JPH07299708A - 窒化ケイ素系セラミックス部品の製造方法 - Google Patents

窒化ケイ素系セラミックス部品の製造方法

Info

Publication number
JPH07299708A
JPH07299708A JP6109113A JP10911394A JPH07299708A JP H07299708 A JPH07299708 A JP H07299708A JP 6109113 A JP6109113 A JP 6109113A JP 10911394 A JP10911394 A JP 10911394A JP H07299708 A JPH07299708 A JP H07299708A
Authority
JP
Japan
Prior art keywords
heat treatment
residual stress
silicon nitride
compressive residual
strength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6109113A
Other languages
English (en)
Japanese (ja)
Inventor
Yasushi Ito
靖 伊藤
Takehisa Yamamoto
剛久 山本
Takao Nishioka
隆夫 西岡
Akira Yamakawa
晃 山川
Osamu Komura
修 小村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP6109113A priority Critical patent/JPH07299708A/ja
Priority to EP95106079A priority patent/EP0679616B1/en
Priority to DE69501638T priority patent/DE69501638T2/de
Priority to TW084104016A priority patent/TW284747B/zh
Priority to KR1019950009734A priority patent/KR0138018B1/ko
Priority to US08/429,067 priority patent/US5599493A/en
Publication of JPH07299708A publication Critical patent/JPH07299708A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
    • C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38—Non-oxide ceramic constituents or additives
    • C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
    • C04B2235/3865—Aluminium nitrides
    • C04B2235/3869—Aluminium oxynitrides, e.g. AlON, sialon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567—Treatment time
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/76—Crystal structural characteristics, e.g. symmetry
    • C04B2235/766—Trigonal symmetry, e.g. alpha-Si3N4 or alpha-Sialon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Products (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Compositions Of Oxide Ceramics (AREA)
JP6109113A 1994-04-26 1994-04-26 窒化ケイ素系セラミックス部品の製造方法 Pending JPH07299708A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP6109113A JPH07299708A (ja) 1994-04-26 1994-04-26 窒化ケイ素系セラミックス部品の製造方法
EP95106079A EP0679616B1 (en) 1994-04-26 1995-04-24 Method of producing silicon nitride ceramic component
DE69501638T DE69501638T2 (de) 1994-04-26 1995-04-24 Verfahren zur Herstellung eines Keramikteils aus Siliciumnitrid
TW084104016A TW284747B (enExample) 1994-04-26 1995-04-24
KR1019950009734A KR0138018B1 (ko) 1994-04-26 1995-04-25 질화규소계 세라믹부품의 제조방법
US08/429,067 US5599493A (en) 1994-04-26 1995-04-26 Method of producing silicon nitride ceramic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6109113A JPH07299708A (ja) 1994-04-26 1994-04-26 窒化ケイ素系セラミックス部品の製造方法

Publications (1)

Publication Number Publication Date
JPH07299708A true JPH07299708A (ja) 1995-11-14

Family

ID=14501898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6109113A Pending JPH07299708A (ja) 1994-04-26 1994-04-26 窒化ケイ素系セラミックス部品の製造方法

Country Status (6)

Country Link
US (1) US5599493A (enExample)
EP (1) EP0679616B1 (enExample)
JP (1) JPH07299708A (enExample)
KR (1) KR0138018B1 (enExample)
DE (1) DE69501638T2 (enExample)
TW (1) TW284747B (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004196633A (ja) * 2002-12-20 2004-07-15 Denki Kagaku Kogyo Kk セラミックスの改質方法
KR101019706B1 (ko) * 2008-12-30 2011-03-07 주식회사 하이닉스반도체 반도체 패키지 및 이의 제조 방법
WO2014126178A1 (ja) 2013-02-13 2014-08-21 京セラ株式会社 切削工具
KR20190063580A (ko) * 2017-11-30 2019-06-10 (주) 존인피니티 신규한 질화규소 분말의 제조방법
JP2022517998A (ja) * 2019-01-11 2022-03-11 ドラゴンフライ エンドスコピー リミティド ライアビリティー カンパニー 内視鏡装置及びその使用方法

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DE69533280D1 (de) * 1994-11-14 2004-08-26 Sumitomo Electric Industries Keramisches gleitstück
JP4070417B2 (ja) * 2000-03-31 2008-04-02 日本特殊陶業株式会社 窒化珪素質部材及びその製造方法並びに切削工具
DE10146227B4 (de) * 2000-09-20 2015-01-29 Hitachi Metals, Ltd. Siliciumnitrid-Sinterkörper, Leiterplatte und thermoelektrisches Modul
JP2003176178A (ja) * 2001-12-07 2003-06-24 Nhk Spring Co Ltd ウエハ支持体およびその周辺部品
TW200903026A (en) 2007-07-12 2009-01-16 Young Optics Inc Fixed-focus lens
US8758461B2 (en) 2010-12-31 2014-06-24 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
US8840694B2 (en) 2011-06-30 2014-09-23 Saint-Gobain Ceramics & Plastics, Inc. Liquid phase sintered silicon carbide abrasive particles
CN108262695A (zh) 2011-06-30 2018-07-10 圣戈本陶瓷及塑料股份有限公司 包括氮化硅磨粒的磨料制品
CN103826802B (zh) 2011-09-26 2018-06-12 圣戈本陶瓷及塑料股份有限公司 包括磨料颗粒材料的磨料制品，使用磨料颗粒材料的涂布磨料及其形成方法
CN104114327B (zh) 2011-12-30 2018-06-05 圣戈本陶瓷及塑料股份有限公司 复合成型研磨颗粒及其形成方法
RU2014130167A (ru) 2011-12-30 2016-02-27 Сэнт-Гобэйн Керамикс Энд Пластикс Инк. Получение формованных абразивных частиц
EP3517245B1 (en) 2011-12-30 2023-12-13 Saint-Gobain Ceramics & Plastics Inc. Shaped abrasive particle and method of forming same
WO2013106602A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
EP2802436B1 (en) 2012-01-10 2019-09-25 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having complex shapes
WO2013149209A1 (en) 2012-03-30 2013-10-03 Saint-Gobain Abrasives, Inc. Abrasive products having fibrillated fibers
EP2852473B1 (en) 2012-05-23 2020-12-23 Saint-Gobain Ceramics & Plastics Inc. Shaped abrasive particles and methods of forming same
KR20150023034A (ko) 2012-06-29 2015-03-04 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 특정 형상을 가지는 연마입자들 및 이러한 입자들 형성방법
US9440332B2 (en) 2012-10-15 2016-09-13 Saint-Gobain Abrasives, Inc. Abrasive particles having particular shapes and methods of forming such particles
KR101818946B1 (ko) 2012-12-31 2018-01-17 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 미립자 소재 및 이의 형성방법
MX378491B (es) 2013-03-29 2025-03-11 Saint Gobain Abrasives Inc Particulas abrasivas con formas particulares y metodos para elaborar las particulas.
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
US9783718B2 (en) 2013-09-30 2017-10-10 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and methods of forming same
WO2015102992A1 (en) 2013-12-31 2015-07-09 Saint-Gobain Abrasives, Inc. Abrasive article including shaped abrasive particles
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
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EP3131706B8 (en) 2014-04-14 2024-01-10 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
WO2015184355A1 (en) 2014-05-30 2015-12-03 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
EP3277459B1 (en) 2015-03-31 2023-08-16 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
KR102006615B1 (ko) 2015-06-11 2019-08-02 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마 입자들을 포함하는 연마 물품
KR102481559B1 (ko) 2016-05-10 2022-12-28 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 연마 입자 및 이의 형성 방법
WO2017197002A1 (en) 2016-05-10 2017-11-16 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles and methods of forming same
WO2018064642A1 (en) 2016-09-29 2018-04-05 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
EP3642293A4 (en) 2017-06-21 2021-03-17 Saint-Gobain Ceramics&Plastics, Inc. PARTICULATE MATERIALS AND METHOD FOR MANUFACTURING THEREOF
CN114846112A (zh) 2019-12-27 2022-08-02 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
KR102765343B1 (ko) 2019-12-27 2025-02-13 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. 연마 물품 및 이의 형성 방법
KR102719159B1 (ko) 2019-12-27 2024-10-21 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. 연마 물품 및 이의 형성 방법
EP4457055A4 (en) 2021-12-30 2025-12-24 Saint Gobain Abrasives Inc ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
WO2023130051A1 (en) 2021-12-30 2023-07-06 Saint-Gobain Abrasives, Inc. Abrasive articles and methods of forming same
WO2023130053A1 (en) 2021-12-30 2023-07-06 Saint-Gobain Abrasives, Inc. Abrasive articles and methods of forming same

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JPS6081076A (ja) * 1983-10-07 1985-05-09 株式会社日立製作所 セラミツクスの機械的強度向上法
JPS6355180A (ja) * 1986-08-22 1988-03-09 株式会社東芝 窒化ケイ素系セラミックス部品の製造方法
JPH02167864A (ja) * 1988-12-22 1990-06-28 Nkk Corp サイアロン焼結体の熱処理方法
JPH04367579A (ja) * 1991-06-14 1992-12-18 Toshiba Tungaloy Co Ltd 酸化膜付窒化ケイ素焼結体
JPH05149112A (ja) * 1991-11-25 1993-06-15 Riken Corp セラミツクバルブの製造方法
JP3198662B2 (ja) * 1992-09-21 2001-08-13 住友電気工業株式会社 窒化ケイ素系焼結体及びその製造方法
US5384292A (en) * 1993-04-14 1995-01-24 Sumitomo Electric Industries, Ltd. Silicon nitride composite sintered body and process for producing the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004196633A (ja) * 2002-12-20 2004-07-15 Denki Kagaku Kogyo Kk セラミックスの改質方法
KR101019706B1 (ko) * 2008-12-30 2011-03-07 주식회사 하이닉스반도체 반도체 패키지 및 이의 제조 방법
WO2014126178A1 (ja) 2013-02-13 2014-08-21 京セラ株式会社 切削工具
US10086437B2 (en) 2013-02-13 2018-10-02 Kyocera Corporation Cutting tool
KR20190063580A (ko) * 2017-11-30 2019-06-10 (주) 존인피니티 신규한 질화규소 분말의 제조방법
JP2022517998A (ja) * 2019-01-11 2022-03-11 ドラゴンフライ エンドスコピー リミティド ライアビリティー カンパニー 内視鏡装置及びその使用方法

Also Published As

Publication number Publication date
KR0138018B1 (ko) 1998-04-27
KR950029233A (ko) 1995-11-22
EP0679616A3 (enExample) 1995-11-29
DE69501638T2 (de) 1998-07-23
DE69501638D1 (de) 1998-04-02
EP0679616A2 (en) 1995-11-02
TW284747B (enExample) 1996-09-01
EP0679616B1 (en) 1998-02-25
US5599493A (en) 1997-02-04

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