JPH06501745A - 耐磨耗性被覆基材製品 - Google Patents
耐磨耗性被覆基材製品Info
- Publication number
- JPH06501745A JPH06501745A JP3516756A JP51675691A JPH06501745A JP H06501745 A JPH06501745 A JP H06501745A JP 3516756 A JP3516756 A JP 3516756A JP 51675691 A JP51675691 A JP 51675691A JP H06501745 A JPH06501745 A JP H06501745A
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- intermediate layer
- layer
- diamond
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3441—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising carbon, a carbide or oxycarbide
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3447—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide
- C03C17/3452—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide comprising a fluoride
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3464—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a chalcogenide
- C03C17/347—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a chalcogenide comprising a sulfide or oxysulfide
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3464—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a chalcogenide
- C03C17/3476—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a chalcogenide comprising a selenide or telluride
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3613—Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3621—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a fluoride
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3628—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a sulfide
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3634—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing carbon, a carbide or oxycarbide
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- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C14/081—Oxides of aluminium, magnesium or beryllium
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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- G02B1/11—Anti-reflection coatings
- G02B1/111—Anti-reflection coatings using layers comprising organic materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10S428/913—Material designed to be responsive to temperature, light, moisture
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.実質的に光学上透明な基材及び少なくとも一つの複合材料層を含む被覆され た基材製品であって、 前記の複合材料層が前記の基材に結合された化学蒸着された第一中間層と、前記 の第一中間層に結合され、前記の基材から離れている実質的に光学上透明なダイ ヤモンド状炭素の化学蒸着された外層を含み、前記の第一中間層がアルカリ金属 原子及びフッ素を含まず、かつ前記の基材への強い化学結合及び前記のダイヤモ ンド状炭素外層への強い化学結合を形成し得る実質的に光学上透明な材料を含む ことを特徴とする被覆された基材製品。 2.前記の透明な基材がアモルファス材料、単結晶、多結晶材料、ガラス、塩材 料、セラミック材料及びこれらの混合物からなる群から選ばれた材料を含む請求 の範囲第1項に記載の製品。 3.前記の第一中間層が窒化ケイ素、窒化チタン、窒化タンタル、窒化ハフニウ ム、窒化ジルコニウム、窒化ホウ素、酸化イットリウム、酸化ゲルマニウム、酸 化ハフニウム、酸化ケイ素、二酸化ケイ素、酸化タンタル、酸化チタン、酸化ジ ルコニウム、炭化ケイ素、炭化ゲルマニウム及びこれらの混合物からなる群から 選ばれた実質的に光学上透明な材料を含む請求の範囲第1項に記載の製品。 4.前記の第一中間層が少なくとも10Åの厚さである請求の範囲第1項に記載 の製品。 5.前記のダイヤモンド状炭素外層の厚さが少なくとも200Åの厚さである請 求の範囲第1項に記載の製品。 6.前記の第一中間層と前記のダイヤモンド状炭素外層の少なくとも一つの厚さ が前もって決めた波長の光の反射を最小にするように選ばれる請求の範囲第1項 に記載の製品。 7.前記の第一中間層と前記のダイヤモンド状炭素外層の少なくとも一つの厚さ か前もって決めた波長の光の反射を最大にするように選ばれる請求の範囲第1項 に記載の製品。 8.前記のダイヤモンド状炭素層の厚さが、前もって決めた波長における四分の 一波長の光学的厚さの整数倍数に相当する請求の範囲第1項に記載の製品。 9.前記の第一中間層と前記のダイヤモンド状炭素層の原さが前もって決めた波 長における四分の一波長の光学的厚さの整数倍数に相当する請求の範囲第1項に 記載の製品。 10.前記の複合材料層が、前記の基材に面する前記の第一中間層;アルカリ金 属原子及びフッ素を含まず、かつ前記の第一中間層への強い化学結合及びダイヤ モンド状炭素への強い化学結合を形成し得る実質的に光学上透明な材料の第二中 間層(前記の第一中間層に直に隣接し、かつ前記の基材から離れて配置されてい る);及び前記の第二中間層に直に隣接し、かつ前記の基材から離れて配置され た前記のダイヤモンド状炭素外層を含む請求の範囲第1項に記載の製品。 11.前記の第二中間層が、ケイ素、ゲルマニウム、ハフニウム、モリブデン、 タングステン、イットリウム、タンタル、チタン及びジルコニウムからなる群か ら選ばれた可視光を反射し得る実質的に光学上透明な金属材料を含む請求の範囲 第10項に記載の製品。 12.前記の第二中間層が少なくとも25Åの厚さである請求の範囲第11項に 記載の製品。 13.前記の第二中間層がバナジウム、ニオブ、クロム、マンガン、レニウム、 テクネチウム、鉄、コバルト、イリジウム、ロジウム、ニッケル、パラジウム、 白金、銅、銀、金、亜鉛、ルテニウム、インジウム、アルミニウム、スズ、オス ミウム、タリウム、鉛、アンチモン、ビスマス及びポロニウムからなる群から選 ばれた可視光を反射し得る実質的に光学上透明な金属材料を含む請求の範囲第1 0項に記載の製品。 14.前記の第二中間層が少なくとも25Åの厚さである請求の範囲第13項に 記載の製品。 15.アルカリ金属原子及びフッ素を含まず、かつ前記の第二中間層及び前記の ダイヤモンド状炭素外層と強い化学結合を形成し得る実質的に光学上透明な材料 の第三中間層(前記の第二中間層と前記のダイヤモンド状炭素外層の間に配置さ れている)を含む請求の範囲第13項に記載の製品。 16.前記の第三中間層が窒化ケイ素、窒化チタン、窒化タンタル、窒化ハフニ ウム、窒化ジルコニウム、窒化ホウ素、酸化イットリウム、酸化ゲルマニウム、 酸化ハフニウム、酸化ケイ素、二酸化ケイ素、酸化タンタル、酸化チタン、酸化 ジルコニウム、炭化ケイ素、炭化ゲルマニウム及びこれらの混合物からなる群か ら選ばれた実質的に光学上透明な材料を含む請求の範囲第15項に記載の製品。 17.前記の第一中間層、前記の第三中間層及び前記のダイヤモンド状炭素外層 の少なくとも一つの厚さが前もって決めた波長の光の反射を最小にするように選 ばれる請求の範囲第16項に記載の製品。 18.前記の第一中間層、前記の第三中間層及び前記のダイヤモンド状炭素外層 の少なくとも一つの厚さが前もって決めた波長の光の反射を最大にするように選 ばれる請求の範囲第16項に記載の製品。 19.前記の第三中間層及び前記のダイヤモンド状炭素外層の厚さが、前もって 決めた波長における四分の一波長の光学的厚さの整数倍数に相当する請求の範囲 第16項に記載の製品。 20.前記の第一中間層、前記の第三中間層及び前記のダイヤモンド状炭素外層 の厚さが、前もって決めた波長における四分の一波長の光学的厚さの整数倍数に 相当する請求の範囲第16項に記載の製品。 21.前記の第一中間層が酸化アルミニウム、酸化セリウム、酸化スズ、酸化ト リウム、酸化リチウム、酸化ナトリウム、酸化カリウム、酸化炭ルビジウム、酸 化セシウム、酸化フランシウム、酸化ベリリウム、酸化マグネシウム、酸化カル シウム、酸化ストロンチウム、酸化バリウム、酸化ラジウム、フッ化バリウム、 フッ化セリウム、フッ化マグネシウム、フッ化トリウム、フッ化カルシウム、フ ッ化ネオジム、フッ化鉛、フッ化ナトリウム、フッ化リチウム、セレン化亜鉛、 硫化亜鉛及びこれらの混合物からなる群から選ばれた実質的に光学上透明な材料 を更に含む請求の範囲第10項に記載の製品。 22.前記の第二中間層が窒化ケイ素、窒化チタン、窒化タンタル、窒化ハフニ ウム、窒化ジルコニウム、窒化ホウ素、酸化イットリウム、酸化ゲルマニウム、 酸化ハフニウム、酸化ケイ素、二酸化ケイ素、酸化タンタル、酸化チタン、酸化 ジルコニウム、炭化ケイ素、炭化ゲルマニウム及びこれらの混合物からなる群か ら選ばれた実質的に光学上透明な材料を含む請求の範囲第21項に記載の製品。 23.前記の第二中間層が少なくとも10Åの厚さである請求の範囲第22項に 記載の製品。 24.前記の第一中間層、前記の第二中間層及び前記のダイヤモンド状炭素外層 の少なくとも一つの厚さが前もって決めた波長の光の反射を最小にするように選 ばれる請求の範囲第22項に記載の製品。 25.前記の第一中間層、前記の第二中間層及び前記のダイヤモンド状炭素外層 の少なくとも一つの厚さが前もって決めた波長の光の反射を最大にするように選 ばれる請求の範囲第22項に記載の製品。 26.前記の第二中間層及び前記のダイヤモンド状炭素外層の厚さが、前もって 決めた波長における四分の一波長の光学的厚さの整数倍数に相当する請求の範囲 第22項に記載の製品。 27.前記の第一中間層、前記の第二中間層及び前記のダイヤモンド状炭素層の 厚さが、前もって決めた波長における四分の一波長の光学的厚さの整数倍数に相 当する請求の範囲第22項に記載の製品。 28.前記の複合材料層が二つの異なる別々に付着された前記の第二中間層、及 び前記の複数の第二中間層に直に隣接して配置された前記のダイヤモンド状炭素 外層を含む請求の範囲第22項に記載の製品。 29.前記の複合材料層が、アルカリ金属原子及びフッ素を含まず、かつ前記の 第二中間層及び前記のダイヤモンド状炭素外層に対して強い化学結合を形成し得 る実質的に光学上透明な材料の化学蒸着された第四中間層(前記の第二中間層と 前記のダイヤモンド状炭素外層の間に配置されている)を含む請求の範囲第10 項に記載の製品。 30.前記の第一中間層及び前記の第二中間層が窒化ケイ素、窒化チタン、窒化 タンタル、窒化ハフニウム、窒化ジルコニウム、窒化ホウ素、酸化イットリウム 、酸化ゲルマニウム、酸化ハフニウム、酸化ケイ素、二酸化ケイ素、酸化タンタ ル、酸化チタン、酸化ジルコニウム、炭化ケイ素、炭化ゲルマニウム、酸化アル ミニウム、酸化セリウム、酸化スズ、酸化トリウム、酸化リチウム、酸化ナトリ ウム、酸化カリウム、酸化ルビジウム、酸化セシウム、酸化フランシウム、酸化 ベリリウム、酸化マグネシウム、酸化カルシウム、酸化ストロンチウム、酸化バ リウム、酸化ラジウム、フッ化バリウム、フッ化セリウム、フッ化マグネシウム 、フッ化トリウム、フッ化カルシウム、フッ化ネオジム、フッ化鉛、フッ化ナト リウム、フッ化リチウム、セレン化亜鉛、硫化亜鉛及びこれらの混合物からなる 群から選ばれた実質的に光学上透明な材料を含む請求の範囲第29項に記載の製 品。 31.前記の第四中間層か窒化ケイ素、窒化チタン、窒化タンタル、窒化ハフニ ウム、窒化ジルコニウム、窒化ホウ素、酸化イットリウム、酸化ゲルマニウム、 酸化ハフニウム、酸化ケイ素、二酸化ケイ素、酸化タンタル、酸化チタン、酸化 ジルコニウム、炭化ケイ素、炭化ゲルマニウム及びこれらの混合物からなる群か ら選ばれた実質的に光学上透明な材料を含む請求の範囲第29項に記載の製品。 32.前記の第四中間層が少なくとも10Åの厚さである請求の範囲第31項に 記載の製品。 33.前記の第一中間層、前記の第二中間層、前記の第四中間層及び前記のダイ ヤモンド状炭素外層の少なくとも一つの厚さが、前もって決めた波長の光の反射 を最小にするように選ばれる請求の範囲第29項に記載の製品。 34.前記の第一中間層、前記の第二中間層、前記の第四中間層及び前記のダイ ヤモンド状炭素外層の少なくとも一つの厚さが、前もって決めた波長の光の反射 を最大にするように選ばれる請求の範囲第29項に記載の製品。 35.前記の第二中間層、前記の第四中間層及び前記のダイヤモンド状炭素層の 厚さが、前もって決めた波長における四分の一波長の光学的厚さの整数倍数に相 当する請求の範囲第29項に記載の製品。 36.前記の第一中間層、前記の第二中間層、前記の第四中間層及び前記のダイ ヤモンド状炭素層の厚さが、前もって決めた波長における四分の一波長の光学的 厚さの整数倍数に相当する請求の範囲第29項に記載の製品。 37.実質的に光学上透明な基材、第一複合材料層及び少なくとも一つの第二複 合材料層を含む被覆された基材製品であって、前記の第一複合材料層が前記の基 材に対し強い化学結合を形成し得る実質的に光学上透明な材料の化学蒸着された 第一中間層(前記の基材に結合されている);アルカリ金属原子及びフッ素を含 まず、かつ前記の第一中間層への強い化学結合及び前記のダイヤモンド状炭素へ の強い化学結合を形成し得る実質的に光学上透明な材料の第二中間層(前記の第 一中間層に結合され、直に隣接して配置され、前記の基材から離れて配置されて いる);及び前記の第二中間層に結合され、直に隣接して配置され、前記の基材 から離れて配置された第一の実質的に光学上透明なダイヤモンド状炭素層を含み ;前記の第一複合材料層に結合され、直に隣接して配置され、前記の基材から離 れて配置された第二複合材料層が、アルカリ金属原子及びフッ素を含まず、かつ ダイヤモンド状炭素層への強い化学結合を形成し得る実質的に光学上透明な材料 の化学蒸着された第三中間層(前記の第一ダイヤモンド状炭素層に直に隣接して 配置されている);及び前記の第三中間層に結合され、直に隣接して配置され、 前記の基材から離れて配置された第二の実質的に光学上透明なダイヤモンド状炭 素層を含むことを特徴とする被覆された基材製品。 38.前記の透明な基材がアモルファス材料、単結晶、多結晶材料、ガラス、塩 材料、セラミック材料及びこれらの混合物からなる群から選ばれた材料を含む請 求の範囲第37項に記載の製品。 39.前記の第一中間層が窒化ケイ素、窒化チタン、窒化タンタル、窒化ハフニ ウム、窒化ジルコニウム、窒化ホウ素、酸化イットリウム、酸化ゲルマニウム、 酸化ハフニウム、酸化ケイ素、二酸化ケイ素、酸化タンタル、酸化チタン、酸化 ジルコニウム、炭化ケイ素、炭化ゲルマニウム、酸化アルミニウム、酸化セリウ ム、酸化スズ、酸化トリウム、酸化リチウム、酸化ナトリウム、酸化カリウム、 酸化ルビジウム、酸化セシウム、酸化フランシウム、酸化ベリリウム、酸化マグ ネシウム、酸化カルシウム、酸化ストロンチウム、酸化バリウム、酸化ラジウム 、フッ化バリウム、フッ化セリウム、フッ化マグネシウム、フッ化トリウム、フ ッ化カルシウム、フッ化ネオジム、フッ化鉛、フッ化ナトリウム、フッ化リチウ ム、セレン化亜鉛、硫化亜鉛及びこれらの混合物からなる群から選ばれた実質的 に光学上透明な材料を含む請求の範囲第37項に記載の製品。 40.前記の第二中間層及び前記の第三中間層が窒化ケイ素、窒化チタン、窒化 タンタル、窒化ハフニウム、窒化ジルコニウム、窒化ホウ素、酸化ゲルマニウム 、酸化ハフニウム、酸化ケイ素、二酸化ケイ素、酸化タンタル、酸化チタン、酸 化イットリウム、酸化ジルコニウム、炭化ケイ素、炭化ゲルマニウム及びこれら の混合物からなる群から選ばれた実質的に光学上透明な材料を含む請求の範囲第 37項に記載の製品。 41.前記の第一複合材料層が少なくとも一対の別々に付着された前記の第二中 間層を含む請求の範囲第40項に記載の製品。 42.前記の第一中間層、前記の第二中間層及び前記の第三中間層の厚さが少な くとも10Åの厚さである請求の範囲第37項に記載の製品。 43.前記の第一ダイヤモンド状炭素層及び前記の第二ダイヤモンド状炭素層の 厚さが少なくとも200Åの厚さである請求の範囲第37項に記載の製品。 44.前記の第一中間層、前記の第二中間層、前記の第三中間層、前記の第一ダ イヤモンド状炭素層及び前記の第二ダイヤモンド状炭素層の少なくとも一つの厚 さが、前もって決めた波長の光の反射を最小にするように選ばれる請求の範囲第 37項に記載の製品。 45.前記の第一中間層、前記の第二中間層、前記の第三中間層、前記の第一ダ イヤモンド状炭素層及び前記の第二ダイヤモンド状炭素層の少なくとも一つの厚 さが、前もって決めた波長の光の反射を最大にするように選ばれる請求の範囲第 37項に記載の製品。 46.前記の第二中間層、前記の第三中間層、前記の第一ダイヤモンド状炭素層 及び前記の第二ダイヤモンド状炭素層の厚さが、前もって決めた波長における四 分の一波長の光学的厚さの整数倍数に相当する請求の範囲第37項に記載の製品 。 47.前記の第一中間層、前記の第二中間層、前記の第三中間層、前記の第一ダ イヤモンド状炭素層及び前記の第二ダイヤモンド状炭素層の厚さが、前もって決 めた波長における四分の一波長の光学的厚さの整数倍数に相当する請求の範囲第 37項に記載の製品。 48.前記の第一中間層及び前記の第三中間層か窒化ケイ素、窒化チタン、窒化 タンタル、窒化ハフニウム、窒化ジルコニウム、窒化ホウ素、酸化ゲルマニウム 、酸化ハフニウム、酸化ケイ素、二酸化ケイ素、酸化タンタル、酸化チタン、酸 化イットリウム、酸化ジルコニウム、炭化ケイ素、炭化ゲルマニウム及びこれら の混合物からなる群から選ばれた実質的に光学上透明な材料を含む請求の範囲第 37項に記載の製品。 49.前記の第二中間層がケイ素、ゲルマニウム、ハフニウム、モリブデン、タ ングステン、イットリウム、タンタル、チタン及びジルコニウムからなる群から 選ばれた可視光を反射し得る実質的に光学上透明な金属材料を含む請求の範囲第 48項に記載の製品。 50.前記の第二中間層が少なくとも25Åの厚さである請求の範囲第49項に 記載の製品。 51.前記の第二中間層がバナジウム、ニオブ、クロム、マンガン、レニウム、 テクネチウム、鉄、コバルト、イリジウム、ロジウム、ニッケル、パラジウム、 白金、銅、銀、金、亜鉛、ルテニウム、インジウム、アルミニウム、スズ、オス ミウム、タリウム、鉛、アンチモン、ビスマス及びポロニウムからなる群から選 ばれた可視光を反射し得る実質的に光学上透明な金属材料を含む請求の範囲第4 8項に記載の製品。 52.前記の第二中間層が少なくとも25Åの厚さである請求の範囲第51項に 記載の製品。 53.アルカリ金属原子及びフッ素を含まず、かつ前記の第二中間層及び前記の 第一ダイヤモンド状炭素層と強い化学結合を形成し得る実質的に光学上透明な材 料の第四中間層(前記の第二中間層と前記の第一ダイヤモンド状炭素層の間に配 置されている)を含む請求の範囲第51項に記載の製品。 54.前記の第四中間層が窒化ケイ素、窒化チタン、窒化タンタル、窒化ハフニ ウム、窒化ジルコニウム、窒化ホウ素、酸化イットリウム、酸化ゲルマニウム、 酸化ハフニウム、酸化ケイ素、二酸化ケイ素、酸化タンタル、酸化チタン、酸化 ジルコニウム、炭化ケイ素、炭化ゲルマニウム及びこれらの混合物からなる群か ら選ばれた実質的に光学上透明な材料を含む請求の範囲第53項に記載の製品。 55.前記の第一中間層、前記の第四中間層、前記の第三中間層、前記の第一ダ イヤモンド状炭素層及び前記の第二ダイヤモンド状炭素層の少なくとも一つの厚 さが、前もって決めた波長の光の反射を最小にするように選ばれる請求の範囲第 53項に記載の製品。 56.前記の第一中間層、前記の第四中間層、前記の第三中間層、前記の第一ダ イヤモンド状炭素層及び前記の第二ダイヤモンド状炭素層の少なくとも一つの厚 さが、前もって決めた波長の光の反射を最大にするように選ばれる請求の範囲第 53項に記載の製品。 57.前記の第四中間層、前記の第三中間層、前記の第一ダイヤモンド状炭素層 及び前記の第二ダイヤモンド状炭素層の厚さが、前もって決めた波長における四 分の一波長の光学的厚さの整数倍数に相当する請求の範囲第53項に記載の製品 。 58.前記の第一中間層、前記の第四中間層、前記の第三中間層、前記の第一ダ イヤモンド状炭素層及び前記の第二ダイヤモンド状炭素層の厚さが、前もって決 めた波長における四分の一波長の光学的厚さの整数倍数に相当する請求の範囲第 53項に記載の製品。 59.前記の第一複合材料層が、アルカリ金属原子及びフッ素を含まず、かつ前 記の第二中間層及び前記の第一ダイヤモンド状炭素外層と強い化学結合を形成し 得る実質的に光学上透明な材料の第五中間層(前記の第二中間層と前記の第一ダ イヤモンド状炭素層の間に配置されている)を含む請求の範囲第37項に記載の 製品。 60.前記の第三中間層及び前記の第五中間層が、窒化ケイ素、窒化チタン、窒 化タンタル、窒化ハフニウム、窒化ジルコニウム、窒化ホウ素、酸化イットリウ ム、酸化ゲルマニウム、酸化ハフニウム、酸化ケイ素、二酸化ケイ素、酸化タン タル、酸化チタン、酸化ジルコニウム、炭化ケイ素、炭化ゲルマニウム及びこれ らの混合物からなる群から選ばれた実質的に光学上透明な材料を含む請求の範囲 第59項に記載の製品。 61.前記の第五中間層が少なくとも10Åの厚さである請求の範囲第60項に 記載の製品。 62.前記の第一中間層及び前記の第二中間層が、窒化ケイ素、窒化チタン、窒 化タンタル、窒化ハフニウム、窒化ジルコニウム、窒化ホウ素、酸化イットリウ ム、酸化ゲルマニウム、酸化ハフニウム、酸化ケイ素、二酸化ケイ素、酸化タン タル、酸化チタン、酸化ジルコニウム、炭化ケイ素、炭化ゲルマニウム、酸化ア ルミニウム、酸化セリウム、酸化スズ、酸化トリウム、酸化リチウム、酸化ナト リウム、酸化カリウム、酸化ルビジウム、酸化セシウム、酸化フランシウム、酸 化ベリリウム、酸化マグネシウム、酸化カルシウム、酸化ストロンチウム、酸化 バリウム、酸化ラジウム、フッ化バリウム、フッ化セリウム、フッ化マグネシウ ム、フッ化トリウム、フッ化カルシウム、フッ化ネオジム、フッ化鉛、フッ化ナ トリウム、フッ化リチウム、セレン化亜鉛、硫化亜鉛及びこれらの混合物からな る群から選ばれた実質的に光学上透明な材料を含む請求の範囲第59項に記載の 製品。 63.前記の第一中間層、前記の第二中間層、前記の第五中間層、前記の第一ダ イヤモンド状炭素層、前記の第三中間層、及び前記の第二ダイヤモンド状炭素層 の少なくとも一つの厚さが、前もって決めた波長の光の反射を最小にするように 選ばれる請求の範囲第59項に記載の製品。 64.前記の第一中間層、前記の第二中間層、前記の第五中間層、前記の第一ダ イヤモンド状炭素層、前記の第三中間層、及び前記の第二ダイヤモンド状炭素層 の少なくとも一つの厚さが、前もって決めた波長の光の反射を最大にするように 選ばれる請求の範囲第59項に記載の製品。 65.前記の第二中間層、前記の第三中間層、前記の第五中間層、前記の第一ダ イヤモンド状炭素層及び前記の第二ダイヤモンド状炭素層の厚さが、前もって決 めた波長における四分の一波長の光学的厚さの整数倍数に相当する請求の範囲第 59項に記載の製品。 66.前記の第一中間層、前記の第二中間層、前記の第三中間層、前記の第五中 間層、前記の第一ダイヤモンド状炭素層及び前記の第二ダイヤモンド状炭素層の 厚さが、前もって決めた波長における四分の一波長の光学的厚さの整数倍数に相 当する請求の範囲第59項に記載の製品。 67.アモルファス材料、単結晶、多結晶材料、ガラス、塩材料、セラミック材 料及びこれらの混合物からなる群から選ばれた材料を含む母基材の表面を化学的 に脱脂して炭化水素汚染物質を除去し;前記の基材を化学蒸着反応器真空室に入 れ、前記の室から空気を約5×10−6トール未満まで排気し; 前記の基材の表面を少なくとも200eVのエネルギーの強力なガスイオンでス パッターエッチングして痕跡量の残留炭化水素を除去し、かつ基材表面のアルカ リ金属原子及びアルカリ金属酸化物の濃度を優先的に減少し;前記の第一サイク ル中に前記の基材及び前記のダイヤモンド状炭素に対して強い化学結合を形成し 得る少なくとも10Åの実質的に光学上透明な第一中間層を基材上に化学蒸着し ; 前記の第一サイクル中に前記の被覆された基材上に少なくとも約200Åの厚さ を有する実質的に光学上透明なダイヤモンド状炭素層を化学蒸着し;前記の付着 工程を停止し、そして前記の基材の温度が前記の冷却工程中に実質的に室温に達 するまで不活性ガスを前記の基材に通すことにより前記の被覆基材を冷却し; 優れた耐摩耗性を示す被覆された基材製品を回収することを特徴とする耐磨耗性 の被覆された基材製品を製造するための化学蒸着法。 68.前記のダイヤモンド状炭素層の厚さが、前もって決めた波長における四分 の一波長の光学的厚さの整数倍数に相当する請求の範囲第67項に記載の方法。 69.前記の第一中間層及び前記のダイヤモンド状炭素層の厚さが、前もって決 めた波長における四分の一波長の光学的厚さの整数倍数に相当する請求の範囲第 67項に記載の方法。 70.少なくとも第二のサイクルを使用して前記の基材上に少なくとも第二の前 記の第一中間層及び第二の前記のダイヤモンド状炭素層を化学蒸着する請求の範 囲第67項に記載の方法。 71.前記の第一中間層及び前記のダイヤモンド状炭素層の付着速度が一般に約 0.1〜10ミクロン/時間の範囲である請求の範囲第67項に記載の方法。 72.前記の第一中間層への強い化学結合及びダイヤモンド状炭素への強い化学 結合を形成し得る実質的に光学上透明な材料の少なくとも10Åの厚さの第二中 間層を前記の第一中間層に直に隣接し、前記の基材から離れて化学蒸着する請求 の範囲第67項に記載の方法。 73.前記のダイヤモンド状炭素層を前記の第二中間層に直に隣接し、前記の基 材から離れて化学蒸着する請求の範囲第72項に記載の方法。 74.前記の第二中間層の付着速度が一般に約0.1〜10ミクロン/時間の範 囲である請求の範囲第72項に記載の方法。 75.前記の第二中間層及び前記のダイヤモンド状炭素層の厚さが、前もって決 めた波長における四分の一波長の光学的厚さの整数倍数に相当する請求の範囲第 73項に記載の方法。 76.前記の第一中間層、前記の第二中間層及び前記のダイヤモンド状炭素層の 厚さが、前もって決めた波長における四分の一波長の光学的厚さの整数倍数に相 当する請求の範囲第73項に記載の方法。 77.二つの異なる別々に蒸着された前記の第二中間層を前記の基材上に化学蒸 着し、そして前記のダイヤモンド状炭素層を前記の複数の第二中間層の上に化学 蒸着する請求の範囲第67項に記載の方法。 78.第二サイクルを使用して少なくとも第二の前記の第一中間層及び第二の前 記のダイヤモンド状炭素層を前記の被覆基材の上に化学蒸着する請求の範囲第7 3項に記載の方法。 79.第二サイクルを使用して少なくとも第二の前記の第一中間層及び第二の前 記のダイヤモンド状炭素層を前記の被覆基材の上に化学蒸着する請求の範囲第7 7項に記載の方法。
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US07/589,447 US5135808A (en) | 1990-09-27 | 1990-09-27 | Abrasion wear resistant coated substrate product |
PCT/US1991/006866 WO1992005951A1 (en) | 1990-09-27 | 1991-09-20 | Abrasion wear resistant coated substrate product |
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EP (1) | EP0550630B1 (ja) |
JP (1) | JP3312148B2 (ja) |
AT (1) | ATE190005T1 (ja) |
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Cited By (7)
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JP2003027215A (ja) * | 2001-07-12 | 2003-01-29 | Shimadzu Corp | 保護膜成膜方法、保護膜成膜装置および保護膜 |
JP4576765B2 (ja) * | 2001-07-12 | 2010-11-10 | 株式会社島津製作所 | 保護膜成膜方法、保護膜成膜装置および保護膜 |
JP2013501219A (ja) * | 2009-07-29 | 2013-01-10 | ウオーターズ・テクノロジーズ・コーポレイシヨン | 被覆されたステータ表面を有する回転シアーインジェクタ弁 |
JP2015508510A (ja) * | 2011-12-28 | 2015-03-19 | コルポラシオン ドゥ レコール ポリテクニーク ドゥ モントリオール | 経時的に安定している性質を有する干渉コーティングでコートされた物品 |
JP2017523949A (ja) * | 2014-07-22 | 2017-08-24 | インテヴァック インコーポレイテッド | 耐引っかき性/耐摩耗性と撥油性とが改良されたガラス用コーティング |
WO2020031250A1 (ja) * | 2018-08-07 | 2020-02-13 | 株式会社大木工藝 | レンズ及びレンズの製造方法 |
JP6708868B1 (ja) * | 2018-08-07 | 2020-06-10 | 株式会社大木工藝 | レンズ及びレンズの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CA2090109C (en) | 2001-05-29 |
JP3312148B2 (ja) | 2002-08-05 |
WO1992005951A1 (en) | 1992-04-16 |
EP0550630A4 (ja) | 1995-01-25 |
DE69132010D1 (de) | 2000-04-06 |
DE69132010T2 (de) | 2000-11-16 |
ATE190005T1 (de) | 2000-03-15 |
EP0550630B1 (en) | 2000-03-01 |
CA2090109A1 (en) | 1992-03-28 |
US5135808A (en) | 1992-08-04 |
EP0550630A1 (en) | 1993-07-14 |
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