JPH0749797Y2 - 多層配線構造 - Google Patents
多層配線構造Info
- Publication number
- JPH0749797Y2 JPH0749797Y2 JP1989065758U JP6575889U JPH0749797Y2 JP H0749797 Y2 JPH0749797 Y2 JP H0749797Y2 JP 1989065758 U JP1989065758 U JP 1989065758U JP 6575889 U JP6575889 U JP 6575889U JP H0749797 Y2 JPH0749797 Y2 JP H0749797Y2
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- layer
- line
- capacitance
- signal line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011159 matrix material Substances 0.000 description 19
- 239000010408 film Substances 0.000 description 15
- 230000008878 coupling Effects 0.000 description 11
- 238000010168 coupling process Methods 0.000 description 11
- 238000005859 coupling reaction Methods 0.000 description 11
- 239000011651 chromium Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989065758U JPH0749797Y2 (ja) | 1989-06-07 | 1989-06-07 | 多層配線構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989065758U JPH0749797Y2 (ja) | 1989-06-07 | 1989-06-07 | 多層配線構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH036833U JPH036833U (OSRAM) | 1991-01-23 |
| JPH0749797Y2 true JPH0749797Y2 (ja) | 1995-11-13 |
Family
ID=31597872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989065758U Expired - Lifetime JPH0749797Y2 (ja) | 1989-06-07 | 1989-06-07 | 多層配線構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0749797Y2 (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011217420A (ja) * | 2006-02-24 | 2011-10-27 | Panasonic Corp | 弾性表面波フィルタ、アンテナ共用器、及びそれらを用いた高周波モジュール、通信機器 |
| JPWO2009116177A1 (ja) * | 2008-03-21 | 2011-07-21 | 株式会社島津製作所 | 光マトリックスデバイスの製造方法 |
| CN116156738B (zh) * | 2023-02-02 | 2025-12-05 | 苏州元脑智能科技有限公司 | 印刷电路板、印刷电路板设计方法及服务器 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS615550A (ja) * | 1984-06-20 | 1986-01-11 | Hitachi Micro Comput Eng Ltd | 半導体装置およびその製造方法 |
| JPS63209145A (ja) * | 1987-02-25 | 1988-08-30 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
| JP2592600B2 (ja) * | 1987-03-11 | 1997-03-19 | 株式会社フロンテック | 薄膜トランジスタマトリツクスアレイ |
| JPS63255941A (ja) * | 1987-04-13 | 1988-10-24 | Nec Corp | 半導体集積回路 |
| JPS6446955A (en) * | 1987-08-14 | 1989-02-21 | Ricoh Kk | Method of wiring multilayer structure transistor |
| JPH022676A (ja) * | 1988-06-17 | 1990-01-08 | Konica Corp | イメージセンサ |
| JPH02137356A (ja) * | 1988-11-18 | 1990-05-25 | Nec Corp | 半導体集積回路 |
-
1989
- 1989-06-07 JP JP1989065758U patent/JPH0749797Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH036833U (OSRAM) | 1991-01-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |