JPS6199682U - - Google Patents

Info

Publication number
JPS6199682U
JPS6199682U JP18360484U JP18360484U JPS6199682U JP S6199682 U JPS6199682 U JP S6199682U JP 18360484 U JP18360484 U JP 18360484U JP 18360484 U JP18360484 U JP 18360484U JP S6199682 U JPS6199682 U JP S6199682U
Authority
JP
Japan
Prior art keywords
vacuum pump
rotary vacuum
oil
oil rotary
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18360484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0121187Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984183604U priority Critical patent/JPH0121187Y2/ja
Publication of JPS6199682U publication Critical patent/JPS6199682U/ja
Application granted granted Critical
Publication of JPH0121187Y2 publication Critical patent/JPH0121187Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Separating Particles In Gases By Inertia (AREA)
  • Drying Of Semiconductors (AREA)
JP1984183604U 1984-12-05 1984-12-05 Expired JPH0121187Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984183604U JPH0121187Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984183604U JPH0121187Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Publications (2)

Publication Number Publication Date
JPS6199682U true JPS6199682U (enrdf_load_stackoverflow) 1986-06-25
JPH0121187Y2 JPH0121187Y2 (enrdf_load_stackoverflow) 1989-06-23

Family

ID=30741102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984183604U Expired JPH0121187Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPH0121187Y2 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01130093A (ja) * 1987-11-13 1989-05-23 Hitachi Ltd 真空ポンプ
JPH02103933A (ja) * 1988-10-13 1990-04-17 Supiide Fuamu Clean Syst Kk エアによるワークの乾燥方法及び装置
US6984595B1 (en) 1984-11-26 2006-01-10 Semiconductor Energy Laboratory Co., Ltd. Layer member forming method
JP2006043528A (ja) * 2004-08-02 2006-02-16 Inoue Mfg Inc 真空式ミキサー
CN109098952A (zh) * 2018-08-30 2018-12-28 西安交通大学 一种轴流式离心分离器及油气分离方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162116A (ja) * 1983-03-03 1984-09-13 Semiconductor Energy Lab Co Ltd シリコン被膜作製方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162116A (ja) * 1983-03-03 1984-09-13 Semiconductor Energy Lab Co Ltd シリコン被膜作製方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6984595B1 (en) 1984-11-26 2006-01-10 Semiconductor Energy Laboratory Co., Ltd. Layer member forming method
JPH01130093A (ja) * 1987-11-13 1989-05-23 Hitachi Ltd 真空ポンプ
JPH02103933A (ja) * 1988-10-13 1990-04-17 Supiide Fuamu Clean Syst Kk エアによるワークの乾燥方法及び装置
JP2006043528A (ja) * 2004-08-02 2006-02-16 Inoue Mfg Inc 真空式ミキサー
CN109098952A (zh) * 2018-08-30 2018-12-28 西安交通大学 一种轴流式离心分离器及油气分离方法
CN109098952B (zh) * 2018-08-30 2019-08-23 西安交通大学 一种轴流式离心分离器及油气分离方法

Also Published As

Publication number Publication date
JPH0121187Y2 (enrdf_load_stackoverflow) 1989-06-23

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