JPH07172932A - 窒化ケイ素基剤材料の製造方法、この方法により製造した材料およびその使用 - Google Patents
窒化ケイ素基剤材料の製造方法、この方法により製造した材料およびその使用Info
- Publication number
- JPH07172932A JPH07172932A JP4032917A JP3291792A JPH07172932A JP H07172932 A JPH07172932 A JP H07172932A JP 4032917 A JP4032917 A JP 4032917A JP 3291792 A JP3291792 A JP 3291792A JP H07172932 A JPH07172932 A JP H07172932A
- Authority
- JP
- Japan
- Prior art keywords
- sintering
- silicon
- mixture
- ceramic
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title claims description 29
- 229910052581 Si3N4 Inorganic materials 0.000 title abstract description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title description 13
- 238000002360 preparation method Methods 0.000 title description 2
- 238000005245 sintering Methods 0.000 claims abstract description 72
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 42
- 239000000203 mixture Substances 0.000 claims abstract description 40
- 239000010703 silicon Substances 0.000 claims abstract description 37
- 239000000654 additive Substances 0.000 claims abstract description 28
- 239000000919 ceramic Substances 0.000 claims abstract description 20
- 238000000465 moulding Methods 0.000 claims abstract description 10
- 238000002485 combustion reaction Methods 0.000 claims abstract description 5
- 238000005520 cutting process Methods 0.000 claims abstract description 5
- 239000000843 powder Substances 0.000 claims description 18
- 230000000996 additive effect Effects 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 35
- 238000006243 chemical reaction Methods 0.000 description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 14
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 13
- 230000008569 process Effects 0.000 description 11
- 230000007547 defect Effects 0.000 description 10
- 229910052757 nitrogen Inorganic materials 0.000 description 10
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- 239000007791 liquid phase Substances 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000012071 phase Substances 0.000 description 7
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 6
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 239000002585 base Substances 0.000 description 5
- 238000000748 compression moulding Methods 0.000 description 5
- 238000000280 densification Methods 0.000 description 5
- 239000000395 magnesium oxide Substances 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 230000008092 positive effect Effects 0.000 description 4
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 3
- 229910018068 Li 2 O Inorganic materials 0.000 description 3
- -1 Si 3 N 4 Inorganic materials 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 238000005121 nitriding Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000001627 detrimental effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000000265 homogenisation Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Inorganic materials [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Inorganic materials [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
- C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/591—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Products (AREA)
- Nonmetal Cutting Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4102628.4 | 1991-01-30 | ||
| DE4102628A DE4102628A1 (de) | 1991-01-30 | 1991-01-30 | Verfahren zur herstellung eines werkstoffes auf si(pfeil abwaerts)3(pfeil abwaerts)n(pfeil abwaerts)4(pfeil abwaerts)-basis, so hergestellte werkstoffe sowie deren verwendung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07172932A true JPH07172932A (ja) | 1995-07-11 |
Family
ID=6423944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4032917A Pending JPH07172932A (ja) | 1991-01-30 | 1992-01-24 | 窒化ケイ素基剤材料の製造方法、この方法により製造した材料およびその使用 |
Country Status (4)
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5543371A (en) * | 1992-03-31 | 1996-08-06 | Sumitomo Electric Industries, Ltd. | Slide member and method of manufacturing the same |
| EP0603787B1 (de) * | 1992-12-23 | 1998-03-25 | Hoechst Aktiengesellschaft | Hochtemperaturfeste Siliziumnitridkeramik und Verfahren zu ihrer Herstellung |
| US5538675A (en) * | 1994-04-14 | 1996-07-23 | The Dow Chemical Company | Method for producing silicon nitride/silicon carbide composite |
| GB9413267D0 (en) * | 1994-07-01 | 1994-08-24 | T & N Technology Ltd | Sintered reaction-bonded silicon nitride components |
| GB2290783B (en) * | 1994-07-01 | 1998-01-14 | T & N Technology Ltd | Sintered reaction-bonded silicon nitride components |
| JP3588162B2 (ja) * | 1995-05-31 | 2004-11-10 | 京セラ株式会社 | 窒化珪素質切削工具およびその製造方法 |
| DE19546238A1 (de) * | 1995-12-12 | 1997-06-19 | Sueddeutsche Kalkstickstoff | Verfahren zur Herstellung von gesinterten Siliciumnitrid |
| JP3559382B2 (ja) * | 1996-03-29 | 2004-09-02 | 京セラ株式会社 | 窒化珪素質焼結体の製造方法 |
| JPH1179872A (ja) * | 1997-09-03 | 1999-03-23 | Sumitomo Electric Ind Ltd | メタライズ窒化ケイ素系セラミックス、その製造方法及びその製造に用いるメタライズ組成物 |
| US6610113B1 (en) * | 1999-09-09 | 2003-08-26 | Kennametal Pc Inc. | Process for heat treating ceramics and articles of manufacture made thereby |
| DE20306990U1 (de) * | 2003-05-05 | 2003-07-10 | at-design Büro für Produktdesign, 91054 Erlangen | Anspitzer für Schreib-, Zeichen und Kosmetikstifte |
| CN108395257B (zh) * | 2018-05-18 | 2021-04-02 | 哈尔滨工业大学 | 一种氮化硅基复合材料及其制备方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1546928A (en) * | 1976-01-06 | 1979-05-31 | Gen Electric | Si3n4 formed by nitridation of sintered silicon compact |
| DE2900193A1 (de) * | 1979-01-04 | 1980-07-24 | Basf Ag | Verfahren zur herstellung von m- aminophenolen |
| JPS57166380A (en) * | 1981-04-02 | 1982-10-13 | Sumitomo Electric Industries | Manufacture of non-oxide ceramics |
| JPS57166375A (en) * | 1981-04-02 | 1982-10-13 | Sumitomo Electric Industries | Manufacture of non-oxide ceramics |
| SE438849B (sv) * | 1981-05-25 | 1985-05-13 | Svenska Silikatforskning | Forfarande vid framstellning av formkroppar av kiselnitridbaserade material |
| US4552711A (en) * | 1983-06-21 | 1985-11-12 | Cornell Research Foundation, Inc. | Use of free silicon in liquid phase sintering of silicon nitrides and sialons |
| US4487840A (en) * | 1983-06-21 | 1984-12-11 | Cornell Research Foundation, Inc. | Use of silicon in liquid sintered silicon nitrides and sialons |
| JPS6016870A (ja) * | 1983-07-05 | 1985-01-28 | 東陶機器株式会社 | サイアロン焼結体の製造方法 |
| JPS60215576A (ja) * | 1984-04-07 | 1985-10-28 | 東陶機器株式会社 | サイアロン焼結体の製造方法 |
| JPS6283373A (ja) * | 1985-10-04 | 1987-04-16 | トヨタ自動車株式会社 | 窒化ケイ素焼結体の製造方法 |
| US4781874A (en) * | 1987-10-23 | 1988-11-01 | Eaton Corporation | Process for making silicon nitride articles |
| US4919868A (en) * | 1988-03-31 | 1990-04-24 | Champion Spark Plug Company | Production and sintering of reaction bonded silicon nitride composites containing silicon carbide whiskers or silicon nitride powders |
| EP0377408B1 (de) * | 1989-01-04 | 1993-09-01 | Htm Ag | Verfahren zur Herstellung von Siliziumnitrid-Formkörpern |
-
1991
- 1991-01-30 DE DE4102628A patent/DE4102628A1/de active Granted
-
1992
- 1992-01-17 EP EP92100699A patent/EP0497156B1/de not_active Expired - Lifetime
- 1992-01-17 DE DE59209290T patent/DE59209290D1/de not_active Expired - Fee Related
- 1992-01-24 JP JP4032917A patent/JPH07172932A/ja active Pending
-
1993
- 1993-04-08 US US08/044,569 patent/US5308561A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE59209290D1 (de) | 1998-05-28 |
| DE4102628A1 (de) | 1992-08-06 |
| EP0497156A1 (de) | 1992-08-05 |
| DE4102628C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-08 |
| US5308561A (en) | 1994-05-03 |
| EP0497156B1 (de) | 1998-04-22 |