JPS6465092A - Formation of thin diamond film - Google Patents

Formation of thin diamond film

Info

Publication number
JPS6465092A
JPS6465092A JP22073587A JP22073587A JPS6465092A JP S6465092 A JPS6465092 A JP S6465092A JP 22073587 A JP22073587 A JP 22073587A JP 22073587 A JP22073587 A JP 22073587A JP S6465092 A JPS6465092 A JP S6465092A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
base body
target
surface
formed
diamond film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22073587A
Inventor
Akira Ueno
Makoto Kitahata
Tomiyo Fukuda
Osamu Yamazaki
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE:To form a good-quality thin diamond film with good reproducibility by previously forming a metal carbide on the surface of a base body at the time of forming the thin diamond film by a vapor growth method on the surface of the base body. CONSTITUTION:Ar is introduced from an introducing port 19 into an ion source 11 and the inside of a vacuum chamber 15 is evacuated and is maintained under a required pressure. Electric discharge is generated in the source 11 to accelerate ions to prescribed energy. These ions are then taken out. An ion beam 12 advances rectilinearly so that the beam is projected to a target 13 mixture composed of Ti and carbon to sputter the target 13, by which the surface of the base body 14 is coated with TiC. The target 13 is thereafter changed to carbon which is so set as to be paralleled with the ion beam 12. The high- density diamond is thus formed on the base body 14 formed with TiC. The base body 14 is kept at a room temp. in this case and the diamond is efficiently formed at room temp.
JP22073587A 1987-09-03 1987-09-03 Formation of thin diamond film Pending JPS6465092A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22073587A JPS6465092A (en) 1987-09-03 1987-09-03 Formation of thin diamond film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22073587A JPS6465092A (en) 1987-09-03 1987-09-03 Formation of thin diamond film

Publications (1)

Publication Number Publication Date
JPS6465092A true true JPS6465092A (en) 1989-03-10

Family

ID=16755706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22073587A Pending JPS6465092A (en) 1987-09-03 1987-09-03 Formation of thin diamond film

Country Status (1)

Country Link
JP (1) JPS6465092A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0397697A (en) * 1989-05-31 1991-04-23 De Beers Ind Diamond Div Ltd Production of diamond or diamond-like film
WO1992005951A1 (en) * 1990-09-27 1992-04-16 Diamonex, Incorporated Abrasion wear resistant coated substrate product
WO1992006843A1 (en) * 1990-10-18 1992-04-30 Diamonex, Incorporated Abrasion wear resistant polymeric substrate product
US5455081A (en) * 1990-09-25 1995-10-03 Nippon Steel Corporation Process for coating diamond-like carbon film and coated thin strip
US6899828B2 (en) * 1999-05-10 2005-05-31 Nanyang Technological University Composite coatings

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0397697A (en) * 1989-05-31 1991-04-23 De Beers Ind Diamond Div Ltd Production of diamond or diamond-like film
US5455081A (en) * 1990-09-25 1995-10-03 Nippon Steel Corporation Process for coating diamond-like carbon film and coated thin strip
WO1992005951A1 (en) * 1990-09-27 1992-04-16 Diamonex, Incorporated Abrasion wear resistant coated substrate product
WO1992006843A1 (en) * 1990-10-18 1992-04-30 Diamonex, Incorporated Abrasion wear resistant polymeric substrate product
US6899828B2 (en) * 1999-05-10 2005-05-31 Nanyang Technological University Composite coatings

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