JPH0715133Y2 - 半導体薄膜形成装置の反応管 - Google Patents

半導体薄膜形成装置の反応管

Info

Publication number
JPH0715133Y2
JPH0715133Y2 JP1989046307U JP4630789U JPH0715133Y2 JP H0715133 Y2 JPH0715133 Y2 JP H0715133Y2 JP 1989046307 U JP1989046307 U JP 1989046307U JP 4630789 U JP4630789 U JP 4630789U JP H0715133 Y2 JPH0715133 Y2 JP H0715133Y2
Authority
JP
Japan
Prior art keywords
thin film
semiconductor thin
reaction tube
susceptor
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989046307U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02138419U (ko
Inventor
英明 堀川
康浩 松井
浩 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1989046307U priority Critical patent/JPH0715133Y2/ja
Publication of JPH02138419U publication Critical patent/JPH02138419U/ja
Application granted granted Critical
Publication of JPH0715133Y2 publication Critical patent/JPH0715133Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989046307U 1989-04-21 1989-04-21 半導体薄膜形成装置の反応管 Expired - Lifetime JPH0715133Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989046307U JPH0715133Y2 (ja) 1989-04-21 1989-04-21 半導体薄膜形成装置の反応管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989046307U JPH0715133Y2 (ja) 1989-04-21 1989-04-21 半導体薄膜形成装置の反応管

Publications (2)

Publication Number Publication Date
JPH02138419U JPH02138419U (ko) 1990-11-19
JPH0715133Y2 true JPH0715133Y2 (ja) 1995-04-10

Family

ID=31561276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989046307U Expired - Lifetime JPH0715133Y2 (ja) 1989-04-21 1989-04-21 半導体薄膜形成装置の反応管

Country Status (1)

Country Link
JP (1) JPH0715133Y2 (ko)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60119743U (ja) * 1984-01-23 1985-08-13 サンケン電気株式会社 化学的気相付着装置
JPS63226919A (ja) * 1987-03-16 1988-09-21 Nec Corp 気相成長装置

Also Published As

Publication number Publication date
JPH02138419U (ko) 1990-11-19

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