造で凸状になっているセラミック中継基
板を配置し、このセラミック中継基板を中継地点として
半導体素子の電極パッドとセラミック中継基板，セラミ
ック中継基板とインナリードを金属ワイヤで結線する。
この時、金属ワイヤに高低差を設けることにより電極パ
ッドピッチがある程度狭く、かつ千鳥状配置の半導体素
子の金属ワイヤ結線が可能になるので、半導体素子の小
型化に対応できるという効果がある。
【図面の簡単な説明】
【図１】（ａ），（ｂ）は本発明の第１の実施例の要部
平面図とその断面図である。
【図２】（ａ），（ｂ）は本発明の第２の実施例の要部
平面図とその断面図である。
【図３】（ａ），（ｂ）は従来の樹脂封止型半導体装置
の一例の要部平面図とその断面図である。
【符号の説明】
１ インナーリード ２ アイランド ３ 金属ワイヤ ４ 上層セラミックス ５ 下層セラミックス ６ メタライズ部 ７ 電極パッド ８ 半導体素子

Claims (1)

    【特許請求の範囲】
  1. 【請求項１】 リードフレームのアイランドと、このア
    イランド上に搭載された半導体素子と、この半導体素子
    を囲みそれぞれの表面に導電層が施された凸状の上層と
    下層の二層構造のセラミック中継基板と、前記半導体素
    子の隣接するパッドをそれぞれ互い違いに前記導電層の
    上層と下層に接続し互いに高低差を有する金属ワイヤと
    を有することを特徴とする樹脂封止型半導体装置。
JP22158593A 1993-09-07 1993-09-07 樹脂封止型半導体装置 Pending JPH0778926A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22158593A JPH0778926A (ja) 1993-09-07 1993-09-07 樹脂封止型半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22158593A JPH0778926A (ja) 1993-09-07 1993-09-07 樹脂封止型半導体装置

Publications (1)

Publication Number Publication Date
JPH0778926A true JPH0778926A (ja) 1995-03-20

Family

ID=16769056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22158593A Pending JPH0778926A (ja) 1993-09-07 1993-09-07 樹脂封止型半導体装置

Country Status (1)

Country Link
JP (1) JPH0778926A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09129810A (ja) * 1995-10-31 1997-05-16 Nec Kyushu Ltd セラミック複合リードフレーム及びそれを用いた半導体 装置
JPH09139458A (ja) * 1995-11-14 1997-05-27 Nec Corp 半導体装置
US6303948B1 (en) 1996-02-29 2001-10-16 Kabushiki Kaisha Toshiba Pad layout and lead layout in semiconductor device
DE10247075A1 (de) * 2002-10-09 2004-04-22 Micronas Gmbh Trägereinrichtung für monolithisch integrierte Schaltungen
KR100773842B1 (ko) * 2005-07-20 2007-11-06 후지쯔 가부시끼가이샤 중계 기판 및 이 중계 기판을 구비한 반도체 장치
JP2013201238A (ja) * 2012-03-23 2013-10-03 Yamaha Corp 半導体装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09129810A (ja) * 1995-10-31 1997-05-16 Nec Kyushu Ltd セラミック複合リードフレーム及びそれを用いた半導体 装置
JPH09139458A (ja) * 1995-11-14 1997-05-27 Nec Corp 半導体装置
US6303948B1 (en) 1996-02-29 2001-10-16 Kabushiki Kaisha Toshiba Pad layout and lead layout in semiconductor device
US6617622B2 (en) 1996-02-29 2003-09-09 Kabushiki Kaisha Toshiba Pad layout and lead layout in semiconductor device having a center circuit
DE10247075A1 (de) * 2002-10-09 2004-04-22 Micronas Gmbh Trägereinrichtung für monolithisch integrierte Schaltungen
KR100773842B1 (ko) * 2005-07-20 2007-11-06 후지쯔 가부시끼가이샤 중계 기판 및 이 중계 기판을 구비한 반도체 장치
JP2013201238A (ja) * 2012-03-23 2013-10-03 Yamaha Corp 半導体装置

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