JPH0121187Y2 - - Google Patents

Info

Publication number
JPH0121187Y2
JPH0121187Y2 JP1984183604U JP18360484U JPH0121187Y2 JP H0121187 Y2 JPH0121187 Y2 JP H0121187Y2 JP 1984183604 U JP1984183604 U JP 1984183604U JP 18360484 U JP18360484 U JP 18360484U JP H0121187 Y2 JPH0121187 Y2 JP H0121187Y2
Authority
JP
Japan
Prior art keywords
oil
pump
vacuum pump
rotary vacuum
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984183604U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6199682U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984183604U priority Critical patent/JPH0121187Y2/ja
Publication of JPS6199682U publication Critical patent/JPS6199682U/ja
Application granted granted Critical
Publication of JPH0121187Y2 publication Critical patent/JPH0121187Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Separating Particles In Gases By Inertia (AREA)
  • Drying Of Semiconductors (AREA)
JP1984183604U 1984-12-05 1984-12-05 Expired JPH0121187Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984183604U JPH0121187Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984183604U JPH0121187Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Publications (2)

Publication Number Publication Date
JPS6199682U JPS6199682U (enrdf_load_stackoverflow) 1986-06-25
JPH0121187Y2 true JPH0121187Y2 (enrdf_load_stackoverflow) 1989-06-23

Family

ID=30741102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984183604U Expired JPH0121187Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPH0121187Y2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0752718B2 (ja) 1984-11-26 1995-06-05 株式会社半導体エネルギー研究所 薄膜形成方法
JPH0768959B2 (ja) * 1987-11-13 1995-07-26 株式会社日立製作所 真空ポンプ
JP2781851B2 (ja) * 1988-10-13 1998-07-30 スピードファムクリーンシステム株式会社 エアによるワークの乾燥方法及び装置
JP4700303B2 (ja) * 2004-08-02 2011-06-15 株式会社井上製作所 真空式ミキサー
CN109098952B (zh) * 2018-08-30 2019-08-23 西安交通大学 一种轴流式离心分离器及油气分离方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162116A (ja) * 1983-03-03 1984-09-13 Semiconductor Energy Lab Co Ltd シリコン被膜作製方法

Also Published As

Publication number Publication date
JPS6199682U (enrdf_load_stackoverflow) 1986-06-25

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