JPH0729626Y2 - 減圧気相処理装置 - Google Patents

減圧気相処理装置

Info

Publication number
JPH0729626Y2
JPH0729626Y2 JP1987121259U JP12125987U JPH0729626Y2 JP H0729626 Y2 JPH0729626 Y2 JP H0729626Y2 JP 1987121259 U JP1987121259 U JP 1987121259U JP 12125987 U JP12125987 U JP 12125987U JP H0729626 Y2 JPH0729626 Y2 JP H0729626Y2
Authority
JP
Japan
Prior art keywords
pump
gas
exhaust
pressure
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987121259U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6426832U (enrdf_load_stackoverflow
Inventor
久晴 清田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP1987121259U priority Critical patent/JPH0729626Y2/ja
Publication of JPS6426832U publication Critical patent/JPS6426832U/ja
Application granted granted Critical
Publication of JPH0729626Y2 publication Critical patent/JPH0729626Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1987121259U 1987-08-07 1987-08-07 減圧気相処理装置 Expired - Lifetime JPH0729626Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987121259U JPH0729626Y2 (ja) 1987-08-07 1987-08-07 減圧気相処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987121259U JPH0729626Y2 (ja) 1987-08-07 1987-08-07 減圧気相処理装置

Publications (2)

Publication Number Publication Date
JPS6426832U JPS6426832U (enrdf_load_stackoverflow) 1989-02-15
JPH0729626Y2 true JPH0729626Y2 (ja) 1995-07-05

Family

ID=31368104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987121259U Expired - Lifetime JPH0729626Y2 (ja) 1987-08-07 1987-08-07 減圧気相処理装置

Country Status (1)

Country Link
JP (1) JPH0729626Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0730568B2 (ja) * 1990-11-28 1995-04-05 富士見園芸資材株式会社 コンクリート擁壁の緑化工法
JP2662139B2 (ja) * 1992-04-28 1997-10-08 有限会社北勝建設 壁体の構築装置
JP3801286B2 (ja) * 1997-02-03 2006-07-26 三菱重工業株式会社 安全装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280366A (ja) * 1986-05-30 1987-12-05 Hitachi Ltd 減圧化学的気相堆積装置

Also Published As

Publication number Publication date
JPS6426832U (enrdf_load_stackoverflow) 1989-02-15

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